{"id":160475,"date":"2018-12-03T06:30:32","date_gmt":"2018-12-02T22:30:32","guid":{"rendered":"http:\/\/www.cailiaoniu.com\/?p=160475"},"modified":"2018-12-02T16:41:00","modified_gmt":"2018-12-02T08:41:00","slug":"%e3%80%90%e5%b7%b2%e6%a0%a1%e3%80%91%e5%8c%97%e4%ba%ac%e5%a4%a7%e5%ad%a6%e5%88%98%e5%bf%a0%e8%8c%83%e9%99%a2%e5%a3%abadv-mater-%e7%bb%bc%e8%bf%b0%ef%bc%9a%e4%bc%a0%e7%bb%9f%e7%8e%bb%e7%92%83%e8%a1%a8","status":"publish","type":"post","link":"http:\/\/www.cailiaoniu.com\/?p=160475","title":{"rendered":"\u5317\u4eac\u5927\u5b66\u5218\u5fe0\u8303\u9662\u58ebAdv. Mater.\u7efc\u8ff0\uff1a\u4f20\u7edf\u73bb\u7483\u8868\u9762\u4e0a\u7684\u77f3\u58a8\u70efCVD\u751f\u957f\u65b9\u6cd5\u548c\u673a\u7406"},"content":{"rendered":"<p><strong>\u3010\u524d\u8a00\u3011<\/strong><\/p>\n<p>\u91d1\u5c5e\u8868\u9762\u4e0a\u7684\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\uff08CVD\uff09\u88ab\u8ba4\u4e3a\u662f\u83b7\u5f97\u5927\u9762\u79ef\u3001\u9ad8\u8d28\u91cf\u77f3\u58a8\u70ef\u8584\u819c\u7684\u6700\u6709\u6548\u65b9\u6cd5\u3002\u4e3a\u5b9e\u73b0\u77f3\u58a8\u70ef\u8584\u819c\u7684\u5e94\u7528\uff0c\u9700\u8981\u5c06\u77f3\u58a8\u70ef\u4ece\u4ece\u751f\u957f\u7684\u91d1\u5c5e\u886c\u5e95\u8f6c\u79fb\u81f3\u76ee\u6807\u886c\u5e95\uff08\u4f8b\u5982\uff0c\u805a\uff08\u5bf9\u82ef\u4e8c\u7532\u9178\u4e59\u4e8c\u9187\u916f\uff09\uff08PET\uff09\u3001\u73bb\u7483\u548cSiO2 \/ Si\uff09\uff0c\u6b64\u8fc7\u7a0b\u8017\u65f6\u8d39\u529b\u800c\u4e14\u8fd8\u4f1a\u4e25\u91cd\u635f\u574f\u77f3\u58a8\u70ef\u7684\u8d28\u91cf\u3002\u800c\u5728\u76ee\u6807\u886c\u5e95\u4e0a\u5b9e\u73b0\u77f3\u58a8\u70ef\u7684\u76f4\u63a5\u751f\u957f\uff0c\u53ef\u4ee5\u907f\u514d\u7e41\u7410\u7684\u8f6c\u79fb\u8fc7\u7a0b\u3002\u5728\u6b64\u9009\u62e9\u73bb\u7483\u4f5c\u4e3a\u77f3\u58a8\u70ef\u751f\u957f\u886c\u5e95\uff0c\u5728\u4fdd\u8bc1\u73bb\u7483\u900f\u660e\u7684\u524d\u63d0\u4e0b\uff0c\u8d4b\u4e88\u4f20\u7edf\u73bb\u7483\u4f18\u5f02\u7684\u5bfc\u7535\u6027\u548c\u5bfc\u70ed\u6027\u3002\u201c\u8d85\u7ea7\u77f3\u58a8\u70ef\u73bb\u7483\u201d\u4f5c\u4e3a\u77f3\u58a8\u70ef\u548c\u73bb\u7483\u7684\u5b8c\u7f8e\u7ec4\u5408 \uff0c\u5728\u57fa\u7840\u7814\u7a76\u548c\u65e5\u5e38\u751f\u6d3b\u5e94\u7528\u65b9\u9762\u90fd\u5f15\u8d77\u4e86\u7814\u7a76\u4eba\u5458\u6781\u5927\u7684\u5174\u8da3\u3002\u672c\u6587\u603b\u7ed3\u4e86\u73bb\u7483\u8868\u9762\u4e0a\u77f3\u58a8\u70ef\u7684\u751f\u957f\u65b9\u6cd5\u4ee5\u53ca\u7279\u6b8a\u751f\u957f\u673a\u7406\u3002\u751f\u957f\u65b9\u6cd5\u53ef\u4ee5\u5f52\u7eb3\u4e3a\u56db\u5927\u7c7b\uff1a\u76f4\u63a5\u70edCVD\u751f\u957f\u3001\u7194\u878d\u5e8aCVD\u751f\u957f\u3001\u91d1\u5c5e\u50ac\u5316\u8f85\u52a9\u751f\u957f\u548c\u7b49\u79bb\u5b50\u4f53\u589e\u5f3a\u751f\u957f\u65b9\u6cd5\u3002\u672c\u6587\u91cd\u70b9\u8ba8\u8bba\u9488\u5bf9\u4e8e\u4e0d\u540c\u7684\u73bb\u7483\u886c\u5e95\uff0c\u5176\u9002\u7528\u7684\u4e0d\u540c\u751f\u957f\u65b9\u6cd5\uff0c\u5e26\u9886\u8bfb\u8005\u5168\u9762\u4e86\u89e3\u975e\u91d1\u5c5e\u73bb\u7483\u886c\u5e95\u4e0a\u77f3\u58a8\u70ef\u7684\u751f\u957f\u8fd1\u51b5\u4ee5\u53ca\u201c\u8d85\u7ea7\u77f3\u58a8\u70ef\u73bb\u7483\u201d\u7814\u7a76\u7684\u6700\u65b0\u8fdb\u5c55\u3002<\/p>\n<p><strong>\u3010\u6210\u679c\u7b80\u4ecb\u3011<\/strong><\/p>\n<p>\u8fd1\u65e5\uff0c<strong>\u5317\u4eac\u5927\u5b66\u5218\u5fe0\u8303\u9662\u58eb<\/strong>\uff08\u901a\u8baf\u4f5c\u8005\uff09\u7b49\u4eba\u5728<strong>\u6750\u6599\u9886\u57df\u9876\u520aAdvanced Materials<\/strong>\u4e0a\u53d1\u8868\u4e86\u9898\u4e3a\u201c<strong>Direct CVD Growth of Graphene on Traditional Glass: Methods and Mechanisms<\/strong>\u201d\u7684\u7efc\u8ff0\u3002\u5218\u9662\u58eb\u7684\u56e2\u961f\u5e0c\u671b\u4e3a\u5927\u5bb6\u63d0\u4f9b\u5728\u5404\u79cd\u5546\u4e1a\u73bb\u7483\u4e0aCVD\u6cd5\u76f4\u63a5\u751f\u957f\u77f3\u58a8\u70ef\u7684\u6280\u672f\u7efc\u5408\u6307\u5357\u3002\u672c\u6587\u4ece\u77f3\u58a8\u70ef\u5728\u73bb\u7483\u4e0a\u751f\u957f\u7684\u57fa\u672c\u8fc7\u7a0b\u548c\u6311\u6218\u5f00\u59cb\uff0c\u5bf9\u4e8e\u8f6f\u5316\u70b9\u8d85\u8fc71000\u2103\u7684\u8010\u9ad8\u6e29\u73bb\u7483\uff0c\u5982\u77f3\u82f1\u6216\u84dd\u5b9d\u77f3\u73bb\u7483\uff0c\u53ef\u4ee5\u901a\u8fc7\u78b3\u524d\u4f53\u5728\u9ad8\u6e29\u4e0b\u7684\u975e\u50ac\u5316\u70ed\u5206\u89e3\u5b9e\u73b0\u77f3\u58a8\u70ef\u7684\u751f\u957f\u3002\u5bf9\u4e8e\u666e\u901a\u73bb\u7483\uff0c\u5982\u94a0\u9499\u73bb\u7483\uff0c\u5176\u8f6f\u5316\u70b9\u8fdc\u4f4e\u4e8e\u4f4e\u4e8e\u77f3\u58a8\u70ef\u7684\u751f\u957f\u6e29\u5ea6\uff0c\u5219\u53d1\u5c55\u4e86\u7194\u878d\u5e8aCVD\u6280\u672f\u3002\u5728\u8fd9\u79cd\u60c5\u51b5\u4e0b\uff0c\u53d1\u73b0\u7194\u878d\u7684\u73bb\u7483\u8868\u9762\u6709\u5229\u4e8e\u78b3\u7269\u8d28\u7684\u5feb\u901f\u8fc1\u79fb\uff0c\u56e0\u6b64\u5927\u5927\u63d0\u9ad8\u4e86\u77f3\u58a8\u70ef\u7684\u751f\u957f\u901f\u7387\u3002\u4e3a\u63d0\u5347\u201c\u77f3\u58a8\u70ef\u5728\u73bb\u7483\u886c\u5e95\u4e0a\u7684\u751f\u957f\u8d28\u91cf\uff0c\u5219\u53ef\u4ee5\u5f15\u5165\u91d1\u5c5e\u50ac\u5316\u5242\uff0c\u5229\u7528\u91d1\u5c5e\u50ac\u5316\u4f5c\u7528\u5b9e\u73b0\u9ad8\u54c1\u8d28\u77f3\u58a8\u70ef\u7684\u751f\u957f\u3002\u7b49\u79bb\u5b50\u4f53\u589e\u5f3aCVD\uff08PECVD\uff09\u6280\u672f\u5219\u53ef\u4ee5\u5b9e\u73b0\u73bb\u7483\u886c\u5e95\u4e0a\u77f3\u58a8\u70ef\u7684\u4f4e\u6e29\u751f\u957f\u3002\u6700\u540e\u4ece\u5927\u89c4\u6a21\u751f\u4ea7\u201c\u8d85\u7ea7\u77f3\u58a8\u70ef\u73bb\u7483\u201d\u7684\u89d2\u5ea6\u8ba8\u8bba\uff0c\u672a\u6765\u5b9e\u9645\u5e94\u7528\u4e2d\u9762\u4e34\u7684\u6311\u6218\u3002<\/p>\n<p><strong>\u3010\u56fe\u6587\u5bfc\u8bfb\u3011<\/strong><\/p>\n<p><strong>1<\/strong><strong>\u3001\u77f3\u58a8\u70ef\u5728\u73bb\u7483\u4e0a\u751f\u957f\u7684\u6280\u672f\u6311\u6218<\/strong><\/p>\n<p>\u56fe1 \u77f3\u58a8\u70ef\u751f\u957f\u7684\u793a\u610f\u56fe<\/p>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"size-full wp-image-160476 aligncenter\" src=\"http:\/\/www.cailiaoniu.com\/wp-content\/uploads\/2018\/11\/1-18.png\" alt=\"\" width=\"600\" height=\"194\" srcset=\"http:\/\/www.cailiaoniu.com\/wp-content\/uploads\/2018\/11\/1-18.png 600w, http:\/\/www.cailiaoniu.com\/wp-content\/uploads\/2018\/11\/1-18-300x97.png 300w\" sizes=\"(max-width: 600px) 100vw, 600px\" \/><\/p>\n<p>Cu\uff08111\uff09\uff08a\uff09\u548c\u77f3\u82f1\u73bb\u7483\uff08b\uff09\u4e0a\u77f3\u58a8\u70ef\u751f\u957f\u7684\u793a\u610f\u56fe\u3002 \u77f3\u58a8\u70ef\u5728Cu\u4e0a\u751f\u957f\u7684\u57fa\u672c\u6b65\u9aa4\u5305\u62ec\u91d1\u5c5e\u50ac\u5316\u7684CH4\u5206\u89e3\u3001Cu\u4e0a\u78b3\u539f\u5b50\u7684\u5feb\u901f\u8fc1\u79fb\uff0c\u80fd\u5792\u4e3a\u22480.06eV\uff0c\u77f3\u58a8\u70ef\u5728Cu\u7f3a\u9677\u548c\u6676\u754c\u5904\u6210\u6838\uff0c\u4ee5\u53caCu\u539f\u5b50\u50ac\u5316\u7684\u7574\u533a\u6269\u5c55\u751f\u957f\u3002\u5bf9\u4e8e\u77f3\u58a8\u70ef\u5728\u73bb\u7483\u8868\u9762\u4e0a\u7684\u751f\u957f\uff0c\u57fa\u672c\u6b65\u9aa4\u5305\u62ecCH4\u5206\u5b50\u7684\u70ed\u5206\u89e3\uff0c\u78b3\u539f\u5b50\u5728\u73bb\u7483\u8868\u9762\u7684\u7f13\u6162\u8fc1\u79fb\uff0c\uff0c\u80fd\u5792\u4e3a\u22481.0 eV\uff0c\u901a\u8fc7C\u2014O\u952e\u5408\u5b9e\u73b0\u77f3\u58a8\u70ef\u6210\u6838\uff0c\u4ee5\u53ca\u77f3\u58a8\u70ef\u8fb9\u7f18\u7684\u76f4\u63a5\u751f\u957f\u62fc\u63a5\u3002<\/p>\n<p><strong>2<\/strong><strong>\u3001\u77f3\u58a8\u70ef\u5728\u8010\u9ad8\u6e29\u73bb\u7483\u4e0a\u7684\u751f\u957f<\/strong><\/p>\n<p><strong>2-1 \u5e38\u538bCVD\u65b9\u6cd5<\/strong><\/p>\n<p>\u56fe2 \u77f3\u58a8\u70ef\u5728\u8010\u9ad8\u6e29\u73bb\u7483\u4e0a\u7684\u76f4\u63a5APCVD\u751f\u957f<\/p>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"size-full wp-image-160477 aligncenter\" src=\"http:\/\/www.cailiaoniu.com\/wp-content\/uploads\/2018\/11\/2-16.png\" alt=\"\" width=\"600\" height=\"312\" srcset=\"http:\/\/www.cailiaoniu.com\/wp-content\/uploads\/2018\/11\/2-16.png 600w, http:\/\/www.cailiaoniu.com\/wp-content\/uploads\/2018\/11\/2-16-300x156.png 300w\" sizes=\"(max-width: 600px) 100vw, 600px\" \/><\/p>\n<p>a\uff09\u787c\u7845\u73bb\u7483\u5728\u77f3\u58a8\u70ef\u751f\u957f\u4e4b\u524d\uff08\u6700\u5de6\u4fa7\uff09\u548c\u4e4b\u540e\u7684\u7167\u7247\uff0cCH4\u6d41\u901f\u5206\u522b\u4e3a2\u548c7.5 sccm\uff08Ar \/ H2\uff1a100 \/ 50 sccm\uff0c1000\u2103\uff0c2\u5c0f\u65f6\uff09\uff1b<br \/>\n b\uff09\u5728\u4e0d\u540c\u7c7b\u578b\u7684\u8010\u9ad8\u6e29\u73bb\u7483\u4e0a\u751f\u957f\u7684\u77f3\u58a8\u70ef\u7684\u5178\u578b\u62c9\u66fc\u5149\u8c31\uff08Ar \/ H2 \/ CH4\uff1a100\/50\/ 6.3sccm\uff0c\u57281000\u2103\u4e0b2\u5c0f\u65f6\uff09\uff1b<br \/>\n c\uff09\u77f3\u82f1\u73bb\u7483\u4e0a\u751f\u957f\u7684\u77f3\u58a8\u70ef\u8584\u819c\u7684\u5149\u5b66\u900f\u8fc7\u7387\u5149\u8c31\uff0c\u5728550nm\u4e0b\u7684\u5149\u5b66\u900f\u8fc7\u7387\u4e3a96.3\uff05\uff1b<br \/>\n d\uff09\u73bb\u7483\u4e0a\u76f4\u63a5\u751f\u957f\u7684\u77f3\u58a8\u70ef\u8584\u819c\u7684TEM\u56fe\u50cf\uff0c\u5176\u4e3a\u5355\u5c42\u3001\u53cc\u5c42\u548c\u4e09\u5c42\u77f3\u58a8\u70ef\u7684\u6df7\u5408\u819c\uff1b <br \/>\n e\uff09\u4e0d\u540c\u751f\u957f\u6e29\u5ea6\u4e0b\uff0c\u84dd\u5b9d\u77f3\u73bb\u7483\u4e0a\u751f\u957f\u7684\u77f3\u58a8\u70ef\u8584\u819c\u7684\u62c9\u66fc\u5149\u8c31\u3002<\/p>\n<p>\u56fe3 \u901a\u8fc7\u6df7\u5408CVD\u5de5\u827a\u5728\u73bb\u7483\u4e0a\u751f\u957f\u77f3\u58a8\u70ef<\/p>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"size-full wp-image-160478 aligncenter\" src=\"http:\/\/www.cailiaoniu.com\/wp-content\/uploads\/2018\/11\/3-16.png\" alt=\"\" width=\"600\" height=\"333\" srcset=\"http:\/\/www.cailiaoniu.com\/wp-content\/uploads\/2018\/11\/3-16.png 600w, http:\/\/www.cailiaoniu.com\/wp-content\/uploads\/2018\/11\/3-16-300x167.png 300w\" sizes=\"(max-width: 600px) 100vw, 600px\" \/>a\uff09\u6c14\u6d41\u9650\u57df\u5b9e\u9a8c\u8bbe\u8ba1\u793a\u610f\u56fe\uff1a\u5c06\u78e8\u7802\u77f3\u82f1\u677f\u653e\u7f6e\u5728\u76ee\u6807\u73bb\u7483\u57fa\u677f\u4e0a\uff0c\u5f62\u62102-4\u03bcm\u7684\u95f4\u9699\uff1b<br \/>\n b\uff0cc\uff09\u4f7f\u7528\u6c14\u6d41\u9650\u57dfCVD\uff08b\uff09\u548c\u5e38\u89c4APCVD\uff08c\uff09\u6cd5\u5728\u751f\u957f45\u5206\u949f\u540e\u77f3\u82f1\u73bb\u7483\u4e0a\u77f3\u58a8\u70ef\u6210\u6838\u7684SEM\u56fe\u50cf\uff1b<br \/>\n d\uff09\u4f7f\u7528\u6c14\u6d41\u9650\u57dfCVD\u6cd5\u5728\u77f3\u82f1\u73bb\u7483\u4e0a\u751f\u957f\u7684\u77f3\u58a8\u70ef\u7684SEM\u56fe\u50cf\uff0c\u751f\u957f\u65f6\u95f4\u4e3a75\u5206\u949f\u3002 \u6240\u6709\u5176\u4ed6\u751f\u957f\u53c2\u6570\u4fdd\u6301\u76f8\u540c\uff08\u22481040\u00b0C\uff0cAr \/ H2 \/ CH4\uff1a150\/30\/10 sccm\uff09\uff0c\u6bd4\u4f8b\u5c3a\uff1a2 \u03bcm\uff1b e\uff09\u901a\u8fc7\u6c14\u6d41\u9650\u57dfCVD\u6cd5\u5728\u77f3\u82f1\u73bb\u7483\u4e0a\u751f\u957f\u7684\u77f3\u58a8\u70ef\u8584\u819c\u7684\u5149\u5b66\u663e\u5fae\u56fe\u50cf\uff08\u5728\u8f6c\u79fb\u5230SiO 2 \/ Si\u886c\u5e95\u4e0a\u4e4b\u540e\uff09\u3002\u6bd4\u4f8b\u5c3a\uff1a10\u03bcm\uff1b<br \/>\n f\uff09\u4f7f\u7528\u6c14\u6d41\u9650\u57dfCVD\u6cd5\u83b7\u5f97\u7684\u77f3\u58a8\u70ef\u73bb\u7483\u7684\u62c9\u66fc\u5149\u8c31\u3002<\/p>\n<p><strong>2-2 <\/strong><strong>\u4f4e\u538b<\/strong><strong>CVD<\/strong><strong>\u8def\u7ebf<\/strong><\/p>\n<p>\u56fe4 \u901a\u8fc7\u57fa\u4e8e\u4e59\u9187\u7684LPCVD\u9014\u5f84\u751f\u957f\u77f3\u58a8\u70ef\u73bb\u7483<\/p>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"size-full wp-image-160479 aligncenter\" src=\"http:\/\/www.cailiaoniu.com\/wp-content\/uploads\/2018\/11\/4-14.png\" alt=\"\" width=\"600\" height=\"313\" srcset=\"http:\/\/www.cailiaoniu.com\/wp-content\/uploads\/2018\/11\/4-14.png 600w, http:\/\/www.cailiaoniu.com\/wp-content\/uploads\/2018\/11\/4-14-300x157.png 300w\" sizes=\"(max-width: 600px) 100vw, 600px\" \/><\/p>\n<p>a\uff09\u77f3\u58a8\u70ef\u5728\u73bb\u7483\u4e0a\u751f\u957f\u6240\u6d89\u53ca\u7684\u57fa\u672c\u6b65\u9aa4\u7684\u793a\u610f\u56fe\uff0c\u5305\u62ec\u4e0a\u6e38\u78b3\u524d\u4f53\u7684\u70ed\u5206\u89e3\u548c\u5b83\u4eec\u5411\u73bb\u7483\u8868\u9762\u7684\u4f20\u8f93\uff0c\u6d3b\u6027\u78b3\u7269\u79cd\u901a\u8fc7\u8fb9\u754c\u5c42\u5438\u9644\u5230\u73bb\u7483\u8868\u9762\u4e0a\u548c\u8fc1\u79fb\uff0c\u77f3\u58a8\u70ef\u5728\u73bb\u7483\u4e0a\u7684\u6210\u6838\u3001\u751f\u957f\uff0c\u4ee5\u53ca\u78b3\u7269\u79cd\u901a\u8fc7\u8fb9\u754c\u5c42\u4ece\u73bb\u7483\u8868\u9762\u8131\u9644\u5e76\u5411\u4e0b\u6e38\u8f93\u9001\uff1b<br \/>\n b\uff09\u901a\u8fc7\u57fa\u4e8e\u7532\u70f7\u7684APCVD\uff08\u4e0a\u56fe\uff09\u548c\u57fa\u4e8e\u4e59\u9187\u7684LPCVD\uff08\u4e0b\u56fe\uff09\u65b9\u6cd5\u83b7\u5f97\u768425\u82f1\u5bf8\u957f\u77f3\u58a8\u70ef\u73bb\u7483\u4e0a\u7684\u7167\u7247\u3002<\/p>\n<p>c\uff09\u4e59\u9187\u7684\u70ed\u5206\u89e3\u8fc7\u7a0b\u548c\u5728800\u2103\uff0c1.3kPa\u6761\u4ef6\u4e0b\u7684\u88c2\u89e3\u4ea7\u7269\uff1b<br \/>\n d\uff09\u901a\u8fc7\u57fa\u4e8e\u4e59\u9187\u7684LPCVD\u548c\u57fa\u4e8e\u7532\u70f7\u7684APCVD\u65b9\u6cd5\uff0c\u73bb\u7483\u8868\u9762\u77f3\u58a8\u70ef\u8584\u819c\u7684\u8986\u76d6\u5ea6\u968f\u65f6\u95f4\u7684\u53d8\u5316\u66f2\u7ebf\uff1b <br \/>\n e\uff09\u57fa\u4e8e\u4e59\u9187\u7684LPCVD\u65b9\u6cd5\u83b7\u5f97\u7684\u77f3\u58a8\u70ef\u73bb\u7483\u7684\u62c9\u66fc\u5149\u8c31\uff0c\u5176\u4ece\uff08b\uff09\u4e2d\u6807\u8bb0\u4e3aA-G\u7684\u4f4d\u7f6e\u6536\u96c6\u3002<\/p>\n<p><strong>3<\/strong><strong>\u3001\u7194\u878d\u73bb\u7483\u4e0a\u7684\u77f3\u58a8\u70ef\u751f\u957f<\/strong><\/p>\n<p>\u56fe5 \u77f3\u58a8\u70ef\u5728\u7194\u878d\u7684\u94a0\u9499\u73bb\u7483\u8868\u9762\u4e0a\u7684\u751f\u957f<\/p>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"size-full wp-image-160480 aligncenter\" src=\"http:\/\/www.cailiaoniu.com\/wp-content\/uploads\/2018\/11\/5-14.png\" alt=\"\" width=\"600\" height=\"300\" srcset=\"http:\/\/www.cailiaoniu.com\/wp-content\/uploads\/2018\/11\/5-14.png 600w, http:\/\/www.cailiaoniu.com\/wp-content\/uploads\/2018\/11\/5-14-300x150.png 300w\" sizes=\"(max-width: 600px) 100vw, 600px\" \/><\/p>\n<p>a\uff09\u7194\u878d\u73bb\u7483\u4e0a\u4ece\u5747\u5300\u77f3\u58a8\u70ef\u7eb3\u7c73\u5706\u76d8\u5230\u8fde\u7eed\u6210\u819c\u7684\u5f62\u8c8c\u6f14\u53d8\uff08\u4ece\u5de6\u5230\u53f3\u7684\u76f8\u5e94\u6761\u4ef6\uff1a150 sccm Ar \/ 20sccm H2 \/ 8sccm CH4\u5728970\u2103\u4e0b1\u5c0f\u65f6; 150 sccm Ar \/ 15 sccm H2 \/ 5 sccm CH4\u57281000\u2103\u4e0b2\u5c0f\u65f6; 150 sccm Ar \/ 15sccm H2 \/ 6 sccm CH4\u57281020\u2103\u4e0b2\u5c0f\u65f6\uff09\uff1b<br \/>\n b\uff09\u6ee1\u5c42\u77f3\u58a8\u70ef\u8986\u76d6\u7684\u77f3\u58a8\u70ef\u73bb\u7483\u7684\u5b9e\u7269\u7167\u7247\uff1b<br \/>\n c\uff09\u7194\u878d\u73bb\u7483\u4e0a\u751f\u957f\u7684\u77f3\u58a8\u70ef\u8584\u819c\u5728\u8f6c\u79fb\u524d\u540e\u7684\u62c9\u66fc\u5149\u8c31\uff1b<br \/>\n d\uff09\u8f6c\u79fb\u540e\u77f3\u58a8\u70ef\u7247\u7684AFM\u9ad8\u5ea6\u56fe\u50cf\uff0c \u6bd4\u4f8b\u5c3a\uff1a200 nm\uff1b<br \/>\n e\uff09\u4f4e\u653e\u5927\u500d\u6570\u4e0b\u77f3\u58a8\u70ef\u8584\u819c\u7684TEM\u56fe\u50cf\u3002 \u6bd4\u4f8b\u5c3a\uff1a500 nm\u3002 \u63d2\u56fe\uff1aSAED\u56fe\uff1b<br \/>\n f\uff09\u77f3\u58a8\u70ef\u8584\u819c\u8fb9\u7f18\u7684\u7684\u9ad8\u5206\u8fa8\u7387TEM\uff08HR-TEM\uff09\u56fe\u50cf\uff0c\u8868\u660e\u5176\u4e3a\u5355\u5c42\uff0c \u6bd4\u4f8b\u5c3a\uff1a10nm\u3002<\/p>\n<p>\u56fe6 \u8fd1\u4f3c\u5706\u5f62\u77f3\u58a8\u70ef\u76d8\u5728\u7194\u878d\u73bb\u7483\u4e0a\u7684\u5feb\u901f\u3001\u5747\u5300\u751f\u957f<\/p>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"size-full wp-image-160725 aligncenter\" src=\"http:\/\/www.cailiaoniu.com\/wp-content\/uploads\/2018\/11\/15435565111.png\" alt=\"\" width=\"600\" height=\"586\" srcset=\"http:\/\/www.cailiaoniu.com\/wp-content\/uploads\/2018\/11\/15435565111.png 600w, http:\/\/www.cailiaoniu.com\/wp-content\/uploads\/2018\/11\/15435565111-300x293.png 300w\" sizes=\"(max-width: 600px) 100vw, 600px\" \/><\/p>\n<p>a\uff0cb\uff09\u77f3\u58a8\u70ef\u5728\u7194\u878d\u73bb\u7483\uff08a\uff09\u548c\u56fa\u4f53\u73bb\u7483\uff08b\uff09\u8868\u9762\u4e0a\u751f\u957f\u7684SEM\u56fe\u50cf\uff1b<br \/>\n c\uff09\u5728\u7194\u878d\u73bb\u7483\uff08\u7ea2\u8272\u67f1\uff09\u548c\u77f3\u82f1\u73bb\u7483\uff08\u84dd\u8272\u67f1\uff09\u4e0a\u751f\u957f\u7684\u77f3\u58a8\u70ef\u7684\u7574\u533a\u5c3a\u5bf8\u5206\u5e03\uff1b <br \/>\n d\uff09\u5728\u5178\u578b\u751f\u957f\u6761\u4ef6\uff08P\uff08H2\uff09\uff09= 0.09\u5df4\uff0cT = 1300K\uff09\u4e0b\u4e03\u4e2a\u6c22\u5316\u77f3\u58a8\u70ef\u8fb9\u7f18\u7684\u81ea\u7531\u80fd\uff1b<br \/>\n e\uff09\u57281300K\u4e0b\uff0c\u4e0d\u540cP\uff08H2\uff09\u4e0b\u7684\u6c22\u7ec8\u6b62\u77f3\u58a8\u70ef\u7574\u533a\u7684Wulff\u7ed3\u6784\u3002\u7ea2\u8272\u6807\u8bb0\u8303\u56f4\u4e3a\u5b9e\u9645\u5b9e\u9a8c\u6761\u4ef6\u3002<\/p>\n<p><strong>4\u3001\u91d1\u5c5e\u50ac\u5316\u8f85\u52a9\u77f3\u58a8\u70ef\u751f\u957f<\/strong><\/p>\n<p><strong>4-1 \u91d1\u5c5e\u84b8\u6c7d\u50ac\u5316\u77f3\u58a8\u70ef\u751f\u957f<\/strong><\/p>\n<p>\u56fe7 \u91d1\u5c5e-\u84b8\u6c14-\u50ac\u5316\u5242\u8f85\u52a9\u7684\u77f3\u58a8\u70ef\u5728\u73bb\u7483\u4e0a\u7684\u751f\u957f<\/p>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"size-full wp-image-160482 aligncenter\" src=\"http:\/\/www.cailiaoniu.com\/wp-content\/uploads\/2018\/11\/7-11.png\" alt=\"\" width=\"600\" height=\"462\" srcset=\"http:\/\/www.cailiaoniu.com\/wp-content\/uploads\/2018\/11\/7-11.png 600w, http:\/\/www.cailiaoniu.com\/wp-content\/uploads\/2018\/11\/7-11-300x231.png 300w\" sizes=\"(max-width: 600px) 100vw, 600px\" \/><\/p>\n<p>a\uff09Cu-\u84b8\u6c14-\u50ac\u5316\u77f3\u58a8\u70ef\u751f\u957f\u793a\u610f\u56fe\uff0c\u94dc\u7b94\u4f4d\u4e8e\u886c\u5e95\u4e0a\u6e38\uff1b <br \/>\n b\uff09\u6b64\u65b9\u6cd5\u6240\u5f97\u5230\u7684\u77f3\u58a8\u70ef\u8584\u819c\u7684TEM\u56fe\u50cf\uff1b <br \/>\n c\uff09\u77f3\u58a8\u70ef\u62c9\u66fcG\u5cf0\u5f3a\u5ea6\u968f\u6837\u54c1\u8ddd\u79bb\u50ac\u5316\u5242\u95f4\u8ddd\u7684\u53d8\u5316\u66f2\u7ebf\u3002\u751f\u957f\u6761\u4ef6\uff1aAr \/ H2 \/ CH4\uff1a230\/5\/30 sccm\uff0c1000\u2103\uff0c30\u5206\u949f\uff1b <br \/>\n d\uff09Cu-\u84b8\u6c14-\u50ac\u5316\u5242\u8f85\u52a9\u73bb\u7483\u4e0a\u77f3\u58a8\u70ef\u751f\u957f\u7684\u793a\u610f\u56fe\uff0c\u5176\u4e2d\u94dc\u7b94\u4f4d\u4e8e\u886c\u5e95\u6b63\u4e0a\u65b9\uff0c\u4f46\u65e0\u7269\u7406\u63a5\u89e6\uff1b<br \/>\n e\u6b64\u65b9\u6cd5\u6240\u5f97\u5230\u7684\u77f3\u58a8\u70ef\u8584\u819c\u7684\u62c9\u66fc\u5149\u8c31\u3002f\uff09 \u6b64\u65b9\u6cd5\u6240\u5f97\u5230\u76846cm\u00d74cm\u77f3\u58a8\u70ef\u73bb\u7483\u6837\u54c1\u7684\u7167\u7247\uff0c\u5176\u5149\u5b66\u900f\u8fc7\u7387\u4e3a97.1\uff05\uff1b<br \/>\n g\uff09\u77f3\u58a8\u70ef\u8584\u819c\u7684\u5149\u5b66\u663e\u5fae\u955c\u56fe\u50cf\uff08\u8f6c\u79fb\u5230300nm SiO2\/ Si\u886c\u5e95\u4e0a\uff09\u3002\u6bd4\u4f8b\u5c3a\uff1a10\u03bcm\uff1b<br \/>\n h\uff09\u77f3\u58a8\u70ef\u73bb\u7483\u7684\u7d2b\u5916-\u53ef\u89c1\u5149\u900f\u5c04\u5149\u8c31\u4e0e\u5bf9\u5e94\u7684\u9762\u7535\u963b\u503c\u3002<\/p>\n<p><strong>4-2 \u754c\u9762\u504f\u6790\u77f3\u58a8\u70ef\u751f\u957f<\/strong><\/p>\n<p>\u56fe8 \u77f3\u58a8\u70ef\u5728\u9884\u5148\u6c89\u79ef\u7684\u91d1\u5c5e\u5c42\u548c\u73bb\u7483\u7684\u754c\u9762\u5904\u7684\u504f\u6790\u751f\u957f<\/p>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"size-full wp-image-160483 aligncenter\" src=\"http:\/\/www.cailiaoniu.com\/wp-content\/uploads\/2018\/11\/8-9.png\" alt=\"\" width=\"600\" height=\"343\" srcset=\"http:\/\/www.cailiaoniu.com\/wp-content\/uploads\/2018\/11\/8-9.png 600w, http:\/\/www.cailiaoniu.com\/wp-content\/uploads\/2018\/11\/8-9-300x172.png 300w\" sizes=\"(max-width: 600px) 100vw, 600px\" \/><\/p>\n<p>a\uff09\u94dc\/\u73bb\u7483\u754c\u9762\u504f\u6790\u751f\u957f\u77f3\u58a8\u70ef\u793a\u610f\u56fe\uff1b<br \/>\n b\uff09Cu-\u77f3\u58a8\u70ef-SiO2\u754c\u9762\u7684\u622a\u9762TEM\u56fe\u50cf\u3002 \u751f\u957f\u6761\u4ef6\uff1aH2 \/ CH4\uff1a15\/75 sccm\uff0c900\u00b0C\uff0c800 mTorr\uff0c5\u5206\u949f\uff1b<br \/>\n c\uff09\u754c\u9762\u5904\u504f\u6790\u751f\u6210\u7684\u77f3\u58a8\u70ef\u7684\u62c9\u66fc\u5149\u8c31\uff08\u7531473nm\u6fc0\u53d1\uff09\u3002 \u63d2\u56fe\uff1a2\u82f1\u5bf8\u73bb\u7483\u4e0a\u77f3\u58a8\u70ef\u8584\u819c\u7167\u7247\uff1b<br \/>\n d\uff09\u954d\/\u73bb\u7483\u754c\u9762\u504f\u6790\u751f\u957f\u77f3\u58a8\u70ef\u7684\u793a\u610f\u56fe\uff1b<br \/>\n e\uff09\u5728\u4e0d\u540c\u6e29\u5ea6\uff0825-160\u2103\uff09\u4e0b\u754c\u9762\u504f\u6790\u751f\u957f\u7684\u77f3\u58a8\u70ef\u8584\u819c\u7684\u62c9\u66fc\u5149\u8c31\uff1b<br \/>\n f\uff09\u5728160\u2103\u4e0b\u751f\u957f\u7684\u77f3\u58a8\u70ef\u7684TEM\u56fe\u50cf\u3002<\/p>\n<p><strong>4-3 \u727a\u7272\u91d1\u5c5e\u9540\u5c42\u77f3\u58a8\u70ef\u751f\u957f\u65b9\u6cd5<\/strong><\/p>\n<p>\u56fe9 \u4f7f\u7528\u727a\u7272\u91d1\u5c5e\u6d82\u5c42\u65b9\u6cd5\u5728\u73bb\u7483\u4e0a\u751f\u957f\u77f3\u58a8\u70ef<\/p>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"size-full wp-image-160484 aligncenter\" src=\"http:\/\/www.cailiaoniu.com\/wp-content\/uploads\/2018\/11\/9-5.png\" alt=\"\" width=\"600\" height=\"308\" srcset=\"http:\/\/www.cailiaoniu.com\/wp-content\/uploads\/2018\/11\/9-5.png 600w, http:\/\/www.cailiaoniu.com\/wp-content\/uploads\/2018\/11\/9-5-300x154.png 300w\" sizes=\"(max-width: 600px) 100vw, 600px\" \/>a\uff09\u727a\u7272\u91d1\u5c5e\u9540\u5c42\u6cd5\u5728\u77f3\u82f1\u4e0a\u751f\u957f\u77f3\u58a8\u70ef\u7684\u793a\u610f\u56fe\uff1b <br \/>\n b-d\uff09\u5149\u5b66\u663e\u5fae\u955c\u56fe\u50cf\uff0c\u663e\u793a\u77f3\u82f1\u57fa\u5e95\u4e0a450nm\u539a\u7684Cu \u9540\u5c42\u7684\u5f62\u8c8c\u6f14\u53d8\uff0c\u751f\u957f\u65f6\u95f4\u4ece15,60\u589e\u52a0\u5230420\u5206\u949f\uff1b<br \/>\n e\uff09\u56fe\uff08f\uff09\u4e2d\u6807\u8bb0\u7684\u4e09\u4e2a\u4e0d\u540c\u70b9\u7684\u62c9\u66fc\u5149\u8c31\uff1b <br \/>\n f\uff09\u77f3\u58a8\u70ef\u73bb\u7483\u7684\u5149\u5b66\u56fe\u50cf\u3002 <br \/>\n g\uff09\u6b64\u65b9\u6cd5\u5f97\u5230\u7684\u77f3\u58a8\u70ef\u73bb\u7483\u7684EDX\u5206\u6790\u3002<\/p>\n<p><strong>4-4 \u91d1\u5c5e\u6709\u673a\u524d\u9a71\u4f53\u50ac\u5316\u77f3\u58a8\u70ef\u751f\u957f<\/strong><\/p>\n<p>\u56fe10 \u4f7f\u7528\u4e8c\u8302\u954d\u524d\u4f53\u5728h-BN \/ Cu\u7b94\u4e0a\u751f\u957f\u77f3\u58a8\u70ef<\/p>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"size-full wp-image-160485 aligncenter\" src=\"http:\/\/www.cailiaoniu.com\/wp-content\/uploads\/2018\/11\/10-6.png\" alt=\"\" width=\"600\" height=\"540\" srcset=\"http:\/\/www.cailiaoniu.com\/wp-content\/uploads\/2018\/11\/10-6.png 600w, http:\/\/www.cailiaoniu.com\/wp-content\/uploads\/2018\/11\/10-6-300x270.png 300w\" sizes=\"(max-width: 600px) 100vw, 600px\" \/>a\uff09\u4f7f\u7528\u4e8c\u8302\u954d\u524d\u4f53\u5728h-BN \/ Cu\u7b94\u4e0a\u751f\u957f\u77f3\u58a8\u70ef\u7684\u793a\u610f\u56fe\uff1b <br \/>\n b\uff0cc\uff09\u4e0d\u540c\u751f\u957f\u65f6\u95f4\u4e0b\uff0c\u5206\u522b\u91c7\u7528\u82ef\u7532\u9178\u548c\u4e8c\u8302\u954d\u4f5c\u4e3a\u524d\u4f53\u751f\u957f\u77f3\u58a8\u70ef\u7684SEM\u56fe\u50cf\uff0c\uff0c\u6bd4\u4f8b\u5c3a\uff1a5\u03bcm\uff1b<br \/>\n d\uff09\u4e0d\u540c\u524d\u9a71\u4f53\u4e0b\uff0c\u77f3\u58a8\u70ef\u7574\u533a\u5c3a\u5bf8\u968f\u65f6\u95f4\u7684\u53d8\u5316\u66f2\u7ebf\uff1b <br \/>\n e\uff09\u77f3\u58a8\u70ef\/ h-BN\u548c\u7eaf\u77f3\u58a8\u70ef\u8f6c\u79fb\u5230SiO2 \/ Si\u886c\u5e95\u4e0a\u7684\u62c9\u66fc\u5149\u8c31\u3002<\/p>\n<p><strong>5\u3001\u7b49\u79bb\u5b50\u4f53\u589e\u5f3a\u77f3\u58a8\u70ef\u751f\u957f<\/strong><\/p>\n<p><strong>5-1 \u5782\u76f4\u77f3\u58a8\u70ef\u751f\u957f<\/strong><\/p>\n<p>\u56fe11 \u901a\u8fc7PECVD\u65b9\u6cd5\u751f\u957f\u5782\u76f4\u77f3\u58a8\u70ef<\/p>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"size-full wp-image-160486 aligncenter\" src=\"http:\/\/www.cailiaoniu.com\/wp-content\/uploads\/2018\/11\/11-5.png\" alt=\"\" width=\"600\" height=\"327\" srcset=\"http:\/\/www.cailiaoniu.com\/wp-content\/uploads\/2018\/11\/11-5.png 600w, http:\/\/www.cailiaoniu.com\/wp-content\/uploads\/2018\/11\/11-5-300x164.png 300w\" sizes=\"(max-width: 600px) 100vw, 600px\" \/><\/p>\n<p>a\uff09\u5782\u76f4\u77f3\u58a8\u70ef\u5728\u73bb\u7483\u57fa\u677f\u4e0a\u76f4\u63a5\u751f\u957f\u7684\u793a\u610f\u56fe\u3002 \u63d2\u56fe\uff1a\u5927\u91cf\u7b49\u79bb\u5b50\u4f53\u4e0e\u73bb\u7483\u57fa\u677f\u7684\u7f3a\u9677\/\u5f2f\u66f2\u533a\u57df\u4e4b\u95f4\u7684\u9798\u6548\u5e94\u548c\u79bb\u5b50\u8f70\u51fb\uff1b <br \/>\n b\uff09\u5728\u94a0\u9499\u73bb\u7483\u4e0a\u76f4\u63a5\u751f\u957f\u7684\u5782\u76f4\u77f3\u58a8\u70ef\u7684SEM\u56fe\u50cf\uff08\u8fdc\u7a0b\u5c04\u9891PECVD\uff0c550\u2103\uff0c100W\uff0c10sccm CH4,1h\uff09\uff1b<br \/>\n c\uff09\u5728\u4e0d\u540c\u751f\u957f\u65f6\u95f4\u4e0b\u83b7\u5f97\u7684\u77f3\u58a8\u70ef\u73bb\u7483\u7684\u62c9\u66fc\u8868\u5f81\uff08\u76f4\u6d41PECVD\uff0c580\u2103\uff0c80W\uff0c40sccm CH4\uff09\uff1b<br \/>\n d\uff09\u901a\u8fc7PECVD\u65b9\u6cd5\u5236\u5907\u76844\u82f1\u5bf8\u6676\u5706\u7ea7\u77f3\u58a8\u70ef\u73bb\u7483\u7684\u7167\u7247\uff08\u8fdc\u7a0b\u5c04\u9891PECVD\uff0c550\u2103\uff0c100W\uff0c0.2Torr CH4\uff09\uff1b <br \/>\n e\uff09\u6587\u732e\u62a5\u9053\u7684PECVD\u6cd5\u5f97\u5230\u77f3\u58a8\u70ef\u8584\u819c\u9762\u7535\u963b\u4e0e\u900f\u8fc7\u7387\u53d8\u5316\u66f2\u7ebf\u3002<\/p>\n<p><strong>5-2 \u6c34\u5e73\u77f3\u58a8\u70ef\u751f\u957f<\/strong><\/p>\n<p>\u56fe12 \u901a\u8fc7\u6cd5\u62c9\u7b2c\u7b3c\u5b9e\u73b0PECVD\u4e2d\u751f\u957f\u6c34\u5e73\u77f3\u58a8\u70ef<\/p>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"size-full wp-image-160487 aligncenter\" src=\"http:\/\/www.cailiaoniu.com\/wp-content\/uploads\/2018\/11\/12-6.png\" alt=\"\" width=\"600\" height=\"421\" srcset=\"http:\/\/www.cailiaoniu.com\/wp-content\/uploads\/2018\/11\/12-6.png 600w, http:\/\/www.cailiaoniu.com\/wp-content\/uploads\/2018\/11\/12-6-300x211.png 300w\" sizes=\"(max-width: 600px) 100vw, 600px\" \/><\/p>\n<p>a\uff09\u6cd5\u62c9\u7b2c\u7b3c\u5b9e\u9a8c\u88c5\u7f6e\u7684\u793a\u610f\u56fe\u3002 \u63d2\u56fe\uff1a\u57fa\u4e8e\u94dc\u6ce1\u6cab\u7684\u6cd5\u62c9\u7b2c\u7b3c\u7684\u7167\u7247\uff0c\u5c3a\u5bf8\u4e3a15\u5398\u7c73\uff08\u957f\uff09\u00d710\u5398\u7c73\uff08\u5bbd\uff09\u00d72\u5398\u7c73\uff08\u9ad8\uff09\uff1b <br \/>\n b\uff0cc\uff09\u5728\u6ca1\u6709\uff08b\uff09\u548c\u6709\uff08c\uff09\u6cd5\u62c9\u7b2c\u7b3c\u4e0b\uff0c300V\u7535\u538b\u4e0b\u7684PECVD\u7cfb\u7edf\u4e2d\u6a21\u62df\u7535\u573a\u76842D\u5206\u5e03\uff1b<br \/>\n d\uff09\u73bb\u7483\u4e0a\u751f\u957f\u7684\u6c34\u5e73\u77f3\u58a8\u70ef\u819c\u7684AFM\u56fe\u50cf\uff1b<br \/>\n e\uff09\u73bb\u7483\u4e0a\u751f\u957f\u7684\u6c34\u5e73\u77f3\u58a8\u70ef\u7684\u622a\u9762TEM\u56fe\u50cf\uff1b<br \/>\n f\uff09PECVD\u751f\u957f\u7684\u77f3\u58a8\u70ef\u73bb\u7483\u7684\u62c9\u66fc\u5149\u8c31\u7ed3\u679c\u3002<\/p>\n<p><strong>6<\/strong><strong>\u3001\u8d85\u7ea7\u77f3\u58a8\u70ef\u73bb\u7483\u7684\u5e94\u7528<\/strong><\/p>\n<p>\u56fe13 \u00a0\u201c\u8d85\u7ea7\u77f3\u58a8\u70ef\u73bb\u7483\u201d\u7684\u591a\u79cd\u5e94\u7528<\/p>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"size-full wp-image-160488 aligncenter\" src=\"http:\/\/www.cailiaoniu.com\/wp-content\/uploads\/2018\/11\/13-7.png\" alt=\"\" width=\"600\" height=\"428\" srcset=\"http:\/\/www.cailiaoniu.com\/wp-content\/uploads\/2018\/11\/13-7.png 600w, http:\/\/www.cailiaoniu.com\/wp-content\/uploads\/2018\/11\/13-7-300x214.png 300w\" sizes=\"(max-width: 600px) 100vw, 600px\" \/><\/p>\n<p>a\uff09\u77f3\u58a8\u70ef\u73bb\u7483\u57fa\u6db2\u6676\u8c03\u5149\u667a\u80fd\u7a97\u793a\u610f\u56fe\uff1b <br \/>\n b\uff09\u57fa\u4e8e\u77f3\u58a8\u70ef\u73bb\u7483\u5236\u4f5c\u7684\u6db2\u6676\u8c03\u5149\u667a\u80fd\u7a97\u5b9e\u7269\u56fe\uff1b<br \/>\n c\uff09\u77f3\u58a8\u70ef\u73bb\u7483\u57fa\u6db2\u6676\u8c03\u5149\u667a\u80fd\u7a97\u900f\u8fc7\u7387\u968f\u65bd\u52a0\u7535\u538b\u7684\u53d8\u5316\u66f2\u7ebf\u3002\u63d2\u56fe\u663e\u793a\u4e86\u57fa\u4e8e\u77f3\u58a8\u70ef\u73bb\u7483\u7684\u667a\u80fd\u7a97\u7684\u54cd\u5e94\u65f6\u95f4\uff1b <br \/>\n d\uff09\u77f3\u58a8\u70ef\u73bb\u7483\u57fa\u7535\u963b\u5f0f\u89e6\u6478\u5c4f\u793a\u610f\u56fe\uff1b<br \/>\n e\uff09\u77f3\u58a8\u70ef\u73bb\u7483\u57fa\u89e6\u6478\u5c4f\u5de5\u4f5c\u5b9e\u7269\u7167\u7247\uff1b <br \/>\n f\uff09\u77f3\u58a8\u70ef\u73bb\u7483\u57fa\u89e6\u6478\u5c4f\u7684\u7ebf\u6027\u6d4b\u8bd5\uff1b<br \/>\n g\uff09\u77f3\u58a8\u70ef\u84dd\u5b9d\u77f3\u73bb\u7483\u57fa\u84dd\u8272LED\u793a\u610f\u56fe\uff1b<br \/>\n h\uff09LED\u7ed3\u6784\u7684\u6697\u573a\u56fe\u50cf\uff0cg = 0002.\uff1b<br \/>\n i\uff09\u5728\u6709\u548c\u6ca1\u6709\u77f3\u58a8\u70ef\u7684\u84dd\u5b9d\u77f3\u73bb\u7483\u4e0a\u5236\u9020\u7684LED\u7684\u53d1\u5149\u529f\u7387\u968f\u6ce8\u5165\u7535\u6d41\u53d8\u5316\u66f2\u7ebf\u3002<\/p>\n<p><strong>7<\/strong><strong>\u3001\u603b\u7ed3\u548c\u5c55\u671b<\/strong><\/p>\n<p>\u56fe14 \u5728\u4ea7\u91cf\u548c\u8d28\u91cf\u65b9\u9762\uff0c\u4e0d\u540c\u751f\u957f\u65b9\u6cd5\u7684\u7684\u6bd4\u8f83<\/p>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"size-full wp-image-160489 aligncenter\" src=\"http:\/\/www.cailiaoniu.com\/wp-content\/uploads\/2018\/11\/14-3.png\" alt=\"\" width=\"600\" height=\"476\" srcset=\"http:\/\/www.cailiaoniu.com\/wp-content\/uploads\/2018\/11\/14-3.png 600w, http:\/\/www.cailiaoniu.com\/wp-content\/uploads\/2018\/11\/14-3-300x238.png 300w\" sizes=\"(max-width: 600px) 100vw, 600px\" \/><\/p>\n<p>\u6839\u636e\u77f3\u58a8\u70ef\u7ed3\u6676\u5ea6\uff08G\uff09\uff0c\u751f\u957f\u901f\u7387\uff08R\uff09\uff0c\u5747\u5300\u6027\uff08U\uff09\uff0c\u6210\u672c\uff08C\uff09\u548c\u53ef\u653e\u91cf\u6027\uff08S\uff09\u8bc4\u4f30\u6bcf\u7c7b\u751f\u957f\u65b9\u6cd5\u3002 \u6807\u8bb0\u4e3a1,2\u548c3\u7684\u6bcf\u4e2a\u73af\u5206\u522b\u8868\u793a\u4f4e\uff0c\u4e2d\u548c\u9ad8\u6c34\u5e73\u3002<\/p>\n<p><strong>\u3010\u7ed3\u8bba\u4e0e\u5c55\u671b\u3011<\/strong><\/p>\n<p>\u5e94\u8be5\u5f3a\u8c03\u7684\u662f\uff0c\u8fd9\u5bf9\u4e8e\u201c\u8d85\u7ea7\u77f3\u58a8\u70ef\u73bb\u7483\u201d\u7684\u5b9e\u9645\u5e94\u7528\u6765\u8bf4\u53ea\u662f\u4e00\u4e2a\u826f\u597d\u7684\u5f00\u7aef\u3002\u5728\u76ee\u524d\u9636\u6bb5\uff0c\u73bb\u7483\u886c\u5e95\u4e0a\u9ad8\u8d28\u91cf\u77f3\u58a8\u70ef\u7684CVD\u751f\u957f\u4ecd\u5b58\u5728\u5f88\u591a\u6311\u6218\uff0c\u201c\u8d85\u7ea7\u77f3\u58a8\u70ef\u73bb\u7483\u201d\u7684\u7406\u8bba\u4e0e\u73b0\u5b9e\u4e4b\u95f4\u4ecd\u7136\u5b58\u5728\u5f88\u5927\u5dee\u8ddd\u3002\u5bf9\u4e8e\u672a\u6765\u7684\u5b9e\u9645\u5e94\u7528\uff0c\u9700\u8981\u5f00\u53d1\u7279\u5b9a\u73bb\u7483\u886c\u5e95\u7684\u751f\u957f\u6280\u672f\u548c\u6279\u91cf\u751f\u4ea7\u8bbe\u5907\u3002\u6b64\u5916\uff0c\u5bf9\u4e8e\u201c\u8d85\u7ea7\u77f3\u58a8\u70ef\u73bb\u7483\u201d\u7684\u5e94\u7528\u7814\u7a76\u662f\u91cd\u8981\u7684\u7684\uff0c\u4f8b\u5982\u89e6\u6478\u677f\u3001\u667a\u80fd\u7a97\u3001\u900f\u660e\u52a0\u70ed\u5668\u3001\u5149\u5b66\u5143\u4ef6\u548c\u4f20\u611f\u5668\u3001\u751f\u7269\u76f8\u5bb9\u6027\u73bb\u7483\u5668\u76bf\u7b49\u3002\u76f8\u4fe1\u968f\u7740\u77f3\u58a8\u70ef\u73bb\u7483\u751f\u957f\u6280\u672f\u7684\u7a81\u7834\uff0c\u5728\u4e0d\u8fdc\u7684\u5c06\u6765\u201c\u8d85\u7ea7\u77f3\u58a8\u70ef\u73bb\u7483\u201d\u6709\u671b\u6210\u4e3a\u77f3\u58a8\u70ef\u7684\u6492\u624b\u950f\u7ea7\u5e94\u7528\u3002<\/p>\n<p><strong>\u3010\u56e2\u961f\u4ecb\u7ecd\u3011<\/strong><\/p>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"size-full wp-image-160723 aligncenter\" src=\"http:\/\/www.cailiaoniu.com\/wp-content\/uploads\/2018\/11\/15435561991.png\" alt=\"\" width=\"496\" height=\"681\" srcset=\"http:\/\/www.cailiaoniu.com\/wp-content\/uploads\/2018\/11\/15435561991.png 496w, http:\/\/www.cailiaoniu.com\/wp-content\/uploads\/2018\/11\/15435561991-219x300.png 219w\" sizes=\"(max-width: 496px) 100vw, 496px\" \/><\/p>\n<p style=\"text-align: left;\"><strong>\u5218\u5fe0\u8303<\/strong>\u6559\u6388\uff0c\u5317\u4eac\u5927\u5b66\u535a\u96c5\u8bb2\u5e2d\u6559\u6388\uff082016.11.21\uff09\u3001\u4e2d\u56fd\u79d1\u5b66\u9662\u9662\u58eb\uff082011.12.10\uff09\u3001\u53d1\u5c55\u4e2d\u56fd\u5bb6\u79d1\u5b66\u9662\u9662\u58eb\uff082015.11\uff09\u3002\u4e3b\u8981\u4ece\u4e8b\u7eb3\u7c73\u78b3\u6750\u6599\u3001\u4e8c\u7ef4\u539f\u5b50\u6676\u4f53\u6750\u6599\u548c\u7eb3\u7c73\u5316\u5b66\u7814\u7a76\uff0c\u53d1\u8868\u5b66\u672f\u8bba\u6587\u903e500\u7bc7\uff0c\u83b7\u6388\u6743\u4e2d\u56fd\u53d1\u660e\u4e13\u522930\u9879\u3002\u62c5\u4efb\u201c\u7269\u7406\u5316\u5b66\u5b66\u62a5\u201d\u4e3b\u7f16\u3001\u201c\u79d1\u5b66\u901a\u62a5\u201d\u526f\u4e3b\u7f16\uff0cAdv. Mater.\u3001Small\u3001Nano Res.\u3001ChemNanoMat\u3001Graphene Technology\u3001APL Mater.\u3001NPG Asia Mater.\u3001Natural Science Review\u3001J. Photochem. Photobiol. C Phtotochem. Rev.\u7b49\u56fd\u9645\u671f\u520a\u7f16\u59d4\u6216\u987e\u95ee\u7f16\u59d4\u3002\u73b0\u4efb\u5317\u4eac\u77f3\u58a8\u70ef\u7814\u7a76\u9662\u9662\u957f\u3001\u4e2d\u5173\u6751\u77f3\u58a8\u70ef\u4ea7\u4e1a\u8054\u76df\u7406\u4e8b\u957f\u53ca\u4e13\u5bb6\u59d4\u5458\u4f1a\u4e3b\u4efb\u59d4\u5458\u3001\u5317\u4eac\u77f3\u58a8\u70ef\u79d1\u6280\u521b\u65b0\u4e13\u9879\uff082016-2025\uff09\u4e13\u5bb6\u59d4\u5458\u4f1a\u4e3b\u4efb\u3001\u4e2d\u5173\u6751\u79d1\u6280\u56ed\u533a\u4e30\u53f0\u56ed\u79d1\u534f\u7b2c\u4e09\u5c4a\u59d4\u5458\u4f1a\u4e3b\u5e2d\u3001\u4e2d\u56fd\u56fd\u9645\u79d1\u6280\u4fc3\u8fdb\u4f1a\u526f\u4f1a\u957f\u3001\u6559\u80b2\u90e8\u79d1\u6280\u59d4\u59d4\u5458\u53ca\u5b66\u98ce\u5efa\u8bbe\u59d4\u5458\u4f1a\u526f\u4e3b\u4efb\u548c\u56fd\u9645\u5408\u4f5c\u5b66\u90e8\u526f\u4e3b\u4efb\u3001\u5317\u4eac\u5927\u5b66\u7eb3\u7c73\u79d1\u5b66\u4e0e\u6280\u672f\u7814\u7a76\u4e2d\u5fc3\u4e3b\u4efb\u7b49\u804c\u3002\u8fd8\u62c5\u4efb\u56fd\u5bb6\u81ea\u7136\u79d1\u5b66\u57fa\u91d1\u59d4\u5458\u4f1a\u7b2c\u5341\u56db\u5c4a\u4e13\u5bb6\u8bc4\u5ba1\u7ec4\u4e13\u5bb6\u3001\u4e2d\u56fd\u5316\u5b66\u4f1a\u5e38\u52a1\u7406\u4e8b\u53ca\u7eb3\u7c73\u5316\u5b66\u4e13\u4e1a\u59d4\u5458\u4f1a\u521b\u59cb\u4e3b\u4efb\u3001\u4e2d\u56fd\u5fae\u7c73\u7eb3\u7c73\u6280\u672f\u5b66\u4f1a\u5e38\u52a1\u7406\u4e8b\u3002\u7b2c\u5341\u4e8c\u5c4a\u5168\u56fd\u4eba\u5927\u4ee3\u8868\uff0c\u4e5d\u4e09\u5b66\u793e\u7b2c\u5341\u4e09\u5c4a\u4e2d\u592e\u59d4\u5458\u548c\u9662\u58eb\u5de5\u4f5c\u59d4\u5458\u4f1a\u526f\u4e3b\u4efb\uff0c\u5317\u4eac\u5e02\u4eba\u6c11\u653f\u5e9c\u4e13\u5bb6\u54a8\u8be2\u59d4\u5458\u4f1a\u59d4\u5458\uff0c\u4e5d\u4e09\u5b66\u793e\u5317\u4eac\u5e02\u4e3b\u4efb\u59d4\u5458\u3002<\/p>\n<p style=\"text-align: left;\"><strong>\u3010\u8bfe\u9898\u7ec4\u8be5\u9886\u57df\u4ee3\u8868\u6027\u5de5\u4f5c\u3011<\/strong><br \/>\n 1. Yubin Chen, Jingyu Sun*, Junfeng Gao, Feng Du, Qi Han, Yufeng Nie, Zhaolong Chen, Alicja Bachmatiuk, Manish Kr. Priydarshi, Donglin Ma, Xiuju Song, Xiaosong Wu, Chunyang Xiong, Mark H. R\u00fcmmeli, Feng Ding, Yanfeng Zhang*, and Zhongfan Liu*. Growing Uniform Graphene Disks and Films on Molten Glass for Heating Devices and Cell Culture. Adv. Mater., 2015, 27(47): 7839-7846.<\/p>\n<p>2. Jingyu Sun, Yubin Chen, Manish Kr. Priydarshi, Zhang Chen, Alicja Bachmatiuk, Zhiyu Zou, Zhaolong Chen, Xiuju Song, Yanfeng Gao, Mark H. Ru\u0308mmeli, Yanfeng Zhang*,and Zhongfan Liu*. Direct chemical vapor deposition-derived graphene glasses targeting wide ranged applications. Nano Lett. 2015, 15(9): 5846-5854.<\/p>\n<p>3. Jingyu Sun, Zhaolong Chen, Long Yuan, Yubin Chen, Jing Ning, Shuwei Liu, Donglin Ma, Xiuju Song, Manish K. Priydarshi, Alicja Bachmatiuk, Mark H. Ru\u0308mmeli, Tianbao Ma, Linjie Zhi, Libai Huang, Yanfeng Zhang*, and Zhongfan Liu*. Direct chemical-vapor-deposition-fabricated, large-scale graphene glass with high carrier mobility and uniformity for touch panel applications. Acs Nano, 2016, 10(12), 11136.<\/p>\n<p>4. Xu-Dong Chen, Zhaolong Chen, Wen-Shuai Jiang, Cuihong Zhang, Jingyu Sun, Huihui Wang, Wei Xin, Li Lin, Manish K. Priydarshi, Huai Yang, Zhi-Bo Liu, Jian-Guo Tian, Yingying Zhang,* Yanfeng Zhang,* and Zhongfan Liu*. Fast Growth and Broad Applications of 25-Inch Uniform Graphene Glass. Adv. Mater. 2017, 29, 1603428.<\/p>\n<p>5. Yue Qi, Bing Deng, Xiao Guo, Shulin Chen, Jing Gao, Tianran Li, Zhipeng Dou, Haina Ci, Jingyu Sun, Zhaolong Chen, Ruoyu Wang, Lingzhi Cui, Xudong Chen, Ke Chen, Huihui Wang, Sheng Wang, Peng Gao, Mark H. Rummeli, Hailin Peng,Yanfeng Zhang*, and Zhongfan Liu*. Switching Vertical to Horizontal Graphene Growth Using Faraday Cage-assisted PECVD Approach for High-performance Transparent Heating Device. Adv. Mater. 2018, 30, 1704839<\/p>\n<p>6. Zhaolong Chen#, Xiang Zhang#, Zhipeng Dou#, Tongbo Wei,* Zhiqiang Liu, Yue Qi, Haina Ci, Yunyu Wang, Yang Li, Hongliang Chang, Jianchang Yan, Shenyuan Yang, Yanfeng Zhang, Junxi Wang, Peng Gao,* Jinmin Li,* and Zhongfan Liu*. High-Brightness Blue Light-Emitting Diodes Enabled by a Directly Grown Graphene Buffer Layer. Adv. Mater. 2018, 1801608.<\/p>\n<p><strong>\u6587\u732e\u94fe\u63a5\uff1a<\/strong><a href=\"https:\/\/onlinelibrary.wiley.com\/doi\/10.1002\/adma.201803639\">Direct CVD Growth of Graphene on Traditional Glass: Methods and Mechanisms<\/a>\uff08Adv. Mater.\uff0c2018\uff0cDOI\uff1a10.1002\/adma.201803639\uff09<\/p>\n<p>\u672c\u6587\u7531\u6750\u6599\u4eba\u7f16\u8f91\u90e8\u5b66\u672f\u7ec4\u6c34\u624b\u4f9b\u7a3f\uff0c\u6750\u6599\u725b\u6574\u7406\u7f16\u8f91\u3002<\/p>\n<p>\u6b22\u8fce\u5927\u5bb6\u5230\u6750\u6599\u4eba\u5ba3\u4f20\u79d1\u6280\u6210\u679c\u5e76\u5bf9\u6587\u732e\u8fdb\u884c\u6df1\u5165\u89e3\u8bfb\uff0c\u6295\u7a3f\u90ae\u7bb1tougao@cailiaoren.com\u3002<\/p>\n","protected":false},"excerpt":{"rendered":"<p>\u3010\u524d\u8a00\u3011 \u91d1\u5c5e\u8868\u9762\u4e0a\u7684\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\uff08CVD\uff09\u88ab\u8ba4\u4e3a\u662f\u83b7\u5f97\u5927\u9762\u79ef\u3001\u9ad8\u8d28\u91cf\u77f3\u58a8\u70ef\u8584\u819c\u7684\u6700\u6709\u6548\u65b9\u6cd5\u3002\u4e3a\u5b9e\u73b0\u77f3\u58a8\u70ef\u8584\u819c\u7684\u5e94\u7528\uff0c\u9700\u8981\u5c06\u77f3\u58a8\u70ef\u4ece\u4ece\u751f\u957f\u7684\u91d1\u5c5e\u886c\u5e95\u8f6c\u79fb\u81f3\u76ee\u6807\u886c&#8230;<\/p>\n","protected":false},"author":3247,"featured_media":160476,"comment_status":"open","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[533],"tags":[46,33],"class_list":["post-160475","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-zongshu","tag-graphene","tag-nano"],"_links":{"self":[{"href":"http:\/\/www.cailiaoniu.com\/index.php?rest_route=\/wp\/v2\/posts\/160475"}],"collection":[{"href":"http:\/\/www.cailiaoniu.com\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"http:\/\/www.cailiaoniu.com\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"http:\/\/www.cailiaoniu.com\/index.php?rest_route=\/wp\/v2\/users\/3247"}],"replies":[{"embeddable":true,"href":"http:\/\/www.cailiaoniu.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=160475"}],"version-history":[{"count":7,"href":"http:\/\/www.cailiaoniu.com\/index.php?rest_route=\/wp\/v2\/posts\/160475\/revisions"}],"predecessor-version":[{"id":160922,"href":"http:\/\/www.cailiaoniu.com\/index.php?rest_route=\/wp\/v2\/posts\/160475\/revisions\/160922"}],"wp:featuredmedia":[{"embeddable":true,"href":"http:\/\/www.cailiaoniu.com\/index.php?rest_route=\/wp\/v2\/media\/160476"}],"wp:attachment":[{"href":"http:\/\/www.cailiaoniu.com\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=160475"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"http:\/\/www.cailiaoniu.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=160475"},{"taxonomy":"post_tag","embeddable":true,"href":"http:\/\/www.cailiaoniu.com\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=160475"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}