{"id":218189,"date":"2021-02-25T06:28:42","date_gmt":"2021-02-24T22:28:42","guid":{"rendered":"http:\/\/www.cailiaoniu.com\/?p=218189"},"modified":"2021-02-24T21:28:50","modified_gmt":"2021-02-24T13:28:50","slug":"%e8%bf%99%e4%b8%aa%e5%8f%91%e7%8e%b0%e6%89%8d10%e5%b9%b4%e7%9a%84%e7%94%b5%e5%ad%90%e6%9d%90%e6%96%99%ef%bc%8c%e6%9c%80%e8%bf%91%e5%8f%88%e7%8e%b0%e9%87%8d%e5%a4%a7%e8%bf%9b%e5%b1%95%ef%bc%81","status":"publish","type":"post","link":"http:\/\/www.cailiaoniu.com\/?p=218189","title":{"rendered":"\u8fd9\u4e2a\u53d1\u73b0\u624d10\u5e74\u7684\u7535\u5b50\u6750\u6599\uff0c\u6700\u8fd1\u53c8\u73b0\u91cd\u5927\u8fdb\u5c55\uff01"},"content":{"rendered":"

\u4e00\u3001\u5bfc\u8bfb<\/b><\/strong><\/p>\n

2020\u5e74\u672b\uff0c\u6211\u4eec\u66fe\u7ecf\u76d8\u70b9\u4e86\u65b0\u578b\u7535\u5b50\u6750\u6599HfO2<\/sub>\u7684\u53d1\u5c55\uff0c\u8fd9\u4e2a2011\u5e74\u9996\u6b21\u5b9e\u9a8c\u4e0a\u8bc1\u5b9e\u5177\u6709\u94c1\u7535\u6027\u7684\u6750\u6599\uff0c\u5177\u6709\u91cd\u8981\u7684\u57fa\u7840\u4e0e\u5e94\u7528\u7814\u7a76\u4ef7\u503c\uff0c\u6709\u671b\u6210\u4e3a\u65b0\u578b\u5b58\u50a8\u5668\u4ef6\u7684\u539f\u578b\u6750\u6599\u3002\u7136\u800c\uff0c\u76ee\u524d\u7684\u7814\u7a76\u8868\u660e\uff0c\u5176\u94c1\u7535\u6027\u53ea\u80fd\u5b58\u5728\u4e8e10 nm\u4ee5\u4e0b\u7684\u8584\u819c\u6750\u6599\u4e2d\uff0c\u5176\u5757\u4f53\u5f62\u5f0f\u662f\u5426\u4e5f\u80fd\u4ea7\u751f\u94c1\u7535\u6027? \u5176\u94c1\u7535\u6027\u7684\u8d77\u6e90\u662f\u5426\u6709\u65b0\u7684\u91cd\u8981\u673a\u5236\uff1f\u8fd9\u4e9b\u6838\u5fc3\u5173\u952e\u95ee\u9898\u662f\u4e9f\u9700\u89e3\u51b3\u7684\uff0c\u6700\u8fd1\u51e0\u4e2a\u6708\uff0c\u56f4\u7ed5\u5176\u6838\u5fc3\u7279\u6027\u4e0e\u7ed3\u6784\u3001\u6027\u8d28\u7684\u4e00\u7cfb\u5217\u6210\u679c\u76f8\u7ee7\u6d8c\u73b0\uff0c\u7279\u522b\u662f\u9996\u6b21\u5b9e\u73b0\u4e86\u5757\u4f53\u94c1\u7535\u6027\u7684\u91cd\u8981\u7a81\u7834\uff0c\u4eca\u5929\uff0c\u6211\u4eec\u5c31\u6765\u76d8\u70b9\u4e0b\u6700\u8fd1\u56f4\u7ed5HfO2<\/sub>\u7684\u4e00\u4e9b\u7814\u7a76\u8fdb\u5c55\u3002<\/p>\n

\u4e8c\u3001\u6700\u65b0\u8fdb\u5c55<\/b><\/strong><\/p>\n

01<\/b><\/strong>. Nature Materials<\/b><\/strong>\u2014<\/b><\/strong>H<\/b><\/strong>f<\/b><\/sub><\/strong>O<\/b><\/strong>2<\/b><\/sub><\/strong>:Y<\/b><\/strong>\u5757\u4f53\u5355\u6676\u4e2d\u5b58\u5728\u52a8\u529b\u5b66\u7a33\u5b9a\u7684\u94c1\u7535\u6027<\/b><\/strong><\/p>\n

\"\"<\/p>\n

HfO2<\/sub>\u662f\u4e00\u79cd\u7b80\u5355\u7684\u4e8c\u5143\u6c27\u5316\u7269\uff0c\u5177\u6709\u53ef\u96c6\u6210\u5230\u7845\u6280\u672f\u4e2d\u7684\u8d85\u5c3a\u5ea6\u94c1\u7535\u6027\u3002\u8fd9\u79cd\u6750\u6599\u5177\u6709\u591a\u578b\u4f53\u7684\u7ed3\u6784\u7279\u70b9\uff0c\u5176\u4e2d\uff0c\u5728\u8d85\u8584\u819c\u4e2d\u53d1\u73b0\u7684\u6781\u6027\u6b63\u4ea4\u6676\u4f53\uff08Pbc<\/i><\/em>21<\/sub>\uff09\u5f62\u5f0f\u88ab\u8ba4\u4e3a\u662f\u94c1\u7535\u6027\u7684\u53ef\u80fd\u8d77\u6e90\uff0c\u4f46\u901a\u5e38\u8ba4\u4e3a\u5728\u5757\u72b6\u6676\u4f53\u4e2d\u65e0\u6cd5\u5b9e\u73b0\u3002\u7814\u7a76\u8005\u4f7f\u7528\u6700\u5148\u8fdb\u7684\u6fc0\u5149\u4e8c\u6781\u7ba1\u52a0\u70ed\u6d6e\u533a\u6280\u672f\uff0c\u5b9e\u73b0\u4e86\u5757\u72b6\u5355\u6676HfO2<\/sub>\uff1aY\u4e2d\u7684Pbc<\/i><\/em>21<\/sub>\u76f8\u7684\u5408\u6210\u4e0e\u94c1\u7535\u6027\u89c2\u6d4b\uff0c\u5e76\u53d1\u73b0\u5728\u4e0d\u540cY\u6d53\u5ea6\u4e0b\u5b58\u5728\u53cd\u6781\u6027\u7684Pbca<\/i><\/em>\u76f8\u3002\u4e2d\u5b50\u884d\u5c04\u548c\u539f\u5b50\u6210\u50cf\u663e\u793a\u4e86\uff08\u53cd\uff09\u6781\u6027\u6676\u4f53\u5b66\u7279\u5f81\u4ee5\u53ca\u4e30\u5bcc\u768490\u00b0\/ 180\u00b0\u94c1\u7535\u7574\uff0c\u4ee5\u53ca\u5177\u6709\u53ef\u5ffd\u7565\u7684\u5524\u9192\u6548\u5e94\u7684\u53ef\u53cd\u8f6c\u7684\u6781\u5316\u3002DFT\u8ba1\u7b97\u8868\u660e\uff0c\u9487\u63ba\u6742\u548c\u5feb\u901f\u51b7\u5374\u662f\u7a33\u5b9a\u6240\u9700\u5757\u4f53\u76f8\u7ed3\u6784\u7684\u5173\u952e<\/b><\/strong>\u3002\u8fd9\u9879\u6210\u679c\u4e3aHfO2<\/sub>\u7684\u591a\u578b\u672c\u8d28\u548c\u76f8\u63a7\u5236\u63d0\u4f9b\u4e86\u65b0\u7684\u89c1\u89e3\uff0c\u5e76\u4e14\u6d88\u9664\u4e86\u5176\u94c1\u7535\u6027\u7684\u5c3a\u5bf8\u4e0a\u9650\uff0c\u4e3a\u4e0b\u4e00\u4ee3\u94c1\u7535\u5668\u4ef6\u7684\u5f00\u53d1\u5f00\u8f9f\u4e86\u65b0\u7684\u65b9\u5411\u3002<\/p>\n

\"\"<\/p>\n

\u00a9Springer Nature<\/p>\n

02<\/b><\/strong>. Advanced Electronic Materials<\/b><\/strong>\u2014\u5168\u65e0\u673a\u6c34\u6027\u524d\u9a71\u4f53\u6eb6\u6db2\u5236\u5907Y\u63ba\u6742HfO<\/b><\/strong>2<\/b><\/sub><\/strong>\u94c1\u7535\u8584\u819c\u7684\u4f18\u5316\u9000\u706b\u5de5\u827a<\/b><\/strong><\/p>\n

\"\"<\/b><\/strong><\/p>\n

\u91c7\u7528\u5168\u65e0\u673a\u76d0\u6c34\u6eb6\u6db2\u524d\u9a71\u4f53\uff0c\u901a\u8fc7\u5316\u5b66\u6eb6\u6db2\u6c89\u79ef\u6cd5\u5728Si\uff08100\uff09\u886c\u5e95\u4e0a\u5236\u5907\u4e8610 nm\u539a\u7684\u63baY -HfO2<\/sub>\u8584\u819c\u3002\u5e76\u7814\u7a76\u4e86\u9000\u706b\u5de5\u827a\uff08\u5305\u62ec\u9000\u706b\u6e29\u5ea6\uff0c\u4fdd\u6e29\u65f6\u95f4\u548c\u52a0\u70ed\u901f\u7387<\/b><\/strong>\uff09\u5bf9\u8584\u819c\u7684\u6676\u4f53\u7ed3\u6784\u548c\u94c1\u7535\u6027\u7684\u5f71\u54cd\u3002\u5b9e\u9a8c\u7ed3\u679c\u8868\u660e\uff0c\u8584\u819c\u7684\u6676\u4f53\u7ed3\u6784\u548c\u94c1\u7535\u6027\u80fd\u540c\u9000\u706b\u8fc7\u7a0b\u5bc6\u5207\u76f8\u5173\u3002\u6b64\u5916\uff0c\u8584\u819c\u4e2d\u5171\u5b58\u5355\u659c\u548c\u4e0d\u5bf9\u79f0\u7684\u6b63\u4ea4\u76f8\u3002\u6700\u4f18\u94c1\u7535\u6027\u7684\u9000\u706b\u5de5\u827a\u4e3a\uff1a\u5728N<\/b><\/strong>2<\/b><\/sub><\/strong>\u6c14\u6c1b\u4e2d\u4ee530<\/b><\/strong>\u00a0<\/b><\/strong>\u00b0<\/b><\/strong>C\u2022s<\/b><\/strong>-1<\/b><\/sup><\/strong>\u7684\u52a0\u70ed\u901f\u7387\u5728700<\/b><\/strong>\u00a0<\/b><\/strong>\u00b0<\/b><\/strong>C\u4e0b\u9000\u706b30 s\u3002<\/b><\/strong>\u00a0\u4ece\u800c\u5b9e\u73b0\u4e86\u8584\u819c\u7684m\u76f8\u5360\u6bd4\u4f4e\u81f317.9\uff05\uff0c\u5e76\u4e14\u5177\u6709\u6700\u9ad8\u7684\u5269\u4f59\u6781\u5316\u5f3a\u5ea6(21.4 \u00b5C \u2022<\/b><\/strong>cm-2<\/sup>)\u3002<\/p>\n

\"\"<\/p>\n

\u00a9\u00a0Wiley<\/p>\n

03<\/b><\/strong>. Acta Materialia<\/b><\/strong>\u2014<\/b><\/strong>Hf<\/b><\/strong>5<\/b><\/sub><\/strong>Zr<\/b><\/strong>0.5<\/b><\/sub><\/strong>O<\/b><\/strong>2<\/b><\/sub><\/strong>\u57fa<\/b><\/strong>\u94c1\u7535\u5b58\u50a8\u5668\u7684<\/b><\/strong>\u635f\u8017<\/b><\/strong>\u4fdd\u6301<\/b><\/strong>\u8d77\u6e90<\/b><\/strong><\/p>\n

\"\"<\/p>\n

\u5341\u5e74\u6765\uff0c\u94c1\u7535HfO2<\/sub>\u8584\u819c\u7531\u4e8e\u5177\u6709\u53ef\u7f29\u653e\u6027\u548cCMOS\u53ef\u96c6\u6210\u6027\uff0c\u56e0\u6b64\u4f5c\u4e3a\u4e00\u79cd\u53ef\u7528\u4e8e\u975e\u6613\u5931\u6027\u94c1\u7535\u968f\u673a\u5b58\u50a8\u5668\u7684\u529f\u80fd\u6750\u6599\uff0c\u5f97\u5230\u4e86\u8d8a\u6765\u8d8a\u591a\u7684\u5173\u6ce8\u3002\u5c3d\u7ba1\u5728\u5173\u952e\u6027\u80fd\u53c2\u6570\uff08\u5c24\u5176\u662f\u8bfb\u51fa\u7535\u8377\u548c\u7535\u538b\u4ee5\u53ca\u8010\u7528\u6027<\/b><\/strong>\uff09\u65b9\u9762\u53d6\u5f97\u4e86\u663e\u8457\u7684\u8fdb\u6b65\uff0c\u4f46\u662f\u6240\u5f00\u53d1\u7684\u5668\u4ef6\u53ea\u6709\u5728\u6807\u51c6\u4fdd\u7559\u65f6\u95f4\u4e3a10\u5e74\u7684\u60c5\u51b5\u4e0b\u624d\u80fd\u5b9e\u73b0\u7535\u5b50\u5de5\u4e1a\u7684\u5e94\u7528\u3002\u6750\u6599\u5de5\u7a0b\u4e0d\u4ec5\u53ef\u4ee5\u6539\u53d8\u94c1\u7535\u6027\u80fd\uff0c\u8fd8\u53ef\u4ee5\u4fee\u6539\u4fdd\u7559\u65f6\u95f4\u3002\u8981\u4e86\u89e3\u5982\u4f55\u4fdd\u6301\u8db3\u591f\u7684\u4fdd\u7559\u65f6\u95f4\uff0c\u5176\u80cc\u540e\u7684\u7269\u7406\u673a\u5236\u9700\u8981\u6df1\u5165\u89e3\u8bfb\u3002\u8fd9\u9879\u7814\u7a76\u5236\u9020\u4e86\u5177\u6709\u9ad8\u635f\u8017\u4fdd\u6301\u7387\u7684\u7535\u5bb9\u5668\u5b58\u50a8\u5355\u5143\u3002\u901a\u8fc7\u5c06\u5668\u4ef6\u6027\u80fd\u4e0e\u7535\u5bb9\u77ac\u6001\u5149\u8c31\u6cd5\uff0c\u52a8\u6001\u73b0\u573a\u539f\u4f4d\u786cXPS\u548c\u539f\u4f4dPFM\u7684\u6d4b\u8bd5\u7ed3\u679c\u8fdb\u884c\u6bd4\u8f83\uff0c\u53d1\u73b0\u635f\u8017\u4fdd\u6301\u662f\u7531\u7535\u5bb9\u5668\u7535\u6781\u754c\u9762\u5904\u5e26\u6b63\u7535\u8377\u7684\u6c27\u7a7a\u4f4d\u7684\u79ef\u7d2f\u5f15\u8d77\u7684<\/b><\/strong>\uff1b\u5728\u4fe1\u606f\u7684\u957f\u671f\u5b58\u50a8\u8fc7\u7a0b\u4e2d\uff0c\u7535\u8377\u7684\u91cd\u65b0\u5206\u914d\u5b8c\u5168\u7531\u5b58\u50a8\u5355\u5143\u4e2d\u7684\u7574\u7ed3\u6784\u5b9a\u4e49\u3002<\/p>\n

\"\"<\/p>\n

\u00a9\u00a0Elsevier<\/p>\n

04<\/b><\/strong>. Advanced Materials<\/b><\/strong>\u2014\u91c7\u7528\u70e7\u7eff\u77f3\u6c27\u5316\u7269\u91d1\u5c5e\u7535\u6781\u7684Hf<\/b><\/strong>5<\/b><\/sub><\/strong>Zr<\/b><\/strong>0.5<\/b><\/sub><\/strong>O<\/b><\/strong>2<\/b><\/sub><\/strong>\u5916\u5ef6\u94c1\u7535\u4f53<\/b><\/strong><\/p>\n

\"\"<\/p>\n

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\"\"<\/p>\n

\u00a9\u00a0Wiley<\/p>\n

05<\/b><\/strong>.Journal of Applied Physics<\/b><\/strong>\u2014<\/b><\/strong>HfO<\/b><\/strong>2<\/b><\/sub><\/strong>\u57fa\u94c1\u7535\u4f53\u7684\u53cd\u8f6c\u884c\u4e3a<\/b><\/strong><\/p>\n

\"\"<\/p>\n

\u81ea2011\u5e74\u9996\u6b21\u53d1\u73b0HfO2<\/sub>\u7684\u94c1\u7535\u6027\u4ee5\u6765\uff0c\u7531\u4e8e\u5176\u4e0eCMOS\u7684\u517c\u5bb9\u6027\uff0c\u56e0\u6b64\u5907\u53d7\u5173\u6ce8\u3002\u6b64\u5916\uff0c\u5176\u539a\u5ea6\u53ef\u7f29\u653e\u6027\u6709\u52a9\u4e8e\u96c6\u6210\u7535\u8def\u7cfb\u7edf\u7684\u5c0f\u578b\u5316\u3002\u4e9a\u7eb3\u79d2\u8303\u56f4\u5185\u7684\u8d85\u5feb\u6781\u5316\u53cd\u8f6c\u901f\u5ea6\u6709\u52a9\u4e8e\u5236\u9020\u5feb\u901f\u54cd\u5e94\u578b\u5668\u4ef6\u3002HfO<\/b><\/strong>2<\/b><\/sub><\/strong>\u94c1\u7535\u6027\u7684\u8d77\u6e90\u4e0e\u4f20\u7edf\u9499\u949b\u77ff\u4e0d\u540c\uff0c\u4f34\u968f\u7740\u4e0e\u6781\u5316\u53cd\u8f6c\u76f8\u5173\u7684\u66f4\u590d\u6742\u7684\u884c\u4e3a<\/b><\/strong>\u3002\u8fd9\u7bc7\u89c2\u70b9\u8bba\u6587\u8ba8\u8bba\u4e86\u6709\u5173\u6781\u5316\u53cd\u8f6c\u590d\u6742\u884c\u4e3a\u7684\u6700\u65b0\u7814\u7a76\uff0c\u5305\u62ec\u5524\u9192\u3001\u5206\u88c2\u3001\u75b2\u52b3\u3001\u8d1f\u7535\u5bb9\u3001\u7d2f\u79ef\u53cd\u8f6c\u4ee5\u53ca\u5b83\u4eec\u4e4b\u95f4\u7684\u67d0\u4e9b\u5173\u7cfb\u3002\u6b64\u5916\uff0c\u8fd8\u7814\u7a76\u4e86\u6781\u5316\u53cd\u8f6c\u52a8\u529b\u5b66\u3002\u6700\u540e\uff0c\u8ba8\u8bba\u4e86HfO2<\/sub>\u57fa\u94c1\u7535\u6750\u6599\u7684\u6f5c\u5728\u5e94\u7528\u548c\u7814\u7a76\u3002<\/p>\n

06<\/b><\/strong>.<\/b><\/strong><\/b>Matter<\/b><\/strong>\u2014<\/b><\/strong>\u4e2d\u5fc3\u5bf9\u79f0HfO<\/b><\/strong>2<\/b><\/sub><\/strong>\u7684\u72ec\u7acb<\/b><\/strong>\u5b6a\u6676\u80f6\u4f53\u7eb3\u7c73\u6676\u4e2d\u7684\u591a\u91cd\u6781\u5316<\/b><\/strong>\u6709\u5e8f<\/b><\/strong><\/p>\n

\"\"<\/b><\/strong><\/p>\n

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\"\"<\/p>\n

\u00a9\u00a0Cell Press<\/p>\n

07<\/b><\/strong>.<\/b><\/strong><\/b>Japanese Journal of Applied Physics<\/b><\/strong>\u2014\u6eb6\u6db2\u65cb\u6d82\u6cd5\u5236\u5907HfO<\/b><\/strong>2<\/b><\/sub><\/strong>\u8584\u819c\u53ca\u5176\u963b\u53d8\u5668\u4ef6<\/b><\/strong><\/p>\n

\"\"<\/p>\n

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\"\"<\/p>\n

\u00a9\u00a0IOP Publishing<\/p>\n

\u672c\u6587\u7531Free-Writon\u4f9b\u7a3f\u3002<\/p>\n

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\u672a\u7ecf\u5141\u8bb8\u4e0d\u5f97\u8f6c\u8f7d\uff0c\u6388\u6743\u4e8b\u5b9c\u8bf7\u8054\u7cfbkefu@cailiaoren.com\u3002<\/p>\n

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