{"id":235720,"date":"2022-04-13T06:05:11","date_gmt":"2022-04-12T22:05:11","guid":{"rendered":"http:\/\/www.cailiaoniu.com\/?p=235720"},"modified":"2022-04-12T16:10:00","modified_gmt":"2022-04-12T08:10:00","slug":"nature%e2%88%a3%e7%94%a8%e4%ba%8e%e5%85%88%e8%bf%9b%e6%99%b6%e4%bd%93%e7%ae%a1%e7%9a%84%e8%b6%85%e8%96%84%e9%93%81%e7%94%b5%e6%9d%90%e6%96%99hfo2-zro2%e8%b6%85%e6%99%b6%e6%a0%bc%e6%a0%85%e5%b1%82","status":"publish","type":"post","link":"http:\/\/www.cailiaoniu.com\/?p=235720","title":{"rendered":"Nature\u2223\u7528\u4e8e\u5148\u8fdb\u6676\u4f53\u7ba1\u7684\u8d85\u8584\u94c1\u7535\u6750\u6599HfO2-ZrO2\u8d85\u6676\u683c\u6805\u5c42"},"content":{"rendered":"<p><strong>\u4e00\u3001\u3010\u5bfc\u8bfb\u3011<\/strong><\/p>\n<p>\u968f\u7740\u5148\u8fdb\u6676\u4f53\u7ba1\u4e2d\u6a2a\u5411\u5c3a\u5bf8\u7684\u7f29\u653e\uff0c\u4e3a\u4e86\u4fdd\u6301\u6805\u7535\u6781\u5bf9\u6c9f\u9053\u7684\u63a7\u5236\u548c\u964d\u4f4e\u5de5\u4f5c\u7535\u538b\uff0c\u9700\u8981\u589e\u52a0\u6805\u7535\u5bb9\u3002\u81ea2008\u5e74\u5f15\u5165\u4e86\u9ad8\u4ecb\u7535\u5e38\u6570HfO<sub>2<\/sub>\u4ee5\u6765\uff0c\u8fd9\u4ecd\u7136\u662f\u8fc4\u4eca\u4e3a\u6b62\u7684\u9996\u9009\u6750\u6599\u3002<\/p>\n<p>\u8fd1\u65e5\uff0c\u7f8e\u56fd\u52a0\u5dde\u5927\u5b66\u4f2f\u514b\u5229\u5206\u6821Sayeef Salahuddin\u7814\u7a76\u56e2\u961fSuraj S. Cheema,Nirmaan Shanker\u7b49\u7814\u7a76\u4eba\u5458\uff0c\u91c7\u7528\u6df7\u5408\u7684\u94c1\u7535-\u53cd\u94c1\u7535\u6709\u5e8f\u7a33\u5b9a\u7684HfO<sub>2<\/sub>\u2013ZrO<sub>2<\/sub>\u8d85\u6676\u683c\u5f02\u8d28\u7ed3\u4f5c\u4e3a\u6805\u53e0\u5c42\uff0c\u5c06\u5176\u76f4\u63a5\u96c6\u6210\u5230\u7845\u6676\u4f53\u7ba1\u4e0a\uff0c\u5e76\u7f29\u5c0f\u5230\u5927\u7ea620\u57c3\uff0c\u4e0e\u9ad8\u6027\u80fd\u6676\u4f53\u7ba1\u6240\u9700\u7684\u6805\u6781\u6c27\u5316\u7269\u539a\u5ea6\u76f8\u540c\u3002\u8be5\u7814\u7a76\u6210\u679c\u4ee5\u201cUltrathin ferroic HfO<sub>2<\/sub>\u2013ZrO<sub>2<\/sub> superlattice gate stack for advanced transistors\u201d\u4e3a\u9898\u53d1\u8868\u5728<strong><em>Nature<\/em><\/strong>\u4e0a\u3002<strong><img loading=\"lazy\" decoding=\"async\" class=\"aligncenter size-full wp-image-235776\" src=\"http:\/\/www.cailiaoniu.com\/wp-content\/uploads\/2022\/04\/\u56fe\u7247-8-2.png\" alt=\"\" width=\"767\" height=\"444\" srcset=\"http:\/\/www.cailiaoniu.com\/wp-content\/uploads\/2022\/04\/\u56fe\u7247-8-2.png 767w, http:\/\/www.cailiaoniu.com\/wp-content\/uploads\/2022\/04\/\u56fe\u7247-8-2-300x174.png 300w\" sizes=\"(max-width: 767px) 100vw, 767px\" \/><\/strong><\/p>\n<p><strong>\u4e8c\u3001\u3010\u6210\u679c\u63a0\u5f71\u3011<\/strong><\/p>\n<p>\u91d1\u5c5e\u6c27\u5316\u7269\u534a\u5bfc\u4f53\u7535\u5bb9\u5668\u7684\u6574\u4f53\u7b49\u6548\u6c27\u5316\u5c42\u539a\u5ea6\u76f8\u5f53\u4e8e\u6709\u6548SiO<sub>2<\/sub>\u539a\u5ea6\uff0c\u7ea6\u4e3a6.5 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nm\u65f6\u8868\u73b0\u51fa\u6df7\u5408\u7684\u94c1\u7535-\u53cd\u94c1\u7535\u6709\u5e8f\u3002\u4e0b\u964d\u5230\u8fd9\u6837\u7684\u539a\u5ea6\uff0c\u5e76\u4ecd\u7136\u53ef\u4ee5\u7a33\u5b9a\u7ade\u4e89\u7684\u94c1\u6027\u6709\u5e8f\uff0c\u8fd9\u5bf9\u4e8e\u5148\u8fdb\u7684\u7535\u5b50\u5668\u4ef6\u975e\u5e38\u91cd\u8981\uff0c\u56e0\u4e3a\u5c3a\u5bf8\u7f29\u653e\u9700\u8981\u8d85\u8584\u6805\u6781\u53e0\u5c42\u3002<\/li>\n<li style=\"text-align: left;\">\u5efa\u7acb\u4e86\u539f\u5b50\u5c42\u5806\u53e0\u7684\u5173\u952e\u4f5c\u7528\uff0c\u5229\u7528\u5176\u72ec\u7279\u7684\u5c3a\u5bf8\u6548\u5e94\u548c\u4e30\u5bcc\u7684AFE\u2013FE\u591a\u6676\u578b\uff0c\u63a7\u5236\u94c1\u6027\u7a7a\u95f4\u548c\u8367\u77f3\u7ed3\u6784\u6c27\u5316\u7269\u7684\u4ecb\u7535\u5e38\u6570\u5230\u8fbe\u8d85\u8584\u6781\u9650\u3002<\/li>\n<\/ol>\n<p><strong>\u56db\u3001\u3010\u6570\u636e\u6982\u89c8\u3011<\/strong><\/p>\n<p><strong><img loading=\"lazy\" decoding=\"async\" class=\"aligncenter size-full wp-image-235773\" src=\"http:\/\/www.cailiaoniu.com\/wp-content\/uploads\/2022\/04\/\u56fe\u7247-1-8.png\" alt=\"\" width=\"683\" height=\"416\" srcset=\"http:\/\/www.cailiaoniu.com\/wp-content\/uploads\/2022\/04\/\u56fe\u7247-1-8.png 683w, http:\/\/www.cailiaoniu.com\/wp-content\/uploads\/2022\/04\/\u56fe\u7247-1-8-300x183.png 300w\" sizes=\"(max-width: 683px) 100vw, 683px\" \/><\/strong><\/p>\n<p><strong>\u56fe<\/strong><strong>1<\/strong>. \u8d85\u8584HfO<sub>2<\/sub>-ZrO<sub>2<\/sub>\u8d1f\u7535\u5bb9\u7684\u539f\u5b50\u5c3a\u5ea6\u8bbe\u8ba1 <strong>\u00a9 2022 Springer Nature<\/strong><\/p>\n<p><strong><img loading=\"lazy\" decoding=\"async\" class=\"aligncenter size-full wp-image-235774\" src=\"http:\/\/www.cailiaoniu.com\/wp-content\/uploads\/2022\/04\/\u56fe\u7247-6-3.png\" alt=\"\" width=\"695\" height=\"401\" srcset=\"http:\/\/www.cailiaoniu.com\/wp-content\/uploads\/2022\/04\/\u56fe\u7247-6-3.png 695w, http:\/\/www.cailiaoniu.com\/wp-content\/uploads\/2022\/04\/\u56fe\u7247-6-3-300x173.png 300w\" sizes=\"(max-width: 695px) 100vw, 695px\" \/><\/strong><\/p>\n<p><strong>\u56fe<\/strong><strong>2.<\/strong> \u8d85\u8584HfO<sub>2<\/sub>-ZrO<sub>2<\/sub>\u6df7\u5408\u94c1\u5f02\u8d28\u7ed3\u6784\u7684\u589e\u5f3a\u7535\u5bb9 <strong>\u00a9 2022 Springer Nature<\/strong><\/p>\n<p><strong><img loading=\"lazy\" decoding=\"async\" class=\"aligncenter size-full wp-image-235775\" src=\"http:\/\/www.cailiaoniu.com\/wp-content\/uploads\/2022\/04\/\u56fe\u7247-7.png\" alt=\"\" width=\"701\" height=\"542\" srcset=\"http:\/\/www.cailiaoniu.com\/wp-content\/uploads\/2022\/04\/\u56fe\u7247-7.png 701w, http:\/\/www.cailiaoniu.com\/wp-content\/uploads\/2022\/04\/\u56fe\u7247-7-300x232.png 300w\" sizes=\"(max-width: 701px) 100vw, 701px\" \/><\/strong><\/p>\n<p><strong>\u56fe<\/strong><strong>3<\/strong>. \u8584\u6df7\u5408\u94c1\u8d28HfO<sub>2<\/sub>\u2013ZrO<sub>2<\/sub>\u6805\u6781\u53e0\u5c42\u7684\u5668\u4ef6\u6027\u80fd\u4f18\u52bf <strong>\u00a9 2022 Springer Nature<\/strong><\/p>\n<p><strong>\u4e94\u3001\u6210\u679c\u542f\u793a<\/strong><\/p>\n<p>\u5728\u8bb8\u591a\u5355\u6676\u9499\u949b\u77ff\u7ed3\u6784\u4f53\u7cfb\u4e2d\uff0c\u5df2\u7ecf\u53d1\u884c\u4e86\u8d1f\u7535\u5bb9\u589e\u5f3a\u94c1\u6027\u8d85\u6676\u683c\u7684\u7535\u5bb9\u3002\u8fd9\u9879\u5de5\u4f5c\u8868\u660e\uff0c\u5728\u7845\u8868\u9762\u4e0a\u7684HfO<sub>2<\/sub>-ZrO<sub>2<\/sub>\u8424\u77f3\u7ed3\u6784\u8d85\u6676\u683c\u4e2d\u4e5f\u53ef\u80fd\u51fa\u73b0\u540c\u6837\u7684\u589e\u5f3a\uff0c\u8fd9\u79cd\u8d85\u6676\u683c\u5728\u8584\u819c\u539a\u5ea6~ 2 nm\u65f6\u8868\u73b0\u51fa\u6df7\u5408\u7684\u94c1\u7535-\u53cd\u94c1\u7535\u6709\u5e8f\uff0c\u5e76\u4ecd\u7136\u53ef\u4ee5\u7a33\u5b9a\u94c1\u6027\u6709\u5e8f\uff0c\u8fd9\u5bf9\u4e8e\u5148\u8fdb\u7684\u7535\u5b50\u5668\u4ef6\u975e\u5e38\u91cd\u8981\uff0c\u56e0\u4e3a\u5c3a\u5bf8\u7f29\u653e\u9700\u8981\u8d85\u8584\u6805\u6781\u53e0\u5c42\u3002<\/p>\n<p>\u4e0e\u4f20\u7edf\u7684\u63ba\u6742\u6280\u672f\u4e0d\u540c\uff0c\u8fd9\u9879\u5de5\u4f5c\u5efa\u7acb\u4e86\u539f\u5b50\u5c42\u5806\u53e0\u7684\u5173\u952e\u4f5c\u7528\uff0c\u5229\u7528\u5176\u72ec\u7279\u7684\u5c3a\u5bf8\u6548\u5e94\u548c\u4e30\u5bcc\u7684AFE\u2013FE\u591a\u6676\u578b\uff0c\u63a7\u5236\u94c1\u6027\u7a7a\u95f4\u548c\u8367\u77f3\u7ed3\u6784\u6c27\u5316\u7269\u7684\u4ecb\u7535\u5e38\u6570\u5230\u8fbe\u8d85\u8584\u6781\u9650\u3002\u5f53\u6df7\u5408\u76f8HfO<sub>2<\/sub>-ZrO<sub>2<\/sub>\u591a\u5c42\u819c\u96c6\u6210\u5728Si\u8868\u9762\u4e0a\u65f6\uff0c\u6805\u6781\u5806\u53e0\u663e\u793a\u51fa\u7535\u5bb9\u589e\u5f3a\uff0c\u5c06EOT\u964d\u4f4e\u5230\u4e00\u4e2a\u9608\u503c\u4ee5\u4e0b\uff0c\u4f20\u7edf\u4e0a\u9700\u8981\u4ed4\u7ec6\u6e05\u9664\u754c\u9762SiO<sub>2<\/sub>\uff0c\u5426\u5219\u4f1a\u964d\u4f4e\u8fc1\u79fb\u7387\u3002<\/p>\n<p>\u6b64\u5916\uff0c\u4f4eEOT\u662f\u5728\u4e00\u4e2a\u6570\u91cf\u7ea7\u4ee5\u4e0a\u7684\u4f4e\u6f0f\u7535\u6d41\u4e0b\u5b9e\u73b0\u7684\u3002\u56e0\u6b64\uff0c\u5728\u539f\u5b50\u5c3a\u5ea6\u5c42\u9762\u8bbe\u8ba1\u7684\u8d85\u8584HfO<sub>2<\/sub>-ZrO<sub>2<\/sub>\u94c1\u6027\u6805\u6c27\u5316\u7269\uff0c\u4e3a\u672a\u6765\u7845\u6676\u4f53\u7ba1\u7684\u8bbe\u8ba1\u63d0\u4f9b\u4e86\u4e00\u4e2a\u6709\u524d\u666f\u7684\u6750\u6599\u8bbe\u8ba1\u5e73\u53f0\uff0c\u8d85\u8d8a\u4e86\u4f20\u7edf\u7684\u9ad8\u03ba\u4ecb\u8d28\u3002<\/p>\n<p>\u539f\u6587\u94fe\u63a5\uff1a<a href=\"https:\/\/www.nature.com\/articles\/s41586-022-04425-6\">https:\/\/www.nature.com\/articles\/s41586-022-04425-6<\/a><\/p>\n<p>DOI\uff1a10.1038\/s41586-022-04425-6<\/p>\n<p>\u672c\u6587\u7531try123\u4f9b\u7a3f\u3002<\/p>\n","protected":false},"excerpt":{"rendered":"<p>\u4e00\u3001\u3010\u5bfc\u8bfb\u3011 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