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\"\"<\/p>\n

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\"\"<\/p>\n

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 <\/p>\n

\u8be5\u5de5\u4f5c\u8fd1\u671f\u4ee5 \u201cUltra-confined catalytic growth integration of sub-10 nm 3D stacked silicon nanowires via self-delimited droplet formation strategy\u201d \u53d1\u8868\u4e8eSmall\u4e0a, DOI: 10.1002\/smll.202204390\u3002\u6587\u7ae0\u94fe\u63a5\uff1ahttps:\/\/onlinelibrary.wiley.com\/doi\/10.1002\/smll.202204390<\/a> \u3002\u5176\u4e2d\uff0c\u535a\u58eb\u80e1\u745e\u91d1\uff082022\u5e746\u6708\u6bd5\u4e1a\uff0c\u73b0\u4efb\u804c\u626c\u5dde\u5927\u5b66\uff09\u4e3a\u7b2c\u4e00\u4f5c\u8005\uff0c\u4f59\u6797\u851a\u6559\u6388\u4e3a\u901a\u8baf\u4f5c\u8005\uff0c\u7814\u7a76\u5de5\u4f5c\u5f97\u5230\u4e86\u5357\u4eac\u5927\u5b66\u5f90\u9a8f\u6559\u6388\u3001\u65bd\u6bc5\u6559\u6388\u3001\u738b\u519b\u8f6c\u6559\u6388\u3001\u5218\u5b97\u5149\u526f\u7814\u7a76\u5458\u7684\u5927\u529b\u652f\u6301\uff0c\u4ee5\u53ca\u56fd\u5bb6\u81ea\u7136\u79d1\u5b66\u57fa\u91d1\u59d4\u91cd\u5927\u7814\u7a76\u8ba1\u5212\u91cd\u70b9\u9879\u76ee\u53ca\u534e\u4e3a-\u5357\u4eac\u5927\u5b66\u4e13\u9879\u5408\u4f5c\u7b49\u57fa\u91d1\u9879\u76ee\u8d44\u52a9\uff0c\u5728\u6b64\u4e00\u5e76\u8868\u793a\u8877\u5fc3\u611f\u8c22\uff01<\/p>\n

\u524d\u671f\u76f8\u5173\u5de5\u4f5c\uff1a<\/p>\n

Hu, R.; Xu, S.; Wang, J.; Shi, Y.; Xu, J.; Chen, K.; Yu, L.*<\/sup> Unprecedented Uniform 3D Growth Integration of 10-Layer Stacked Si Nanowires on Tightly Confined Sidewall Grooves. Nano Lett. 2020, 20(10), 7489-7497.<\/p>\n

Hu, R.; Ma H.; Yin H.; Xu, J.; Chen, K.; Yu, L.*<\/sup> Facile 3D integration of Si nanowires on Bosch-etched sidewalls for stacked channel transistors. Nanoscale 2020, 12, 2787-2792.<\/p>\n

Wu X.; Ma H.; Yin H.; Pan D.; Wang J.; Yu, L. *<\/sup>; Xu, J.; Chen, K. 3D Sidewall Integration of Ultrahigh-Density Silicon Nanowires for Stacked Channel. Adv. Electron. Mater. 2019, 5, 1800627.<\/p>\n

Sun, Y.; Dong, T.; Yu, L.*<\/sup>; Xu, J.*<\/sup>; Chen, K. Planar Growth, Integration, and Applications of Semiconducting Nanowires. Adv. Mater. 2020, 32(27), 1903945.<\/p>\n

Yin, H.; Yang, H.; Xu, S.; Pan, D. *<\/sup>; Xu, J.; Chen, K.; Yu, L. *<\/sup>High Performance Si Nanowire TFTs With Ultrahigh on\/off Current Ratio and Steep Subthreshold Swing.\u00a0IEEE Electr. Device L. 2020,<\/strong>41(1), 46-49.<\/p>\n","protected":false},"excerpt":{"rendered":"

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