{"id":258717,"date":"2024-03-22T06:35:36","date_gmt":"2024-03-21T22:35:36","guid":{"rendered":"http:\/\/www.cailiaoniu.com\/?p=258717"},"modified":"2024-03-21T21:00:42","modified_gmt":"2024-03-21T13:00:42","slug":"258717","status":"publish","type":"post","link":"http:\/\/www.cailiaoniu.com\/?p=258717","title":{"rendered":"\u5357\u4eac\u822a\u7a7a\u822a\u5929\u5927\u5b66IJMTM\uff1a\u6676\u5706\u7ea7\u7eb3\u7c73\u5b6a\u6676\u94dc\u5fae\u7ed3\u6784\u9635\u5217\u7684\u7cbe\u5bc6\u7535\u94f8\u6280\u672f"},"content":{"rendered":"<p><strong>[<\/strong><strong>\u79d1\u5b66\u80cc\u666f<\/strong><strong>]<\/strong><\/p>\n<p>\u968f\u7740\u7269\u8054\u7f51\u3001\u4eba\u5de5\u667a\u80fd\u3001\u4e91\u8ba1\u7b97\u7b49\u65b0\u5174\u7535\u5b50\u6218\u7565\u6027\u4ea7\u4e1a\u5feb\u901f\u53d1\u5c55\uff0c\u6211\u56fd\u5728\u82af\u7247\u5236\u9020\u4e3a\u4ee3\u8868\u7684\u9ad8\u7aef\u7535\u5b50\u5236\u9020\u9886\u57df\u7684\u6280\u672f\u9700\u6c42\u65e5\u76ca\u589e\u52a0\u3002\u7535\u5b50\u7535\u9540\uff08\u7535\u94f8\uff09\u662f\u96c6\u6210\u7535\u8def\u7b49\u9ad8\u7aef\u7535\u5b50\u5236\u9020\u4ea7\u4e1a\u7684\u6838\u5fc3\u6280\u672f\u4e4b\u4e00\uff0c\u5176\u5e94\u7528\u8d2f\u7a7f\u9ad8\u7aef\u7535\u5b50\u5236\u9020\u7684\u5168\u90e8\u6d41\u7a0b\uff0c\u5e76\u4e14\u5728\u592a\u8d6b\u5179\u3001MEMS\u3001\u5fae\u4f20\u611f\u5668\u7b49\u5fae\u7eb3\u5668\u4ef6\u5236\u9020\u4e2d\u7684\u5e94\u7528\u4e0d\u65ad\u62d3\u5c55\u3002\u7eb3\u7c73\u5b6a\u6676\u7ed3\u6784\u94dc\uff08nt-Cu\uff09\u6750\u6599\u56e0\u5176\u65e0\u4e0e\u4f26\u6bd4\u7684\u529b\u5b66\u548c\u7269\u7406\u6027\u80fd\uff0c\u6781\u5927\u5730\u63d0\u9ad8\u4e86\u94dc\u7684\u6297\u7535\u8fc1\u79fb\u6027\u80fd\uff0c\u907f\u514d\u4e86\u710a\u63a5\u5de5\u827a\u4e2d\u94dc\u9521\u5408\u91d1\u5316\u548c\u67ef\u80af\u8fbe\u5c14\u5b54\u6d1e\u7b49\u95ee\u9898\uff0c\u5df2\u7136\u6210\u4e3a\u5f53\u524d\u6700\u5177\u5e94\u7528\u524d\u666f\u7684\u7535\u5b50\u4e92\u8fde\u6750\u6599\u4e4b\u4e00\u3002\u4e0e\u6b64\u540c\u65f6\uff0c\u7535\u5b50\u7535\u9540\uff08\u7535\u94f8\uff09\u6280\u672f\u4e5f\u662f\u7eb3\u7c73\u5b6a\u6676\u94dc\u6750\u6599\u7684\u9996\u9009\u5408\u6210\u65b9\u6cd5\uff0c\u5176\u96be\u70b9\u5728\u4e8e\u5982\u4f55\u5b9e\u73b0\u6c89\u79ef\u5c42\u7684\u5747\u5300\u589e\u539a\u4ee5\u53ca\u6c89\u79ef\u5c42\u4e2d\u5b6a\u6676\u7ed3\u6784\u7684\u7cbe\u7ec6\u8c03\u63a7\u3002<\/p>\n<p>\u7535\u94f8\u90e8\u4ef6\u7684\u539a\u5ea6\u5206\u5e03\u4e0d\u5747\u5300\u4e0d\u4ec5\u5f71\u54cd\u5176\u52a0\u5de5\u7cbe\u5ea6\uff0c\u8fd8\u4f1a\u5728\u968f\u540e\u7684\u5316\u5b66\u673a\u68b0\u5e73\u5766\u5316\uff08CMP\uff09\u8fc7\u7a0b\u4e2d\u4f1a\u9020\u6210\u4e0d\u53ef\u9006\u7684\u51f9\u9677\u548c\u4fb5\u8680\uff0c\u4ece\u800c\u5f71\u54cd\u540e\u9053\u5de5\u827a\u3002\u4e0e\u6b64\u540c\u65f6\uff0c\u7531\u4e8e\u7535\u94f8\u8fc7\u7a0b\u4e2d\u65bd\u52a0\u7684\u7535\u6d41\u5206\u5e03\u4e0d\u5747\u5300\uff0c\u6676\u5706\u4e0a\u4e0d\u540c\u4f4d\u7f6e\u7684\u5355\u4e2a\u7535\u94f8\u7ec4\u4ef6\u7684\u5fae\u89c2\u7ed3\u6784\uff08\u4f8b\u5982\uff0c\u7ec4\u4ef6\u6676\u7c92\u5c3a\u5bf8\u3001\u5143\u7d20\u542b\u91cf\u548c\u6676\u4f53\u53d6\u5411\uff09\u548c\u6027\u80fd\uff0c\u751a\u81f3\u540c\u4e00\u7535\u94f8\u90e8\u4ef6\u4e0a\u7684\u4e0d\u540c\u4f4d\u7f6e\u5904\u7684\u5fae\u89c2\u7ed3\u6784\u548c\u6027\u80fd\u53ef\u80fd\u4f1a\u6709\u6240\u4e0d\u540c\u3002\u4e8b\u5b9e\u4e0a\uff0c\u7535\u94f8\u5236\u9020\u8fc7\u7a0b\u4e2d\u8fd9\u79cd\u5fae\u89c2\u7ed3\u6784\u7684\u5f02\u8d28\u6027\u5f80\u5f80\u88ab\u5ffd\u89c6\uff0c\u9650\u5236\u4e86\u5176\u5728\u9ad8\u7aef\u5236\u9020\u4e2d\u7684\u5e94\u7528\u3002<\/p>\n<p><strong>[<\/strong><strong>\u6210\u679c\u63a0\u5f71<\/strong><strong>]<\/strong><\/p>\n<p>\u8fd1\u65e5\uff0c\u5357\u4eac\u822a\u7a7a\u822a\u5929\u5927\u5b66\u7535\u5316\u5b66\u5236\u9020\u6280\u672f\u56e2\u961f\u6210\u5458<strong>\u6731\u589e\u4f1f\u6559\u6388<\/strong>\u5728\u9ad8\u7aef\u5fae\u7535\u5b50\u5236\u9020\u6280\u672f\u65b9\u9762\u53d6\u5f97\u65b0\u8fdb\u5c55\u3002\u7814\u7a76\u56f4\u7ed5\u6676\u5706\u7ea7\u7eb3\u7c73\u5b6a\u6676\u7ed3\u6784\u94dc\u6750\u6599\u5236\u9020\u96be\u9898\uff0c\u521b\u9020\u6027\u5730\u63d0\u51fa\u4e86\u4e00\u79cd\u540c\u6b65\u63d0\u9ad8\u6676\u5706\u7ea7\u9635\u5217\u5fae\u7ed3\u6784\u7535\u94f8\u539a\u5ea6\u5747\u5300\u6027\u548c\u5fae\u89c2\u7ec4\u7ec7\u4e00\u81f4\u6027\u7684\u7cbe\u5bc6\u7535\u94f8\u65b9\u6cd5\uff0c\u901a\u8fc7\u5728\u6676\u5706\u9634\u6781\u5916\u56f4\u6dfb\u52a0\u8f85\u52a9\u9634\u6781\u6765\u4fdd\u8bc1\u6574\u4f53\u9635\u5217\u5fae\u7ed3\u6784\u8868\u9762\u7535\u6d41\u5bc6\u5ea6\u5206\u5e03\u7684\u4e00\u81f4\u6027\uff0c\u540c\u65f6\u65bd\u52a0\u5468\u671f\u6027\u53cd\u5411\u8109\u51b2\u7535\u6d41\u5bf9\u9635\u5217\u4e2d\u5fae\u7ed3\u6784\u5355\u5143\u8fdb\u884c\u7535\u5316\u5b66\u5fae\u6574\u5e73\u3002\u57fa\u4e8e\u4e8c\u8005\u9ad8\u5ea6\u534f\u540c\u4f5c\u7528\uff0c\u5de7\u5999\u5730\u89e3\u51b3\u4e86\u4f20\u7edf\u7535\u94f8\u5de5\u827a\u4e2d\u7684\u8fb9\u7f18\u6548\u5e94\u95ee\u9898\u548c\u53cd\u5411\u8109\u51b2\u7535\u94f8\u5de5\u827a\u4e2d\u6c89\u79ef\u901f\u7387\u4f4e\u7684\u95ee\u9898\uff0c\u5728\u7cbe\u786e\u63a7\u5236\u6676\u5706\u7ea7\u9635\u5217\u7ed3\u6784\u751f\u957f\u539a\u5ea6\u548c\u5fae\u89c2\u7ec4\u7ec7\u7ed3\u6784\u65b9\u9762\u5c55\u73b0\u51fa\u5de8\u5927\u6f5c\u529b\u3002\u76f8\u5173\u6210\u679c\u4ee5\u9898\u4e3a\u201cNew precision electroforming process for the simultaneous improvement of thickness uniformity and microstructure homogeneity of wafer-scale nanotwinned copper arrays\u201d\u7684\u8bba\u6587\u5728\u56fd\u9645\u673a\u68b0\u5de5\u7a0b\u9886\u57df\u8457\u540d\u671f\u520a\u300aInternational Journal of Machine Tools and Manufacture\u300b\u4e0a\u516c\u5f00\u53d1\u8868\u3002<\/p>\n<p><a href=\"http:\/\/www.cailiaoniu.com\/wp-content\/uploads\/2024\/03\/1-24.png\"><img loading=\"lazy\" decoding=\"async\" class=\"aligncenter size-full wp-image-258719\" src=\"http:\/\/www.cailiaoniu.com\/wp-content\/uploads\/2024\/03\/1-24.png\" alt=\"\" width=\"644\" height=\"492\" srcset=\"http:\/\/www.cailiaoniu.com\/wp-content\/uploads\/2024\/03\/1-24.png 644w, http:\/\/www.cailiaoniu.com\/wp-content\/uploads\/2024\/03\/1-24-300x229.png 300w\" sizes=\"(max-width: 644px) 100vw, 644px\" \/><\/a><\/p>\n<p>\u8bba\u6587\u94fe\u63a5\uff1a<a href=\"https:\/\/doi.org\/10.1016\/j.ijmachtools.2023.104006\">https:\/\/doi.org\/10.1016\/j.ijmachtools.2023.104006<\/a><\/p>\n<p><strong>[<\/strong><strong>\u6570\u636e\u6982\u89c8<\/strong><strong>]<\/strong><\/p>\n<p><a href=\"http:\/\/www.cailiaoniu.com\/wp-content\/uploads\/2024\/03\/2-24.png\"><img loading=\"lazy\" decoding=\"async\" class=\"aligncenter size-full wp-image-258720\" src=\"http:\/\/www.cailiaoniu.com\/wp-content\/uploads\/2024\/03\/2-24.png\" alt=\"\" width=\"577\" height=\"555\" srcset=\"http:\/\/www.cailiaoniu.com\/wp-content\/uploads\/2024\/03\/2-24.png 577w, http:\/\/www.cailiaoniu.com\/wp-content\/uploads\/2024\/03\/2-24-300x289.png 300w\" sizes=\"(max-width: 577px) 100vw, 577px\" \/><\/a><\/p>\n<p><strong>\u8bba\u6587\u7684\u56fe\u7247\u6458\u8981<\/strong> \u00a9 2023 Elsevier Ltd. All rights reserved.<\/p>\n<p><a href=\"http:\/\/www.cailiaoniu.com\/wp-content\/uploads\/2024\/03\/3-23.png\"><img loading=\"lazy\" decoding=\"async\" class=\"aligncenter size-full wp-image-258721\" src=\"http:\/\/www.cailiaoniu.com\/wp-content\/uploads\/2024\/03\/3-23.png\" alt=\"\" width=\"404\" height=\"348\" srcset=\"http:\/\/www.cailiaoniu.com\/wp-content\/uploads\/2024\/03\/3-23.png 404w, http:\/\/www.cailiaoniu.com\/wp-content\/uploads\/2024\/03\/3-23-300x258.png 300w\" sizes=\"(max-width: 404px) 100vw, 404px\" \/><\/a><\/p>\n<p><strong>\u56fe<\/strong><strong>3 <\/strong><strong>\u4f20\u7edf\u7535\u94f8\u6676\u5706\u7ea7\u7eb3\u7c73\u5b6a\u6676\u94dc\u9635\u5217\u5b58\u5728\u4e24\u7c7b\u539a\u5ea6\u4e0d\u5747\u5300\u73b0\u8c61\uff0c\u5373\u5916\u4fa7\u533a\u57df<\/strong><strong>A<\/strong><strong>\u4e0e\u5185\u4fa7\u533a\u57df<\/strong><strong>C<\/strong><strong>\u4e4b\u95f4\u7684\u6574\u4f53\u539a\u5ea6\u4e0d\u5747\u5300\u4ee5\u53ca\u5355\u4e2a\u53e0\u7247\u5916\u4fa7\u4e0e\u5176\u4e2d\u5fc3\u533a\u57df\u7684\u539a\u5ea6\u4e0d\u5747\u5300\uff1a<\/strong>(a) \u7535\u94f8\u7eb3\u7c73\u5b6a\u6676\u94dc\u9635\u5217\u539a\u5ea6\u6d4b\u91cf\u7ed3\u679c (b) \u76f8\u5e94\u7684\u539a\u5ea6\u5206\u5e03\u4eff\u771f\u7ed3\u679c (c) \u8bd5\u9a8c\u548c\u4eff\u771f\u7ed3\u679c\u5bf9\u6bd4 (d) \u9634\u6781\u9644\u8fd1\u7684\u7535\u573a\u5206\u5e03\u4eff\u771f\u7ed3\u679c \u00a9 2023 Elsevier Ltd. All rights reserved.<\/p>\n<p><a href=\"http:\/\/www.cailiaoniu.com\/wp-content\/uploads\/2024\/03\/4-20.png\"><img loading=\"lazy\" decoding=\"async\" class=\"aligncenter size-full wp-image-258722\" src=\"http:\/\/www.cailiaoniu.com\/wp-content\/uploads\/2024\/03\/4-20.png\" alt=\"\" width=\"535\" height=\"414\" srcset=\"http:\/\/www.cailiaoniu.com\/wp-content\/uploads\/2024\/03\/4-20.png 535w, http:\/\/www.cailiaoniu.com\/wp-content\/uploads\/2024\/03\/4-20-300x232.png 300w\" sizes=\"(max-width: 535px) 100vw, 535px\" \/><\/a><\/p>\n<p><strong>\u56fe<\/strong><strong>5 <\/strong><strong>\u4f20\u7535\u94f8\u6676\u5706\u7ea7\u7eb3\u7c73\u5b6a\u6676\u94dc\u9635\u5217\u5b58\u5728\u7684\u5fae\u89c2\u7ec4\u7ec7\u5f02\u8d28\u6027\u73b0\u8c61\uff0c\u5373\u5916\u4fa7<\/strong><strong>A<\/strong><strong>\u533a\u53e0\u7247\u4e2d\uff08<\/strong><strong>111<\/strong><strong>\uff09\u53d6\u5411\u6676\u7c92\u5360\u6bd4\u8f83\u5c11<\/strong><strong>: <\/strong>(a) \u4ece\u4e0d\u540c\u533a\u57df\u6536\u96c6\u7684\u94dc\u53e0\u7247\u7684XRD\u56fe\u8c31 (b\uff0cd) \u6765\u81ea\u56fe3\u4e2dA\u533a\u548cC\u533a\u7684\u94dc\u53e0\u7247\u7684\u6a2a\u622a\u9762FIB\u56fe (c\uff0ce) \u76f8\u5e94\u7684EBSD\u53d6\u5411\u5206\u5e03\u56fe \u00a9 2023 Elsevier Ltd. All rights reserved.<\/p>\n<p><a href=\"http:\/\/www.cailiaoniu.com\/wp-content\/uploads\/2024\/03\/5-14.png\"><img loading=\"lazy\" decoding=\"async\" class=\"aligncenter size-full wp-image-258723\" src=\"http:\/\/www.cailiaoniu.com\/wp-content\/uploads\/2024\/03\/5-14.png\" alt=\"\" width=\"549\" height=\"502\" srcset=\"http:\/\/www.cailiaoniu.com\/wp-content\/uploads\/2024\/03\/5-14.png 549w, http:\/\/www.cailiaoniu.com\/wp-content\/uploads\/2024\/03\/5-14-300x274.png 300w\" sizes=\"(max-width: 549px) 100vw, 549px\" \/><\/a><\/p>\n<p><strong>\u56fe<\/strong><strong>7 <\/strong><strong>\u901a\u8fc7\u5f15\u5165\u8f85\u52a9\u9634\u6781\u5e76\u8c03\u8282\u8f85\u52a9\u9634\u6781\u4e0e\u9634\u6781\u8868\u9762\u7535\u6d41\u5bc6\u5ea6\u4e4b\u6bd4\uff08<\/strong><strong>J<\/strong><strong>\uff09\u6765\u8bd5\u56fe\u6539\u5584\u6574\u4f53\u539a\u5ea6\u4e0d\u5747\u5300\u6027\uff1a<\/strong>(a-c) J\u5bf9\u6574\u4f53\u539a\u5ea6\u5747\u5300\u6027\u7684\u5f71\u54cd (d) \u76f8\u5e94\u5730\u4eff\u771f\u7ed3\u679c\u6c47\u603b\u60c5\u51b5 \u00a9 2023 Elsevier Ltd. All rights reserved.<\/p>\n<p><a href=\"http:\/\/www.cailiaoniu.com\/wp-content\/uploads\/2024\/03\/6-6.png\"><img loading=\"lazy\" decoding=\"async\" class=\"aligncenter size-full wp-image-258724\" src=\"http:\/\/www.cailiaoniu.com\/wp-content\/uploads\/2024\/03\/6-6.png\" alt=\"\" width=\"490\" height=\"412\" srcset=\"http:\/\/www.cailiaoniu.com\/wp-content\/uploads\/2024\/03\/6-6.png 490w, http:\/\/www.cailiaoniu.com\/wp-content\/uploads\/2024\/03\/6-6-300x252.png 300w\" sizes=\"(max-width: 490px) 100vw, 490px\" \/><\/a><\/p>\n<p><strong>\u56fe<\/strong><strong>14 <\/strong><strong>\u7ed3\u5408\u53cd\u5411\u8109\u51b2\u7535\u94f8\u4e0e\u8f85\u52a9\u9634\u6781\u624b\u6bb5\u540c\u65f6\u5b9e\u73b0\u5bf9\u6574\u4f53\u548c\u5355\u4e2a\u53e0\u7247\u7684\u539a\u5ea6\u5747\u5300\u6027\u4f18\u5316\uff1a<\/strong>(a) \u6700\u4f73\u5de5\u827a\u53c2\u6570\u4e0b\u53e0\u7247\u539a\u5ea6\u5206\u5e03\u7ed3\u679c\u4ee5\u53ca(b) \u76f8\u5e94\u7684\u4eff\u771f\u7ed3\u679c (c)\u4e0d\u540c\u5de5\u827a\u53c2\u6570\u4e0b\u53e0\u7247\u539a\u5ea6\u5206\u5e03\u6d4b\u91cf\u4e0e\u4eff\u771f\u7ed3\u679c\u6c47\u603b (d)\u76f8\u5e94\u7684\u539a\u5ea6\u4e0d\u5747\u5300\u7cfb\u6570CV\u53d8\u5316\u60c5\u51b5 \u00a9 2023 Elsevier Ltd. All rights reserved.<\/p>\n<p><a href=\"http:\/\/www.cailiaoniu.com\/wp-content\/uploads\/2024\/03\/7-3.png\"><img loading=\"lazy\" decoding=\"async\" class=\"aligncenter size-full wp-image-258725\" src=\"http:\/\/www.cailiaoniu.com\/wp-content\/uploads\/2024\/03\/7-3.png\" alt=\"\" width=\"491\" height=\"366\" srcset=\"http:\/\/www.cailiaoniu.com\/wp-content\/uploads\/2024\/03\/7-3.png 491w, http:\/\/www.cailiaoniu.com\/wp-content\/uploads\/2024\/03\/7-3-300x224.png 300w\" sizes=\"(max-width: 491px) 100vw, 491px\" \/><\/a><\/p>\n<p><strong>\u56fe<\/strong><strong> 15 <\/strong><strong>\u8f85\u52a9\u9634\u6781\u548c\u53cd\u5411\u8109\u51b2\u7535\u94f8\u76f8\u7ed3\u5408\u4ea7\u751f\u7684\u534f\u540c\u6548\u5e94\u5bf9\u6574\u4f53\u548c\u5355\u4e2a\u53e0\u7247\u539a\u5ea6\u5747\u5300\u6027\u7684\u5f71\u54cd\u673a\u5236<\/strong>\uff1a (a) \u56db\u79cd\u5178\u578b\u5de5\u827a\u4e0b\u83b7\u5f97\u7684\u7eb3\u7c73\u5b6a\u6676\u94dc\u53e0\u7247\u539a\u5ea6\u66f2\u7ebf\u6bd4\u8f83\u60c5\u51b5\u4ee5\u53ca (b) \u76f8\u5e94\u7684\u5f52\u4e00\u5316\u6c89\u79ef\u901f\u7387\u5206\u5e03\u56fe (c) \u6c89\u79ef\u901f\u7387\u4eff\u771f\u5206\u5e03\u7ed3\u679c \u00a9 2023 Elsevier Ltd. All rights reserved.<\/p>\n<p><a href=\"http:\/\/www.cailiaoniu.com\/wp-content\/uploads\/2024\/03\/8-1.png\"><img loading=\"lazy\" decoding=\"async\" class=\"aligncenter size-full wp-image-258726\" src=\"http:\/\/www.cailiaoniu.com\/wp-content\/uploads\/2024\/03\/8-1.png\" alt=\"\" width=\"491\" height=\"297\" srcset=\"http:\/\/www.cailiaoniu.com\/wp-content\/uploads\/2024\/03\/8-1.png 491w, http:\/\/www.cailiaoniu.com\/wp-content\/uploads\/2024\/03\/8-1-300x181.png 300w\" sizes=\"(max-width: 491px) 100vw, 491px\" \/><\/a><\/p>\n<p><strong>\u56fe<\/strong><strong>16 <\/strong><strong>\u7814\u7a76\u4e86\u4e0d\u540c\u53cd\u5411\u8109\u51b2\u7535\u94f8\u53c2\u6570\uff08\u6b63\u53cd\u901a\u7535\u91cf\u4e4b\u6bd4<\/strong><strong>Qa\/Qc<\/strong><strong>\uff09\u5bf9\u7eb3\u7c73\u5b6a\u6676\u94dc\u53e0\u7247\u5fae\u89c2\u7ec4\u7ec7\u7684\u5f71\u54cd\uff1a<\/strong>(a-h) \u4e0d\u540cQa\/Qc\u53c2\u6570\u503c\u6761\u4ef6\u4e0b\u7eb3\u7c73\u5b6a\u6676\u94dc\u53e0\u7247\u622a\u9762\u7684EBSD\u53d6\u5411\u5206\u5e03\u56fe \u00a9 2023 Elsevier Ltd. All rights reserved.<\/p>\n<p><a href=\"http:\/\/www.cailiaoniu.com\/wp-content\/uploads\/2024\/03\/9-1.png\"><img loading=\"lazy\" decoding=\"async\" class=\"aligncenter size-full wp-image-258727\" src=\"http:\/\/www.cailiaoniu.com\/wp-content\/uploads\/2024\/03\/9-1.png\" alt=\"\" width=\"491\" height=\"321\" srcset=\"http:\/\/www.cailiaoniu.com\/wp-content\/uploads\/2024\/03\/9-1.png 491w, http:\/\/www.cailiaoniu.com\/wp-content\/uploads\/2024\/03\/9-1-300x196.png 300w\" sizes=\"(max-width: 491px) 100vw, 491px\" \/><\/a><\/p>\n<p><strong>\u56fe<\/strong><strong>18 <\/strong><strong>\u7ed3\u5408\u53cd\u5411\u8109\u51b2\u7535\u94f8\u4e0e\u8f85\u52a9\u9634\u6781\u624b\u6bb5\u540c\u65f6\u5b9e\u73b0\u63d0\u5347\u6574\u4f53\u548c\u5355\u4e2a\u53e0\u7247\u7684\u5fae\u89c2\u7ec4\u7ec7\u4e00\u81f4\u6027\uff1a<\/strong>(a)\u56fe14\u4e2d9\u4e2a\u53e0\u7247\u5bf9\u5e94\u7684XRD\u56fe\u8c31 (b\uff0cc) \u4ee3\u8868\u6027\u94dc\u53e0\u7247\u622a\u9762FIB-SEM\u56fe\u50cf (d) \u56fe(a)\u4e2d\u4e0d\u540c\u7f16\u53f7\u53e0\u7247\u7684\u5e73\u5747\u786c\u5ea6\u4e0eXRD\u884d\u5c04\u5cf0(111)\u4e0e(220)\u4e4b\u6bd4 (e\uff0cf) \u4ee3\u8868\u6027\u94dc\u53e0\u7247\u622a\u9762TEM\u56fe\u50cf \u00a9 2023 Elsevier Ltd. All rights reserved.<\/p>\n<p><strong>[<\/strong><strong>\u6210\u679c\u542f\u793a<\/strong><strong>]<\/strong><\/p>\n<p>\u672c\u6587\u63d0\u51fa\u4e86\u4e00\u79cd\u5168\u65b0\u7684\u6676\u5706\u7ea7\u94dc\u5fae\u7ed3\u6784\u7cbe\u5bc6\u7535\u94f8\u5de5\u827a\uff0c\u8be5\u5de5\u827a\u5c06\u8f85\u52a9\u9634\u6781\u4e0e\u8109\u51b2\u53cd\u5411\u7535\u6d41\uff08PRC\uff09\u7535\u94f8\u76f8\u7ed3\u5408\uff0c\u5229\u7528\u4e8c\u8005\u4e4b\u95f4\u7684\u534f\u540c\u6548\u5e94\uff0c\u5728\u63d0\u9ad8\u539a\u5ea6\u7684\u5747\u5300\u6027\u7684\u540c\u65f6\u83b7\u5f97\u4e86\u7ec4\u7ec7\u4e00\u81f4\u6027\u66f4\u4f18\u7684\u7eb3\u7c73\u5b6a\u6676\u7ed3\u6784\u3002\u4f5c\u4e3a\u6240\u63d0\u51fa\u5de5\u827a\u7684\u4e00\u4e2a\u5b9e\u9645\u6f14\u793a\u6848\u4f8b\uff0c\u57284\u82f1\u5bf8\u6676\u5706\u9762\u79ef\u4e0a\u5236\u4f5c\u4e86\u7eb3\u7c73\u5b6a\u6676\u94dc\u53e0\u7247\u9635\u5217\uff0c\u5e76\u5bf9\u5176\u8fdb\u884c\u4e86\u6709\u9650\u5143\u6570\u503c\u6a21\u62df\u4eff\u771f\uff0c\u4ee5\u63a2\u8ba8\u8fd9\u79cd\u7279\u6b8a\u7684\u534f\u540c\u673a\u5236\u3002\u6700\u7ec8\u786e\u5b9a\u4e86\u9635\u5217\u5fae\u7ed3\u6784\u95f4\u8ddd\u3001\u7535\u6d41\u6ce2\u5f62\u548c\u539a\u5ea6\u4e0d\u5747\u5300\u6027\u4e09\u8005\u4e4b\u95f4\u7684\u5185\u5728\u76f8\u5173\u6027\uff0c\u7ed3\u679c\u8868\u660e\uff1a<\/p>\n<p>(1) \u7531\u4e8e\u56fa\u6709\u7684\u7535\u6d41\u8fb9\u7f18\u6548\u5e94\uff0c\u5728\u6676\u5706\u7ea7\u9635\u5217\u5fae\u7ed3\u6784\u7684\u7cbe\u5bc6\u7535\u94f8\u8fc7\u7a0b\u4e2d\uff0c\u9634\u6781\u4e0a\u7684\u7535\u6d41\u5206\u5e03\u4e0d\u5747\u5300\u662f\u5bfc\u81f4\u5fae\u89c2\u7ec4\u7ec7\u53ca\u6027\u80fd\uff08\u5982\u663e\u5fae\u786c\u5ea6\uff09\u5206\u5e03\u4e0d\u5747\u5300\u7684\u6839\u672c\u539f\u56e0\u3002\u901a\u8fc7\u6539\u5584\u9635\u5217\u7ed3\u6784\u7684\u95f4\u8ddd\uff08\u6216\u51cf\u5c0f\u56fe\u6848\u9762\u79ef\uff09\uff0c\u6574\u4f53\u539a\u5ea6\u5747\u5300\u6027\u53ef\u4ee5\u5f97\u5230\u6539\u5584\uff0c\u4f46\u5355\u4e2a\u7ed3\u6784\u7684\u539a\u5ea6\u5747\u5300\u6027\u5219\u4f1a\u964d\u4f4e\u3002<\/p>\n<p>(2) 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