{"id":265113,"date":"2025-02-21T07:29:29","date_gmt":"2025-02-20T23:29:29","guid":{"rendered":"http:\/\/www.cailiaoniu.com\/?p=265113"},"modified":"2025-02-20T20:31:23","modified_gmt":"2025-02-20T12:31:23","slug":"%e5%8d%97%e4%ba%ac%e5%a4%a7%e5%ad%a6%e4%bd%99%e6%9e%97%e8%94%9a%e6%95%99%e6%8e%88%e5%9b%a2%e9%98%9f%e6%96%b0%e7%aa%81%e7%a0%b4%ef%bc%9a%e5%9f%ba%e4%ba%8e%e5%8f%af%e7%94%9f%e9%95%bf%e9%9b%86%e6%88%90","status":"publish","type":"post","link":"http:\/\/www.cailiaoniu.com\/?p=265113","title":{"rendered":"\u5357\u4eac\u5927\u5b66\u4f59\u6797\u851a\u6559\u6388\u56e2\u961f\u65b0\u7a81\u7834\uff1a\u57fa\u4e8e\u53ef\u751f\u957f\u96c6\u6210\u7eb3\u7c73\u7ebf\u6c9f\u9053\u7684\u9ad8\u6027\u80fdGAA-FET\u5668\u4ef6\u95ee\u4e16"},"content":{"rendered":"

\u00a0<\/b><\/strong><\/p>\n

\u968f\u7740\u534a\u5bfc\u4f53\u6280\u672f\u7684\u4e0d\u65ad\u53d1\u5c55\uff0c\u82af\u7247\u5236\u9020\u5de5\u827a\u9010\u6e10\u903c\u8fd1\u7269\u7406\u6781\u9650\u3002\u4e3a\u4e86\u6ee1\u8db3\u672a\u6765\u9ad8\u6027\u80fd\u8ba1\u7b97\u548c3D\u96c6\u6210\u7684\u9700\u6c42\uff0c\u79d1\u5b66\u5bb6\u4eec\u6b63\u5728\u79ef\u6781\u63a2\u7d22\u65b0\u578b\u6676\u4f53\u7ba1\u67b6\u6784\u3002\u8fd1\u65e5\uff0c\u5357\u4eac\u5927\u5b66\u4f59\u6797\u851a\u6559\u6388\u56e2\u961f\u5728\u300aNano-Micro Letters\u300b\u4e0a\u53d1\u8868\u4e86\u4e00\u7bc7\u91cd\u8981\u8bba\u6587\uff0c\u62a5\u9053\u4e86\u4ed6\u4eec\u5728\u9ad8\u6027\u80fd\u73af\u7ed5\u6805\u6781\u573a\u6548\u5e94\u6676\u4f53\u7ba1\uff08Gate-All-Around Field-Effect Transistors, GAA-FETs\uff09\u9886\u57df\u7684\u7a81\u7834\u6027\u8fdb\u5c55\u3002\u8fd9\u9879\u7814\u7a76\u9996\u6b21\u5b9e\u73b0\u4e86\u57fa\u4e8e\u50ac\u5316\u751f\u957f\u7845\u7eb3\u7c73\u7ebf\uff08SiNW\uff09\u6c9f\u9053\u7684\u9ad8\u6027\u80fdGAA-FET\u5668\u4ef6\uff0c\u4e3a\u4e0b\u4e00\u4ee3\u534a\u5bfc\u4f53\u6280\u672f\u5f00\u8f9f\u4e86\u5168\u65b0\u8def\u5f84\u3002<\/p>\n

\u521b\u65b0\u6280\u672f\uff1a\u50ac\u5316\u751f\u957f\u7845\u7eb3\u7c73\u7ebf\u4e0eGAA\u67b6\u6784\u7684\u5b8c\u7f8e\u7ed3\u5408<\/b><\/strong><\/p>\n

\u4f20\u7edf\u7684GAA-FET\u901a\u5e38\u4f9d\u8d56\u4e8e\u6602\u8d35\u4e14\u590d\u6742\u7684EUV\uff08\u6781\u7d2b\u5916\u5149\u523b\uff09\u6216EBL\uff08\u7535\u5b50\u675f\u5149\u523b\uff09\u6280\u672f\u6765\u5b9a\u4e49\u8d85\u7ec6\u7845\u901a\u9053\u3002\u7136\u800c\uff0c\u8fd9\u4e9b\u65b9\u6cd5\u4e0d\u4ec5\u6210\u672c\u9ad8\u6602\uff0c\u8fd8\u5bf9\u5236\u9020\u5de5\u827a\u63d0\u51fa\u4e86\u6781\u9ad8\u7684\u8981\u6c42\u3002\u76f8\u6bd4\u4e4b\u4e0b\uff0c\u50ac\u5316\u751f\u957f\u7845\u7eb3\u7c73\u7ebf\u6280\u672f\u4ee5\u5176\u4f4e\u6e29\u5ea6\u3001\u9ad8\u4ea7\u91cf\u548c\u6613\u4e8e\u96c6\u6210\u7684\u7279\u70b9\uff0c\u6210\u4e3a\u4e00\u79cd\u6781\u5177\u6f5c\u529b\u7684\u66ff\u4ee3\u65b9\u6848\u3002<\/p>\n

 <\/p>\n

\u5728\u8fd9\u9879\u7814\u7a76\u4e2d\uff0c\u5357\u4eac\u5927\u5b66\u56e2\u961f\u91c7\u7528\u4e86\u4e00\u79cd\u81ea\u4e3b\u521b\u65b0\u7684\u201c\u5e73\u9762\u56fa\u6db2\u56fa\u201d\uff08In-Plane Solid-Liquid-Solid, IPSLS\uff09\u751f\u957f\u673a\u5236\uff0c\u5728\u7edd\u7f18\u886c\u5e95\u4e0a\u76f4\u63a5\u751f\u957f\u6709\u5e8f\u6392\u5217\u7684\u8d85\u7ec6\u7845\u7eb3\u7c73\u7ebf\u9635\u5217\u3002\u8fd9\u4e9b\u7eb3\u7c73\u7ebf\u5177\u6709\u76f4\u5f84\u5747\u5300\uff08DNW<\/sub>\u00a0= 22.4 \u00b1\u00a02.4 nm\uff09\u548c\u7d27\u5bc6\u95f4\u8ddd\uff0890 nm\uff09\u7684\u7279\u70b9\uff0c\u975e\u5e38\u9002\u5408\u7528\u4e8e\u6784\u5efa\u9ad8\u6027\u80fdGAA-FET\u5668\u4ef6\u3002<\/p>\n

 <\/p>\n

\u7814\u7a76\u4eba\u5458\u5f00\u53d1\u4e86\u4e00\u79cd\u7279\u6b8a\u7684\u60ac\u7a7a\u63a5\u89e6\u7b56\u7565\uff0c\u6210\u529f\u56fa\u5b9a\u5e76\u91ca\u653e\u4e86\u8fd9\u4e9b\u8d85\u7ec6\u7845\u7eb3\u7c73\u7ebf\u4f5c\u4e3a\u51c6\u4e00\u7ef4\u6c9f\u9053\u6750\u6599\u3002\u901a\u8fc7\u4f18\u5316\u6e90\/\u6f0f\u91d1\u5c5e\u63a5\u89e6\u5de5\u827a\uff0c\u4ed6\u4eec\u6700\u7ec8\u5236\u5907\u51fa\u9ad8\u6027\u80fdGAA-FET\u5668\u4ef6\uff0c\u5176\u5f00\u5173\u6bd4\uff08Ion<\/sub>\/Ioff<\/sub>\uff09\u8fbe\u5230\u4e8610\u2077\uff0c\u4e9a\u9608\u503c\u6446\u5e45\uff08SS\uff09\u4ec5\u4e3a66 mV\/dec\uff0c\u63a5\u8fd1\u7406\u8bba\u6781\u9650\u503c\uff0860 mV\/dec\uff09\u3002\u8fd9\u4e00\u6210\u679c\u6807\u5fd7\u7740\u50ac\u5316\u751f\u957f\u7845\u7eb3\u7c73\u7ebf\u9996\u6b21\u5728GAA-FET\u9886\u57df\u5c55\u73b0\u51fa\u4e0e\u5148\u8fdb\u81ea\u4e0a\u800c\u4e0b\u5236\u9020\u5de5\u827a\u76f8\u5f53\u7684\u6027\u80fd\u6c34\u5e73\u3002<\/p>\n

 <\/p>\n

\u6280\u672f\u4eae\u70b9\uff1a\u89e3\u51b3\u5173\u952e\u6311\u6218<\/b><\/strong><\/p>\n

\u6b64\u6b21\u7814\u7a76\u89e3\u51b3\u4e86\u50ac\u5316\u751f\u957f\u7845\u7eb3\u7c73\u7ebf\u5e94\u7528\u4e8eGAA-FET\u7684\u51e0\u4e2a\u6838\u5fc3\u96be\u9898\uff1a<\/p>\n

 <\/p>\n

    \n
  1. **\u7cbe\u786e\u63a7\u5236\u7eb3\u7c73\u7ebf\u5c3a\u5bf8\u4e0e\u4f4d\u7f6e** \u00a0<\/li>\n<\/ol>\n

    \u7814\u7a76\u56e2\u961f\u5229\u7528\u539f\u59cb\u521b\u65b0\u7684IPSLS\u7eb3\u7c73\u7ebf\u751f\u957f\u673a\u5236\uff0c\u901a\u8fc7\u8c03\u6574\u50ac\u5316\u5242\u539a\u5ea6\u548c\u6c89\u79ef\u6761\u4ef6\uff0c\u5b9e\u73b0\u4e86\u5bf9\u7845\u7eb3\u7c73\u7ebf\u76f4\u5f84\u7684\u9ad8\u5ea6\u53ef\u63a7\u6027\u3002\u8fd9\u79cd\u7cbe\u51c6\u63a7\u5236\u4f7f\u5f97\u7eb3\u7c73\u7ebf\u80fd\u591f\u9002\u5e94\u5236\u5907GAA-FET\u5668\u4ef6\u4e25\u683c\u7684\u5f62\u8c8c\u63a7\u5236\u9700\u6c42\u3002<\/p>\n

     <\/p>\n

      \n
    1. **\u53ef\u9760\u60ac\u7a7a\u91ca\u653e\u6280\u672f** \u00a0<\/li>\n<\/ol>\n

      \u56e2\u961f\u5f00\u53d1\u4e86\u4e00\u79cd\u6e29\u548c\u7684\u5316\u5b66\u8680\u523b\u65b9\u6cd5\uff0c\u6210\u529f\u5c06\u7845\u7eb3\u7c73\u7ebf\u4ece\u727a\u7272\u5c42\u4e0a\u91ca\u653e\u51fa\u6765\uff0c\u5f62\u6210\u7a33\u5b9a\u7684\u60ac\u7a7a\u7ed3\u6784\u3002\u8fd9\u79cd\u65b9\u6cd5\u907f\u514d\u4e86\u4f20\u7edf\u8d85\u4e34\u754c\u91ca\u653e\u6280\u672f\u7684\u590d\u6742\u6027\u548c\u6f5c\u5728\u635f\u4f24\u3002<\/p>\n

       <\/p>\n

        \n
      1. **\u4f18\u5316\u6e90\/\u6f0f\u63a5\u89e6** \u00a0<\/li>\n<\/ol>\n

        \u5728\u9009\u62e9\u5408\u9002\u7684\u6e90\/\u6f0f\u63a5\u89e6\u91d1\u5c5e\u65f6\uff0c\u7814\u7a76\u56e2\u961f\u53d1\u73b0\u94c2\uff08Pt\uff09\/\u91d1\uff08Au\uff09\u7535\u6781\u7ec4\u5408\u663e\u8457\u4f18\u4e8e\u949b\uff08Ti\uff09\/\u91d1\uff08Au\uff09\uff0c\u53ef\u5927\u5e45\u964d\u4f4e\u63a5\u89e6\u7535\u963b\u5e76\u63d0\u9ad8\u9a71\u52a8\u7535\u6d41\u3002\u5b9e\u9a8c\u8868\u660e\uff0cPt\/Au\u63a5\u89e6\u7684GAA-FET\u8868\u73b0\u51fa\u63a5\u8fd1\u6b27\u59c6\u63a5\u89e6\u7684\u884c\u4e3a\uff0c\u4ece\u800c\u63d0\u5347\u4e86\u6574\u4f53\u5668\u4ef6\u6027\u80fd\u3002<\/p>\n

         <\/p>\n

        \u5e94\u7528\u524d\u666f\uff1a\u63a8\u52a83D\u96c6\u6210\u4e0e\u9ad8\u6027\u80fd\u8ba1\u7b97<\/b><\/strong><\/p>\n

        \u50ac\u5316\u751f\u957f\u7845\u7eb3\u7c73\u7ebfGAA-FET\u7684\u6210\u529f\u5b9e\u73b0\uff0c\u4e0d\u4ec5\u586b\u8865\u4e86\u9ad8\u6027\u80fdFET\u9886\u57df\u7684\u6280\u672f\u7a7a\u767d\uff0c\u4e5f\u4e3a\u672a\u6765\u7684\u5355\u72473D\u96c6\u6210\u7535\u5b50\u5b66\u63d0\u4f9b\u4e86\u5f3a\u6709\u529b\u7684\u652f\u6301\u3002\u7531\u4e8e\u8be5\u6280\u672f\u65e0\u9700\u4f9d\u8d56\u9884\u5148\u5b58\u5728\u7684\u5355\u6676\u7845\u6676\u5706\uff0c\u4e14\u53ef\u5728\u4f4e\u6e29\u6761\u4ef6\u4e0b\u5b8c\u6210\uff0c\u56e0\u6b64\u7279\u522b\u9002\u5408\u4e8e\u5806\u53e0\u5f0f3D\u96c6\u6210\u7535\u8def\u7684\u8bbe\u8ba1\u4e0e\u5236\u9020\u3002\u6b64\u5916\uff0c\u5176\u4f18\u5f02\u7684\u7535\u5b66\u6027\u80fd\u4f7f\u5176\u6210\u4e3a\u6784\u5efa\u9ad8\u6548\u80fd\u8ba1\u7b97\u7cfb\u7edf\u7684\u5173\u952e\u7ec4\u4ef6\u4e4b\u4e00\u3002<\/p>\n

         <\/p>\n

        \u8fd9\u9879\u6280\u672f\u7684\u4f18\u52bf\u5728\u4e8e\uff0c\u5b83\u80fd\u591f\u5728\u964d\u4f4e\u6210\u672c\u7684\u540c\u65f6\u4fdd\u6301\u9ad8\u6027\u80fd\uff0c\u8fd9\u5bf9\u4e8e\u5927\u89c4\u6a21\u91cf\u4ea7\u81f3\u5173\u91cd\u8981\u3002\u76f8\u6bd4\u4f20\u7edf\u5de5\u827a\uff0c\u50ac\u5316\u751f\u957f\u7845\u7eb3\u7c73\u7ebfGAA-FET\u5177\u6709\u66f4\u9ad8\u7684\u7075\u6d3b\u6027\u548c\u517c\u5bb9\u6027\uff0c\u80fd\u591f\u66f4\u597d\u5730\u878d\u5165\u73b0\u6709\u5236\u9020\u6d41\u7a0b\u3002<\/p>\n

         <\/p>\n

        \u603b\u7ed3<\/b><\/strong><\/p>\n

        \u5357\u4eac\u5927\u5b66\u56e2\u961f\u7684\u8fd9\u4e00\u7814\u7a76\u6210\u679c\u5c55\u793a\u4e86\u50ac\u5316\u751f\u957f\u7845\u7eb3\u7c73\u7ebf\u5728\u9ad8\u6027\u80fdGAA-FET\u9886\u57df\u7684\u5de8\u5927\u6f5c\u529b\uff0c\u4e3a\u4e0b\u4e00\u4ee3\u534a\u5bfc\u4f53\u6280\u672f\u7684\u53d1\u5c55\u5960\u5b9a\u4e86\u575a\u5b9e\u57fa\u7840\u3002\u6b63\u5982\u8bba\u6587\u4f5c\u8005\u6240\u8a00\uff1a\u201c\u6211\u4eec\u7684\u5de5\u4f5c\u8bc1\u660e\uff0c\u5373\u4f7f\u4e0d\u4f9d\u8d56\u5c16\u7aef\u7684EUV\u6216EBL\u5149\u523b\u6280\u672f\uff0c\u50ac\u5316\u751f\u957f\u7845\u7eb3\u7c73\u7ebf\u4e5f\u80fd\u5b9e\u73b0\u4e0e\u4e4b\u5ab2\u7f8e\u7684\u9ad8\u6027\u80fdGAA-FET\u3002\u201d<\/p>\n

        \u00a0\"\"\u00a0 <\/b><\/strong><\/p>\n

        \u56fe1 \u7845\u7eb3\u7c73\u7ebfGAA-FET\u5236\u5907\u6d41\u7a0b\u56fe\u53ca\u60ac\u7a7a\u7eb3\u7c73\u7ebfSEM\u56fe\u7247\u3002<\/p>\n

        \"\"\u00a0<\/b><\/strong><\/p>\n

        \u56fe2 GAA-FET\u7ed3\u6784\u8868\u5f81\u3002<\/p>\n

        \"\"<\/b><\/strong><\/p>\n

        \u56fe3 GAA-FET\u7535\u5b66\u6027\u80fd\u3002<\/p>\n

        \u8be5\u5de5\u4f5c\u8fd1\u671f\u4ee5\u201cHigh-performance gate-all-around field effect transistors based on orderly arrays of catalytic Si nanowire channels\u201d\u4e3a\u9898\u53d1\u8868\u5728Nano-Micro Letters<\/b><\/strong>\u300a\u7eb3\u5fae\u5feb\u62a5\u300b\u671f\u520a\u4e0a\u3002\u6587\u7ae0\u901a\u8baf\u4f5c\u8005\u4e3a\u5357\u4eac\u5927\u5b66\u7535\u5b50\u79d1\u5b66\u4e0e\u5de5\u7a0b\u5b66\u9662\u4f59\u6797\u851a\u6559\u6388\uff0c\u7b2c\u4e00\u4f5c\u8005\u4e3a\u535a\u58eb\u751f\u5ed6\u5dcd\u3002\u8be5\u5de5\u4f5c\u7684\u5f00\u5c55\u5f97\u5230\u4e86\u5357\u4eac\u5927\u5b66\u9648\u5764\u57fa\u6559\u6388\u3001\u5f90\u9a8f\u6559\u6388\u3001\u65bd\u6bc5\u6559\u6388\u3001\u738b\u519b\u8f6c\u6559\u6388\u7684\u652f\u6301\u548c\u6307\u5bfc\uff0c\u53d7\u5230\u56fd\u5bb6\u91cd\u70b9\u7814\u53d1\u8ba1\u5212\u3001\u56fd\u5bb6\u81ea\u7136\u79d1\u5b66\u57fa\u91d1\u6770\u51fa\u9752\u5e74\u5b66\u8005\u9879\u76ee\u4ee5\u53ca\u56fd\u5bb6\u81ea\u7136\u79d1\u5b66\u57fa\u91d1\u91cd\u70b9\u9879\u76ee\u7684\u8d44\u52a9\u3002<\/p>\n

         <\/p>\n

        \u8bba\u6587\u94fe\u63a5\uff1ahttps:\/\/link.springer.com\/article\/10.1007\/s40820-025-01674-8.<\/p>\n

         <\/p>\n

        \u8bfe\u9898\u7ec4\u8fd1\u671f\u76f8\u5173\u5de5\u4f5c\uff1a<\/p>\n

          \n
        1. Step-necking growth of silicon nanowire channels for high performance field effect transistors, Lei Wu, Zhiyan Hu, Lei Liang, Ruijin Hu\u204e<\/sup>, Junzhuan Wang\u204e<\/sup>,\u00a0Linwei Yu\u204e<\/sup>, Nature Communications<\/i><\/b><\/em><\/strong>, 2025, 16(1): 965.<\/li>\n
        2. Channel-bias-controlled reconfigurable silicon nanowire transistors via an asymmetric electrode contact strategy. Wentao Qian, Junzhuan Wang\u204e<\/sup>, Jun Xu, Linwei Yu\u204e<\/sup>.\u00a0Chip<\/i><\/b><\/em><\/strong>. 2024, 3(3), 100098.<\/li>\n
        3. 3. Lorentz Force-Actuated Bidirectional Nanoelectromechanical Switch with an Ultralow Operation Voltage, Dianlun Li, Jiang Yan, Ying Zhang, Junzhuan Wang\u204e<\/sup>, Linwei Yu\u204e<\/sup>, Nano Letters<\/i><\/b><\/em><\/strong>,2024, 24(37): 11403-11410.<\/li>\n
        4. 4. Ultracompact single-nanowire-morphed grippers driven by vectorial Lorentz forces for dexterous robotic manipulations, Jiang Yan, Ying Zhang, Zongguang Liu\u204e<\/sup>, Junzhuan Wang, Jun Xu and Linwei Yu\u204e<\/sup>,\u00a0Nature Communications<\/i><\/b><\/em><\/strong><\/b>14, 3786 (2023).<\/li>\n
        5. 5. Unprecedented Uniform 3D Growth Integration of 10-Layer Stacked Si Nanowires on Tightly Confined Sidewall Grooves. Ruijin Hu, Shun Xu, Junzhuan Wang\u204e<\/sup>, Yi Shi, Jun Xu, Kunji Chen, and Linwei Yu\u204e<\/sup>, Nano Letters<\/i><\/b><\/em><\/strong>, 2020, 20 (10), 7489-7497.<\/li>\n<\/ol>\n

           <\/p>\n

          \u8bfe\u9898\u7ec4\u7b80\u4ecb<\/b><\/strong>\uff1ahttps:\/\/ese.nju.edu.cn\/ylw<\/i><\/em><\/p>\n

           <\/p>\n","protected":false},"excerpt":{"rendered":"

          \u00a0 \u968f\u7740\u534a\u5bfc\u4f53\u6280\u672f\u7684\u4e0d\u65ad\u53d1\u5c55\uff0c\u82af\u7247\u5236\u9020\u5de5\u827a\u9010\u6e10\u903c\u8fd1\u7269\u7406\u6781\u9650\u3002\u4e3a\u4e86\u6ee1\u8db3\u672a\u6765\u9ad8\u6027\u80fd\u8ba1\u7b97\u548c3D\u96c6\u6210\u7684\u9700\u6c42\uff0c\u79d1\u5b66\u5bb6\u4eec\u6b63\u5728\u79ef\u6781\u63a2\u7d22\u65b0\u578b\u6676\u4f53\u7ba1\u67b6\u6784\u3002\u8fd1\u65e5\uff0c\u5357\u4eac\u5927\u5b66\u4f59\u6797\u851a\u6559\u6388…<\/p>\n","protected":false},"author":14360,"featured_media":0,"comment_status":"open","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[2],"tags":[],"class_list":["post-265113","post","type-post","status-publish","format-standard","hentry","category-keji"],"_links":{"self":[{"href":"http:\/\/www.cailiaoniu.com\/index.php?rest_route=\/wp\/v2\/posts\/265113"}],"collection":[{"href":"http:\/\/www.cailiaoniu.com\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"http:\/\/www.cailiaoniu.com\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"http:\/\/www.cailiaoniu.com\/index.php?rest_route=\/wp\/v2\/users\/14360"}],"replies":[{"embeddable":true,"href":"http:\/\/www.cailiaoniu.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=265113"}],"version-history":[{"count":1,"href":"http:\/\/www.cailiaoniu.com\/index.php?rest_route=\/wp\/v2\/posts\/265113\/revisions"}],"predecessor-version":[{"id":265117,"href":"http:\/\/www.cailiaoniu.com\/index.php?rest_route=\/wp\/v2\/posts\/265113\/revisions\/265117"}],"wp:attachment":[{"href":"http:\/\/www.cailiaoniu.com\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=265113"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"http:\/\/www.cailiaoniu.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=265113"},{"taxonomy":"post_tag","embeddable":true,"href":"http:\/\/www.cailiaoniu.com\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=265113"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}