{"id":63064,"date":"2017-01-29T14:00:48","date_gmt":"2017-01-29T06:00:48","guid":{"rendered":"http:\/\/www.cailiaoniu.com\/?p=63064"},"modified":"2017-01-28T22:56:20","modified_gmt":"2017-01-28T14:56:20","slug":"nano-lett-%e4%ba%9a10%e7%ba%b3%e7%b1%b3%e8%b6%85%e7%9f%ad%e6%b2%9f%e9%81%93%e7%9a%84%e4%ba%8c%e7%bb%b4%e6%9d%90%e6%96%99%e5%9c%ba%e6%95%88%e5%ba%94%e7%ae%a1","status":"publish","type":"post","link":"http:\/\/www.cailiaoniu.com\/?p=63064","title":{"rendered":"Nano Lett.: \u4e9a10\u7eb3\u7c73\u8d85\u77ed\u6c9f\u9053\u7684\u4e8c\u7ef4\u6750\u6599\u573a\u6548\u5e94\u7ba1"},"content":{"rendered":"

\u3010\u5f15\u8a00\u3011<\/strong><\/p>\n

\u968f\u7740\u6676\u4f53\u7ba1\u5c3a\u5bf8\u7684\u7f29\u5c0f\uff0c\u7845\u57fa\u6750\u6599\u9010\u6e10\u63a5\u8fd1\u5b83\u7684\u7269\u7406\u6781\u9650\uff0c\u56e0\u6b64\u5bfb\u627e\u65b0\u6750\u6599\u6210\u4e3a\u76ee\u524d\u7684\u8feb\u5207\u9700\u6c42\u3002\u968f\u7740\u6c9f\u9053\u5bbd\u5ea6\u4e0b\u964d\uff0c\u4f1a\u5bfc\u81f4\u201c\u77ed\u6c9f\u9053\u6548\u5e94\u201d \uff08\u5f53\u6c9f\u9053\u7f29\u77ed\u5230\u4e00\u5b9a\u7a0b\ufa01\u65f6\uff0c\u9608\u503c\u7535\u538b\u53d8\u4f4e\u7b49\u7b49\uff0c\u4e3a\u4e86\u907f\u514d\u8fd9\u4e00\u60c5\u51b5\uff0c\u4e00\u822c\u9700\u8981\u6c9f\u9053\u5bbd\u5ea6\u4e3a\u6c9f\u9053\u539a\u5ea6\u76843\u500d\u4ee5\u4e0a\uff09\u3002\u4e8c\u7ef4\u6750\u6599\u7531\u4e8e\u5929\u7136\u7684\u8d85\u8584\u539a\u5ea6\uff0c\u53ef\u4ee5\u6709\u6548\u907f\u514d\u77ed\u6c9f\u9053\u6548\u5e94\uff0c\u56e0\u6b64\u91c7\u7528\u4e8c\u7ef4\u6750\u6599\u4f5c\u4e3a\u6c9f\u9053\u6750\u6599\u7684\u573a\u6548\u5e94\u6676\u4f53\u7ba1\u7406\u8bba\u4e0a\u53ef\u4ee5\u83b7\u5f97\u6781\u4f4e\u7684\u5668\u4ef6\u5c3a\u5bf8\u3002\u8fd1\u65e5\uff0cScience\u62a5\u9053\u4e86\u91c7\u7528\u76f4\u5f84\u4e3a1nm\u7684\u78b3\u7eb3\u7c73\u7ba1\u4f5c\u4e3a\u6805\u7535\u6781\u7684\u7684\u4e8c\u7ef4MoS2<\/sub>\u573a\u6548\u5e94\u7ba1\u3002\u9057\u61be\u7684\u662f\uff0c\u8be5\u5668\u4ef6\u7684\u6c9f\u9053\u5bbd\u5ea6\u4ecd\u7136\u6709\u6570\u767e\u7eb3\u7c73\uff0c\u56e0\u800c\u5e76\u4e0d\u662f\u771f\u6b63\u610f\u4e49\u4e0a\u76841nm\u5c3a\u5bf8\u7684\u573a\u6548\u5e94\u7ba1\u3002\u5e76\u4e14\u8be5\u65b9\u6cd5\u4e5f\u4e0d\u5229\u4e8e\u5927\u89c4\u6a21\u7684\u5668\u4ef6\u96c6\u6210\u5236\u5907\u3002\u56e0\u6b64\uff0c\u8d85\u77ed\u6c9f\u9053\u573a\u6548\u5e94\u7ba1\u548c\u5b83\u7684\u89c4\u6a21\u96c6\u6210\u4ecd\u7136\u662f\u4e00\u4e2a\u60ac\u800c\u672a\u51b3\u7684\u95ee\u9898\u3002<\/p>\n

\u3010\u6210\u679c\u7b80\u4ecb\u3011<\/strong><\/p>\n

\u8fd1\u65e5\uff0c\u6765\u81ea\u6210\u90fd\u7535\u5b50\u79d1\u6280\u5927\u5b66\u7684\u718a\u6770\u6559\u6388\uff08\u901a\u8baf\u4f5c\u8005\uff09\u3001\u56fd\u5bb6\u7eb3\u7c73\u4e2d\u5fc3\u7684\u5218\u524d\u6559\u6388\uff08\u901a\u8baf\u4f5c\u8005\uff09\u548c\u4f55\u519b\u6559\u6388\uff08\u901a\u8baf\u4f5c\u8005\uff09<\/strong>\u7b49\u4eba\u62a5\u9053\u4e86\u4e00\u79cd\u65b0\u9896\u3001\u901a\u7528\u7684\u65b9\u6cd5\u6765\u5236\u5907\u9ad8\u8d28\u91cf\u7684\u4e9a10 \u7eb3\u7c73\u6c9f\u9053\u3002\u5176\u4e2d\u5173\u952e\u662f\u5148\u5728\u7845\u886c\u5e95\u4e0a\u6c89\u79ef\u4e00\u5c42Bi2<\/sub>O3<\/sub>\u7f13\u51b2\u5c42\uff0c\u7136\u540e\u5229\u7528\u7a00\u785d\u9178\u5bf9Bi2<\/sub>O3<\/sub>\u8584\u819c\u89e3\u7406\u9762\u7684\u4f18\u5148\u8150\u8680\u83b7\u5f97\u7eb3\u7c73\u7ea7\u5bbd\u5ea6\u7684\u95f4\u9699\u3002\u91c7\u7528\u8fd9\u4e00\u65b9\u6cd5\uff0c\u4ed6\u4eec\u6700\u7ec8\u83b7\u5f97\u4e86\u8d85\u77ed\u6c9f\u9053\uff088.2 nm\uff09\u7684MoS2<\/sub>\u573a\u6548\u5e94\u7ba1\u3002\u8be5\u573a\u6548\u5e94\u7ba1\u7684\u5f00\u5173\u6bd4\u8fbe\u5230\u4e86106<\/sup>\uff0c\u4e9a\u4e34\u754c\u6446\u5e45\uff08Subthreshold Swing\uff09\u4e3a140 mV\/dec, \u5e76\u4e14\u6ca1\u6709\u53d1\u73b0\u660e\u663e\u7684\u77ed\u6c9f\u9053\u6548\u5e94\u3002\u5728\u6b64\u57fa\u7840\u4e0a\uff0c\u7814\u7a76\u4eba\u5458\u96c6\u6210\u4e86\u4e24\u4e2a\u8d85\u77ed\u6c9f\u9053\uff0c\u5236\u5907\u51fa\u5177\u6709\u9ad8\u7535\u538b\u589e\u76ca\u7684\u6570\u5b57\u9006\u53d8\u5668\u3002\u8fd9\u9879\u5de5\u4f5c\u7ed9\u51fa\u4e86\u4e00\u79cd\u5236\u9020\u8d85\u77ed\u6c9f\u9053\u7684\u65b0\u65b9\u6cd5\uff0c\u4e3a\u5236\u5907\u5177\u6709\u8d85\u77ed\u6c9f\u9053\u7684\u4e8c\u7ef4\u6750\u6599\u573a\u6548\u5e94\u7ba1\u53ca\u76f8\u5173\u96c6\u6210\u7535\u8def\u6253\u4e0b\u4e86\u57fa\u7840\uff0c\u540c\u65f6\u4e5f\u4e3a\u672a\u6765\u8bbe\u8ba1\u5927\u9762\u79ef\u96c6\u6210\u5668\u4ef6\u63d0\u4f9b\u4e86\u4e00\u79cd\u65b0\u601d\u8def\u3002<\/p>\n

\u3010\u56fe\u6587\u5bfc\u8bfb\u3011<\/strong><\/p>\n

\u56fe<\/strong>1 <\/strong>\u4e00\u79cd\u5236\u5907\u7ad6\u76f4\u3001\u5e73\u884c\u3001\u5177\u6709\u51c6\u5468\u671f\u6027\u7684\u4e9a<\/strong>10<\/strong>\u7eb3\u7c73\u95f4\u9699\u7684\u65b9\u6cd5<\/strong><\/p>\n

<\/p>\n

(a)\u00a0<\/strong>\u5236\u5907\u4e9a10\u7eb3\u7c73\u95f4\u9699\u7684\u6d41\u7a0b\u793a\u610f\u56fe\u3002<\/p>\n

(b) \u5e73\u884c\u4e14\u5177\u6709\u51c6\u5468\u671f\u6027\u7684\u7eb3\u7c73\u95f4\u9699\u7684SEM\u56fe\u3002<\/p>\n

(c) \u7eb3\u7c73\u95f4\u9699\u7684\u622a\u9762TEM\u56fe\u3002<\/p>\n

(d) \u9009\u533a\u7535\u5b50\u884d\u5c04\u8bf4\u660e\u89e3\u7406\u9762\u4e3a{110}\u9762\u3002<\/p>\n

(e) \u7eb3\u7c73\u95f4\u9699\u7684\u5bbd\u5ea6\uff0c\u5982\u56fe\u4e2d\u6240\u793a\u8303\u56f4\u4ece10 \u7eb3\u7c73\u81f3140 \u7eb3\u7c73\uff0c\u53ef\u4ee5\u901a\u8fc7\u8c03\u6574HNO3<\/sub>\u7684\u8150\u8680\u65f6\u95f4\u6765\u63a7\u5236\u3002<\/p>\n

\u56fe<\/strong>2 <\/strong>\u8d85\u77ed\u6c9f\u9053\u573a\u6548\u5e94\u7ba1\u7684\u5236\u5907\u6d41\u7a0b\u53ca\u5176\u7ed3\u6784\u8868\u5f81<\/strong><\/p>\n

<\/p>\n

(a)-(f) \u5236\u5907\u4e9a10 \u7eb3\u7c73\u7684MoS2<\/sub>\u573a\u6548\u5e94\u7ba1\u7684\u6d41\u7a0b\u793a\u610f\u56fe\u3002<\/p>\n

(g)-(i) \u4e9a10\u7eb3\u7c73\u8d85\u77ed\u6c9f\u9053\u7684SEM\u56fe\u3002\u767d\u8272\u6807\u5c3a\u4e3a10\u7eb3\u7c73\u3002<\/p>\n

(j) MoS2<\/sub>\u91c7\u7528\u4f20\u7edfCVD\u65b9\u6cd5\u5236\u5907\uff0c\u4ee5MoO3<\/sub>\u548c\u786b\u7c89\u4e3a\u524d\u9a71\u4f53\u3002MoS2<\/sub>\u7684\u7eb3\u7c73\u7247\u5c3a\u5bf8\u7ea6\u4e3a20 \u00b5m\u3002<\/p>\n

(k) \u5355\u5c42MoS2<\/sub>\u548cMoS2<\/sub>\/HfO2<\/sub>\u590d\u5408\u7ed3\u6784\u7684\u62c9\u66fc\u5149\u8c31\u5bf9\u6bd4\u3002\u53ef\u4ee5\u53d1\u73b0\u5cf0\u4f4d\u6ca1\u6709\u660e\u663e\u53d8\u5316\uff0c\u8868\u660eHfO2<\/sub>\u8986\u76d6MoS2<\/sub>\u540e\u5e76\u6ca1\u6709\u635f\u574fMoS2<\/sub>\u7684\u7ed3\u6784\u3002<\/p>\n

\u56fe<\/strong>3 <\/strong>\u8d85\u77ed\u6c9f\u9053<\/strong>MoS2<\/sub><\/strong>\u573a\u6548\u5e94\u7ba1<\/strong><\/p>\n

<\/p>\n

(a)(b) \u5206\u522b\u4e3a\u5728\u6c89\u79ef\u6805\u7535\u6781\u4e4b\u524d\uff0cMoS2<\/sub>\u573a\u6548\u5e94\u7ba1\u5149\u5b66\u7167\u7247\u548c SEM\u7167\u7247\u3002\u4eceSEM\u4e2d\u53ef\u4ee5\u770b\u51fa\u6c9f\u9053\u7684\u5bbd\u5ea6\u4e3a2 nm\u3002<\/p>\n

(c)(d) \u5206\u522b\u4e3a\u6c9f\u9053\u7535\u6d41\u968f\u6805\u6781\u7535\u538b\u548c\u6f0f\u6781\u7535\u538b\u7684\u53d8\u5316\u60c5\u51b5\u3002\u4ece\u4e2d\u53ef\u4ee5\u53d1\u73b0\u8be5\u5668\u4ef6\u6ca1\u6709\u660e\u663e\u7684\u77ed\u6c9f\u9053\u6548\u5e94\u3002<\/p>\n

(e) \u4e3a\u4e86\u83b7\u5f97\u66f4\u597d\u7684\u5f00\u5173\u6027\u80fd\uff0c\u7814\u7a76\u4eba\u5458\u4e5f\u5236\u5907\u4e86\u591a\u5c42MoS2<\/sub>\u573a\u6548\u5e94\u7ba1\uff0c\u6c9f\u9053\u5bbd\u5ea6\u4e3a9.6 nm\uff0c\u56fe\u4e2d\u663e\u793a\u4e86\u6c9f\u9053\u7535\u6d41\u968f\u6805\u6781\u7535\u538b\u7684\u53d8\u5316\u66f2\u7ebf\u3002<\/p>\n

(f) \u56fe\u4e2d\u6bd4\u8f83\u4e86\u4e24\u79cd\u573a\u6548\u5e94\u7ba1\u7684\u5f00\u5173\u6bd4\u4ee5\u53ca\u4e9a\u4e34\u754c\u6446\u5e45\u3002\u5176\u4e2d\uff0c9.6 nm\u6c9f\u9053\u5bbd\u7684\u573a\u6548\u5e94\u7ba1\u5177\u6709\u66f4\u9ad8\u7684\u5f00\u5173\u6bd4\uff0c\u800c8.2 nm\u6c9f\u9053\u5bbd\u7684\u573a\u6548\u5e94\u7ba1\u7531\u4e8e\u91c7\u7528\u4e86\u5355\u5c42MoS2<\/sub>\uff0c\u00a0 \u56e0\u6b64\u5177\u6709\u66f4\u4f4e\u7684\u4e9a\u4e34\u754c\u6446\u5e45\u3002<\/p>\n

\u56fe<\/strong>4 <\/strong>\u96c6\u6210\u5316\u6570\u5b57\u9006\u53d8\u5668<\/strong><\/p>\n

<\/p>\n

(a)(b) \u5206\u522b\u4e3a\u7531\u4e24\u4e2a\u8d85\u77ed\u6c9f\u9053\u6784\u6210\u7684\u6570\u5b57\u9006\u53d8\u5668\u7684\u7ed3\u6784\u793a\u610f\u56fe\u548c\u5149\u5b66\u663e\u5fae\u7167\u7247\u3002<\/p>\n

(c)(d) \u4e24\u4e2a\u8d85\u77ed\u6c9f\u9053\u7684\u7535\u6d41\u968f\u6805\u6781\u7535\u538b\u7684\u53d8\u5316\u60c5\u51b5\uff0c\u53ef\u4ee5\u770b\u5230\uff0c\u5b83\u4eec\u53ef\u4ee5\u901a\u8fc7\u5206\u522b\u63a7\u5236\u5404\u81ea\u7684\u6805\u7535\u538b\u72ec\u7acb\u5de5\u4f5c\u3002<\/p>\n

(e) \u5728\u4e0d\u540c\u5de5\u4f5c\u7535\u538b\u4e0b\uff0c\u8f93\u51fa\u7535\u538bVout<\/sub>\u968f\u8f93\u5165\u7535\u538bVin<\/sub>\u7684\u53d8\u5316\u66f2\u7ebf\u3002<\/p>\n

(f) \u7535\u538b\u589e\u76ca\u968f\u5de5\u4f5c\u7535\u538b\u548c\u8f93\u5165\u7535\u538b\u7684\u53d8\u5316\u60c5\u51b5\u3002\u7535\u538b\u589e\u76ca\u7684\u8ba1\u7b97\u516c\u5f0f\u4e3a\u2212dVout<\/sub>\/dVin<\/sub>\u3002\u53ef\u4ee5\u770b\u5230\u7535\u538b\u589e\u76ca\u6700\u9ad8\u503c\u8d85\u8fc72\uff0c\u8bf4\u660e\u8fd9\u4e00\u6570\u5b57\u9006\u53d8\u5668\u9002\u7528\u4e8e\u5927\u89c4\u6a21\u903b\u8f91\u5668\u4ef6\u9635\u5217\u96c6\u6210\u3002<\/p>\n

\u3010\u5c0f\u7ed3\u3011<\/strong><\/p>\n

\u8be5\u6587\u63d0\u51fa\u4e86\u4e00\u79cd\u65b0\u9896\u4e14\u901a\u7528\u7684\u6280\u672f\u6765\u5236\u5907\u5177\u6709\u8d85\u77ed\u6c9f\u9053\u7684\u573a\u6548\u5e94\u7ba1\u4ee5\u53ca\u76f8\u5173\u7684\u903b\u8f91\u5668\u4ef6\u3002\u6587\u7ae0\u62a5\u9053\u4e868.2 nm\u6c9f\u9053\u7684\u573a\u6548\u5e94\u7ba1\uff0c\u91c7\u75286 nm\u539a\u7684HfO2<\/sub>\u4f5c\u4e3a\u6805\u6781\u6750\u6599\uff0c\u5176\u5f00\u5173\u6bd4\u8fbe\u5230106<\/sup>\uff0c\u4e9a\u4e34\u754c\u6446\u5e45\u4e3a140 mV\/dec\u3002 \u5728\u6b64\u57fa\u7840\u4e0a\uff0c\u5236\u5907\u4e86\u7531\u4e24\u4e2a\u8d85\u77ed\u6c9f\u9053\u6784\u6210\u7684\u6570\u5b57\u9006\u53d8\u5668\u4e14\u5177\u6709\u8f83\u9ad8\u7684\u7535\u538b\u589e\u76ca\uff0c\u9002\u7528\u4e8e\u5927\u89c4\u6a21\u903b\u8f91\u5668\u4ef6\u9635\u5217\u96c6\u6210\u3002\u8fd9\u4e9b\u7ed3\u679c\u8868\u660e\uff0c\u8fd9\u9879\u6280\u672f\u53ef\u4ee5\u7528\u6765\u5236\u9020\u65b0\u578b\u7684\u4e8c\u7ef4\u7535\u5b50\u5668\u4ef6\uff0c\u540c\u65f6\u4e5f\u4e3a\u672a\u6765\u5927\u9762\u79ef\u5668\u4ef6\u96c6\u6210\u63d0\u4f9b\u4e86\u53ef\u80fd\u6027\u3002<\/p>\n

\u6587\u732e\u94fe\u63a5\uff1a<\/strong>Sub-10 nm Nanopattern Architecture for 2D Material Field-Effect Transistors<\/a> ( Nano Lett., 2017, DOI: 10.1021\/acs.nanolett.6b04576)<\/p>\n

\u672c\u6587\u7531\u6750\u6599\u4eba\u7535\u5b50\u7535\u5de5\u5b66\u672f\u7ec4Dream\u4f9b\u7a3f\uff0c\u6750\u6599\u725b\u6574\u7406\u7f16\u8f91\u3002<\/p>\n

\u6750\u6599\u725b\u7f51\u4e13\u6ce8\u4e8e\u8ddf\u8e2a\u6750\u6599\u9886\u57df\u79d1\u6280\u53ca\u884c\u4e1a\u8fdb\u5c55\uff0c\u5982\u679c\u60a8\u5bf9\u4e8e\u8ddf\u8e2a\u6750\u6599\u9886\u57df\u79d1\u6280\u8fdb\u5c55\uff0c\u89e3\u8bfb\u9ad8\u6c34\u5e73\u6587\u7ae0\u6216\u662f\u8bc4\u8ff0\u884c\u4e1a\u6709\u5174\u8da3\uff0c\u70b9\u6211\u52a0\u5165\u7f16\u8f91\u90e8<\/u><\/a>\u3002\u5982\u679c\u4f60\u5bf9\u7535\u5b50\u6750\u6599\u611f\u5174\u8da3\uff0c\u613f\u610f\u4e0e\u7535\u5b50\u7535\u5de5\u9886\u57df\u4eba\u624d\u4ea4\u6d41\uff0c\u8bf7\u52a0\u5165\u6750\u6599\u4eba\u7535\u5b50\u7535\u5de5\u6750\u6599\u5b66\u4e60\u5c0f\u7ec4\uff08QQ\u7fa4\uff1a482842474\uff09<\/p>\n

\u6750\u6599\u6d4b\u8bd5\uff0c\u6570\u636e\u5206\u6790\uff0c\u4e0a\u6d4b\u8bd5\u8c37<\/a>\uff01<\/strong><\/p>\n","protected":false},"excerpt":{"rendered":"

\u3010\u5f15\u8a00\u3011 \u968f\u7740\u6676\u4f53\u7ba1\u5c3a\u5bf8\u7684\u7f29\u5c0f\uff0c\u7845\u57fa\u6750\u6599\u9010\u6e10\u63a5\u8fd1\u5b83\u7684\u7269\u7406\u6781\u9650\uff0c\u56e0\u6b64\u5bfb\u627e\u65b0\u6750\u6599\u6210\u4e3a\u76ee\u524d\u7684\u8feb\u5207\u9700\u6c42\u3002\u968f\u7740\u6c9f\u9053\u5bbd\u5ea6\u4e0b\u964d\uff0c\u4f1a\u5bfc\u81f4\u201c\u77ed\u6c9f\u9053\u6548\u5e94\u201d \uff08\u5f53\u6c9f\u9053\u7f29\u77ed\u5230\u4e00\u5b9a\u7a0b\ufa01\u65f6…<\/p>\n","protected":false},"author":2727,"featured_media":63075,"comment_status":"open","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[215],"tags":[113,54,31,33],"class_list":["post-63064","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-jiedu","tag-semiconductor","tag-making","tag-dianzi","tag-nano"],"_links":{"self":[{"href":"http:\/\/www.cailiaoniu.com\/index.php?rest_route=\/wp\/v2\/posts\/63064"}],"collection":[{"href":"http:\/\/www.cailiaoniu.com\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"http:\/\/www.cailiaoniu.com\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"http:\/\/www.cailiaoniu.com\/index.php?rest_route=\/wp\/v2\/users\/2727"}],"replies":[{"embeddable":true,"href":"http:\/\/www.cailiaoniu.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=63064"}],"version-history":[{"count":3,"href":"http:\/\/www.cailiaoniu.com\/index.php?rest_route=\/wp\/v2\/posts\/63064\/revisions"}],"predecessor-version":[{"id":63393,"href":"http:\/\/www.cailiaoniu.com\/index.php?rest_route=\/wp\/v2\/posts\/63064\/revisions\/63393"}],"wp:featuredmedia":[{"embeddable":true,"href":"http:\/\/www.cailiaoniu.com\/index.php?rest_route=\/wp\/v2\/media\/63075"}],"wp:attachment":[{"href":"http:\/\/www.cailiaoniu.com\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=63064"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"http:\/\/www.cailiaoniu.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=63064"},{"taxonomy":"post_tag","embeddable":true,"href":"http:\/\/www.cailiaoniu.com\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=63064"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}