{"id":66486,"date":"2017-02-22T06:30:42","date_gmt":"2017-02-21T22:30:42","guid":{"rendered":"http:\/\/www.cailiaoniu.com\/?p=66486"},"modified":"2017-02-20T20:59:37","modified_gmt":"2017-02-20T12:59:37","slug":"%e5%ad%a6%e6%9c%af%e5%b9%b2%e8%b4%a7-%e4%b8%80%e6%96%87%e8%af%bb%e6%87%82%e7%a2%b3%e7%ba%b3%e7%b1%b3%e7%ae%a1%e4%ba%92%e8%bf%9e%e6%8a%80%e6%9c%af%e6%9c%80%e6%96%b0%e8%bf%9b%e5%b1%95","status":"publish","type":"post","link":"http:\/\/www.cailiaoniu.com\/?p=66486","title":{"rendered":"\u5b66\u672f\u5e72\u8d27 | \u4e00\u6587\u8bfb\u61c2\u78b3\u7eb3\u7c73\u7ba1\u4e92\u8fde\u6280\u672f\u6700\u65b0\u8fdb\u5c55"},"content":{"rendered":"

\u5f15\u8a00<\/strong><\/span><\/p>\n

\u78b3\u7eb3\u7c73\u7ba1\u51ed\u501f\u5176\u72ec\u7279\u7684\u4e00\u7ef4\u7eb3\u7c73\u7ed3\u6784\u800c\u5177\u6709\u4f18\u8d8a\u7684\u7535\u5b66\u3001\u70ed\u5b66\u53ca\u673a\u68b0\u7b49\u6027\u80fd\uff0c\u6709\u671b\u53d6\u4ee3\u94dc\u8fde\u7ebf\u800c\u6210\u4e3a\u4e0b\u4e00\u4ee3\u82af\u7247\u7684\u4e92\u8fde\u5bfc\u7ebf\u6750\u6599\uff0c\u800c\u78b3\u7eb3\u7c73\u7ba1\u7684\u4e92\u8fde\u6280\u672f\u5219\u662f\u7ed3\u6784\u5236\u9020\u3001\u529f\u80fd\u5668\u4ef6\u5236\u5907\u6216\u5176\u7ec4\u88c5\u4e0d\u53ef\u6216\u7f3a\u7684\u91cd\u8981\u73af\u8282\uff0c\u73b0\u5df2\u6210\u4e3a\u56fd\u9645\u65b0\u6750\u6599\u9886\u57df\u7684\u7814\u7a76\u524d\u6cbf\u548c\u70ed\u70b9\u3002<\/p>\n

1.\u00a0<\/strong>\u4e92\u8fde\u6280\u672f<\/strong><\/span><\/p>\n

\u4e92\u8fde\u6280\u672f\uff0c\u5c31\u662f\u5c06\u540c\u4e00\u82af\u7247\u5185\u5404\u4e2a\u72ec\u7acb\u7684\u5143\u5668\u4ef6\uff0c\u901a\u8fc7\u4e00\u5b9a\u7684\u65b9\u5f0f\u8fde\u63a5\u6210\u5177\u6709\u4e00\u5b9a\u529f\u80fd\u7684\u7535\u8def\u6a21\u5757\u7684\u6280\u672f\u3002\u4e3a\u4e86\u4fdd\u8bc1\u5b9e\u73b0\u7535\u8def\u6a21\u5757\u8fd0\u884c\u7684\u53ef\u9760\u6027\u53ca\u7a33\u5b9a\u6027\uff0c\u8fd9\u5bf9\u4e92\u8fde\u6750\u6599\u548c\u4e92\u8fde\u6280\u672f\u63d0\u51fa\u4e86\u4e00\u5b9a\u7684\u8981\u6c42\uff0c\u4f5c\u4e3a\u96c6\u6210\u7535\u8def\u7684\u4e92\u8fde\u5bfc\u7ebf\u6700\u521d\u6240\u91c7\u7528\u7684\u662f\u94dd\u4e92\u8fde\u7ebf\uff0cAl \u7684\u7535\u963b\u7387\u4ec5\u4e3a 2.7\u03bc\u03a9\u00b7cm\uff0c\u4e0e n+<\/sup>\u548c p+<\/sup>\u7845\u7684\u6b27\u59c6\u63a5\u89e6\u7535\u963b\u53ef\u4ee5\u964d\u81f3\u4e3a 10-6<\/sup> \u03a9\/cm2<\/sup>\uff0c\u5e76\u4e14\u4e0e\u7845\u548c\u78f7\u73bb\u7483\u6709\u5f88\u597d\u9644\u7740\u6027\uff0c\u6613\u4e8e\u6c89\u79ef\u4e0e\u523b\u8680\uff0c\u51ed\u501f\u8fd9\u4e9b\u4f18\u70b9\uff0cAl\u6210\u4e3a\u4e86\u96c6\u6210\u7535\u8def\u6700\u65e9\u4f7f\u7528\u7684\u4e92\u8fde\u91d1\u5c5e\u6750\u6599\u3002\u4f46\u662f\uff0c\u94dd\u4e92\u8fde\u7ebf\u5b58\u5728\u7740\u7535\u8fc1\u79fb\u73b0\u8c61(Electron migration\uff0cEM)\u4ee5\u53ca Al\/Si \u63a5\u89e6\u7684\u5c16\u6954\u73b0\u8c61\uff0c\u867d\u7136\u5728\u7ed3\u6784\u4e0a\u5f97\u5230\u4e86\u4e00\u5b9a\u7a0b\u5ea6\u7684\u6539\u5584\uff0c\u4f46\u5f53\u96c6\u6210\u5ea6\u589e\u52a0\uff0c\u4e92\u8fde\u7ebf\u53d8\u7684\u66f4\u7ec6\uff0cEM \u73b0\u8c61\u5219\u53d8\u5f97\u5c24\u4e3a\u7a81\u51fa\uff0c\u6240\u4ee5\u5bfb\u6c42\u65b0\u7684\u4e92\u8fde\u5bfc\u7ebf\u91d1\u5c5e\u6750\u6599\u6210\u4e3a\u89e3\u51b3\u6b64\u95ee\u9898\u7684\u5173\u952e\u3002\u5176\u4e2d\uff0c\u91d1\u5c5e\u94dc\u7684\u7535\u963b\u7387\u5c0f\u4e8e2.0 \u03bc\u03a9\u00b7cm\uff0c\u80fd\u6781\u5927\u5730\u964d\u4f4e\u4e92\u8fde\u7ebf\u7684\u7535\u963b\uff0c\u51cf\u5c0f\u5f15\u7ebf\u7684\u5bbd\u5ea6\u548c\u539a\u5ea6\u4ee5\u53ca\u5206\u5e03\u7535\u5bb9\u6765\u63d0\u9ad8\u96c6\u6210\u7535\u8def\u7684\u5bc6\u5ea6\uff0c\u4e14\u94dc\u4e92\u8fde\u65b9\u6848\u66f4\u5927\u7684\u4f18\u52bf\u8868\u73b0\u5728\u53ef\u9760\u6027\u4e0a\uff0c\u94dc\u7684\u6297 EM \u6027\u80fd\u597d\uff0c\u6ca1\u6709\u5e94\u529b\u8fc1\u79fb\u3002 \u56e0\u6b64\uff0c\u5728\u7535\u8def\u529f\u8017\u5bc6\u5ea6\u4e0d\u65ad\u589e\u52a0\u3001EM\u73b0\u8c61\u66f4\u52a0\u4e25\u91cd\u7684\u60c5\u51b5\u4e0b\uff0c\u94dc\u51ed\u501f\u5176\u4f18\u5f02\u7684\u6027\u80fd\u53d6\u4ee3\u4e86\u94dd\u8fde\u7ebf\uff0c\u6210\u4e3a\u76ee\u524d\u666e\u904d\u91c7\u7528\u7684\u4e92\u8fde\u6750\u6599\uff0c\u5176\u91cd\u8981\u6027\u66f4\u4e3a\u663e\u8457\u3002<\/p>\n

2. \u78b3\u7eb3\u7c73\u7ba1\u4f5c\u4e3a\u4e92\u8fde\u5bfc\u7ebf\u7684\u4f18\u8d8a\u6027\u80fd<\/strong><\/span><\/p>\n

CNTs \u662f\u7531\u516d\u8fb9\u5f62\u6392\u5217\u7684\u78b3\u539f\u5b50\u6784\u6210\uff0c\u662f\u5177\u6709\u4e2d\u7a7a\u7ba1\u72b6\u7ed3\u6784\u7684\u6750\u6599\uff0c\u5176\u5f84\u5411\u5c3a\u5bf8\u4e3a\u7eb3\u7c73\u91cf\u7ea7\uff0c\u8f74\u5411\u5c3a\u5bf8\u4e3a\u5fae\u7c73\u91cf\u7ea7\u3002\u78b3\u7eb3\u7c73\u7ba1\u5206\u4e3a\u5355\u58c1\u78b3\u7eb3\u7c73\u7ba1 (Single-walled carbon nanotubes\uff0c SWNTs) \u548c\u591a\u58c1 \u78b3 \u7eb3 \u7c73 \u7ba1 ( Multi-walled carbon nanotubes\uff0cMWNTs)\uff0cSWNTs \u7684\u76f4\u5f84\u4e00\u822c\u4e3a 1~6 nm\uff0c\u6700\u5c0f\u76f4\u5f84\u4e3a 0.5nm\uff0c MWNTs \u901a\u5e38\u662f\u7531 2 ~ 50 \u4e2a\u5355\u5c42\u7ba1\u7ec4\u6210\u7684\u540c\u8f74\u7ba1\uff0c\u5c42\u95f4\u8ddd\u7ea6\u4e3a 0.34 nm\u3002\u7531\u4e8e CNTs \u7684\u7ed3\u6784\u5c3a\u5ea6\u5904\u4e8e\u7eb3\u7c73\u91cf\u7ea7\uff0c\u5176\u8868\u9762\u7684\u7535\u5b50\u7ed3\u6784\u548c\u6676\u4f53\u7ed3\u6784\u53d1\u751f\u4e86\u660e\u663e\u53d8\u5316\uff0c\u56e0\u6b64\u4ea7\u751f\u4e86\u5b8f\u89c2\u7269\u4f53\u6240\u4e0d\u5177\u5907\u7684\u7279\u6b8a\u6548\u5e94\uff0c\u5e76\u4e14\u7531\u4e8e\u5176\u72ec\u7279\u7684\u4e00\u7ef4\u7eb3\u7c73\u7ed3\u6784\u800c\u5177\u6709\u8bb8\u591a\u4f18\u826f\u7684\u6027\u80fd\u3002<\/p>\n

2.1 \u673a\u68b0\u6027\u80fd<\/strong><\/p>\n

CNTs\u5f39\u6027\u6a21\u91cf\u53ef\u8fbe 1Tpa\uff0c\u4e0e\u91d1\u521a\u77f3\u76f8\u5f53\uff0c\u4e3a\u5df2\u77e5\u6750\u6599\u7684\u6700\u9ad8\u5f39\u6027\u6a21\u91cf\uff0c\u5176\u5f39\u6027\u5e94\u53d8\u6700\u9ad8\u53ef\u8fbe 12% \uff0cCNTs \u8fd8\u5177\u6709\u8d85\u9ad8\u5f3a\u5ea6\u7684\u8010\u78e8\u6027\u548c\u81ea\u6da6\u6ed1\u6027\uff0c\u5176\u8010\u78e8\u6027\u8981\u6bd4\u8f74\u627f\u94a2\u9ad8 100 \u500d\uff0c\u6469\u64e6\u7cfb\u6570\u4e3a 0.06 ~ 0.1\u3002<\/p>\n

2.2 \u7535\u5b66\u6027\u80fd<\/strong><\/p>\n

CNTs \u53d7\u5230\u76f4\u5f84\u3001\u957f\u5ea6\u3001\u624b\u6027\u7b49\u7ed3\u6784\u53c2\u6570\u5f71\u54cd\u5c06\u8868\u73b0\u51fa\u91d1\u5c5e\u5bfc\u7535\u6027\u6216\u534a\u5bfc\u4f53\u5bfc\u7535\u6027\uff0c\u800c\u4e14\u7531\u4e8e\u5176\u7279\u6b8a\u7ed3\u6784\u7684\u91cf\u5b50\u9650\u57df\u6548\u5e94\uff0c\u7535\u5b50\u53ea\u80fd\u6cbf CNTs \u8f74\u5411\u8fdb\u884c\u6709\u6548\u7684\u8fd0\u52a8\uff0c\u5f84\u5411\u5219\u53d7\u5230\u9650\u5236\u3002\u7531\u4e8e CNTs \u7684 sp2\u7684\u6210\u952e\u7ed3\u6784\u548c\u7535\u5b50\u7684\u5f39\u9053\u5f0f\u8f93\u8fd0\uff0c\u5176\u627f\u8f7d\u7684\u7535\u6d41\u5bc6\u5ea6\u4e3a 109<\/sup>~ 1010<\/sup>A\/cm2<\/sup>\u91cf\u7ea7\uff0c\u660e\u663e\u9ad8\u51fa\u94dc\u4e92\u8fde\u5bfc\u7ebf 3\u4e2a\u7684\u6570\u91cf\u7ea7\u3002<\/p>\n

2.3 \u70ed\u5b66\u6027\u80fd<\/strong><\/p>\n

\u7531\u4e8e CNTs \u7684\u4e00\u7ef4\u5bfc\u4f53\u7ed3\u6784\uff0c\u4e0e\u7535\u5b50\u7684\u5e73\u5747\u81ea\u7531\u7a0b\u7c7b\u4f3c\uff0c\u5b83\u7684\u58f0\u5b50\u7684\u5e73\u5747\u81ea\u7531\u7a0b\u4e5f\u76f8\u5f53\u7684\u957f\uff0c\u5fae\u7c73\u91cf\u7ea7\u7684 SWNTs \u4ecd\u663e\u793a\u51fa\u58f0\u5b50\u5f39\u9053\u4f20\u8f93\u73b0\u8c61\uff0c\u7531\u4e8e\u58f0\u5b50\u7684\u6563\u5c04\u76f4\u63a5\u5f71\u54cd\u6750\u6599\u7684\u6563\u5c04\u7279\u6027\uff0c\u957f\u7684\u5e73\u5747\u81ea\u7531\u7a0b\u5c06\u51cf\u5c0f\u58f0\u5b50\u6563\u5c04\u7684\u673a\u4f1a\uff0c\u4f53\u73b0\u51fa\u9ad8\u7684\u70ed\u5bfc\u7387\uff0c\u53ef\u8fbe\u5230 1750 ~ 5800 W \/ ( m\u00b7K)\u3002\u5728\u96c6\u6210\u7535\u8def\u5236\u9020\u4e2d\uff0c\u901a\u8fc7\u201c\u81ea\u4e0b\u800c\u4e0a\u201d\u51b6\u7684\u6280\u672f\u53ef\u4ee5\u5b9e\u73b0 CNTs \u7684\u653e\u7f6e\uff0c\u53ef\u89e3\u51b3\u76ee\u524d\u201c\u81ea\u4e0b\u800c\u4e0a\u201d\u51b6\u5236\u9020\u5de5\u827a\u6240\u9762\u4e34\u7684\u56f0\u5883\uff0c\u7136\u800c\u540e\u7eed\u7684\u4e92\u8fde\u6280\u672f\u5219\u6210\u4e3a\u5173\u952e\u90e8\u5206\u3002CNTs \u4e92\u8fde\u6280\u672f\u662f\u7ed3\u6784\u5236\u9020\u3001\u529f\u80fd\u5668\u4ef6\u5236\u5907\u6216\u5176\u7ec4\u88c5\u4e0d\u53ef\u6216\u7f3a\u7684\u73af\u8282\uff0c\u4e3b\u8981\u76ee\u7684\u662f\u4e3a\u83b7\u5f97\u673a\u68b0\u8fde\u63a5\u6216\u652f\u6491\u3001\u7535\u8fde\u63a5\u3001\u7535\u7edd\u7f18\u6216\u8005\u5176\u5b83\u7279\u6b8a\u6027\u80fd\uff0c \u5176\u8fde\u63a5\u8d28\u91cf\u76f4\u63a5\u51b3\u5b9a\u4e86\u529f\u80fd\u5668\u4ef6\u7684\u53ef\u9760\u6027\u3002<\/p>\n

3.\u00a0<\/strong>\u78b3\u7eb3\u7c73\u7ba1\u4e92\u8fde\u5f62\u5f0f<\/strong><\/span><\/p>\n

CNTs \u5177\u6709\u673a\u68b0\u3001\u7535\u5b66\u3001\u70ed\u5b66\u7b49\u4f18\u5f02\u6027\u80fd\uff0c\u7136\u800c\u5728 CNTs \u7684 \u5b9e \u9645 \u5e94 \u7528 \u4e2d\uff0c \u7531 \u4e8e \u7ba1 \u5f84 \u4e3a \u51e0 \u7eb3 \u7c73 \u7684SWNTs \u672c\u8eab\u5177\u6709 6. 5 kohm \u7684\u91cf\u5b50\u7535\u963b\uff0c\u5728\u7528\u4f5c\u8d85\u5927\u89c4\u6a21\u96c6\u6210\u7535\u8def ( Very large scale integration\uff0cVLSI) \u7684\u4e92\u8fde\u5bfc\u7ebf\u65f6\uff0c\u9700\u8981\u5c06\u591a\u6839 SWNTs \u5e76\u8054\u4f7f\u7528\uff0c\u6240\u4ee5\u5728 VLSI \u4e92\u8fde\u5e94\u7528\u65b9\u9762\uff0c\u91c7\u7528 SWNTs \u675f\uff0cMWNTs \u675f\u3001\u4ee5\u53ca\u5927\u76f4\u5f84\u7684\u591a\u58c1\u78b3\u7eb3\u7c73\u7ba1\u4f5c\u4e3a\u4e3b\u8981\u7684\u4e92\u8fde\u5f62\u5f0f\u3002\u57fa\u4e8eWNTs \u675f\u7684\u4e92\u8fde\u5f62\u5f0f\u53c8\u4e3b\u8981\u96c6\u4e2d\u5728\u5782\u76f4\u7684\u901a\u5b54\u4e0a\uff0c\u4e3b\u8981\u53d7\u5230\u4e24\u65b9\u9762\u7684\u9650\u5236:\u4e00\u662f\u7531\u4e8e\u901a\u5b54\u5c3a\u5bf8\u5c0f\uff0c\u627f\u53d7\u7684\u7535\u6d41\u5bc6\u5ea6\u76f8\u5bf9\u8f83\u5927\uff0c\u6700\u6709\u53ef\u80fd\u4ea7\u751f\u7a33\u5b9a\u6027\u95ee\u9898\uff0c\u56e0\u6b64\u66f4\u52a0\u7a33\u5b9a\u7684\u78b3\u7eb3\u7c73\u7ba1\u5728\u901a\u5b54\u4e0a\u66f4\u52a0\u6709\u5e94\u7528\u7684\u4f18\u52bf;\u4e8c\u662f\u76ee\u524d\u8fd8\u6ca1\u6709\u76f8\u5bf9\u6210\u719f\u7684\u5de5\u827a\u80fd\u591f\u5728\u6c34\u5e73(\u4e0e\u6676\u5706\u5e73\u9762\u5e73\u884c)\u7684\u4e24\u4e2a\u65b9\u5411\u4e0a\u751f\u957f\u51fa\u8f83\u957f\u7684\u7d27\u5bc6\u6392\u5217\u7684\u78b3\u7eb3\u7c73\u7ba1\u675f\u3002\u56e0\u6b64\uff0c\u6b64\u4e92\u8fde\u5f62\u5f0f\u5728\u5bf9\u4e8e\u6c34\u5e73\u4e92\u8fde\u7ebf\u7684\u5e94\u7528\u4e0a\uff0c\u751f\u957f\u5de5\u827a\u53d7\u5230\u6781\u5927\u6311\u6218\u3002\u57fa\u4e8e\u4e0a\u8ff0\u4e92\u8fde\u65b9\u5f0f\u7684\u8003\u8651\u4ee5\u53ca\u6c34\u5e73\u65b9\u5411\u7684\u5e94\u7528\u9700\u6c42\uff0c\u5927\u76f4\u5f84\u7684 MWNTs \u4e92\u8fde\u7ebf\u4e5f\u6210\u4e3a\u7814\u7a76\u7684\u70ed\u70b9\uff0c\u7406\u8bba\u548c\u5b9e\u9a8c\u8bc1\u660e\u5728 MWNTs \u7684\u6240\u6709\u5c42\u4e0e\u7535\u6781\u5145\u5206\u8fde\u63a5\uff0c\u6240\u6709\u5c42\u90fd\u53ef\u4ee5\u5bfc\u7535\uff0c\u56e0\u6b64\u5927\u76f4\u5f84 MWNTs \u7684\u6027\u80fd\u4f18\u4e8e\u94dc\u751a\u81f3 SWNTs\uff0c\u5c06\u6210\u4e3a\u4f18\u5f02\u7684\u4e92\u8fde\u5f62\u5f0f\uff0c\u4f46\u662f\u5b9e\u9645\u5e94\u7528\u4e2d\u7684\u5927\u76f4\u5f84 MWNTs \u7684\u7535\u5bfc\u6bd4\u7406\u8bba\u9884\u6d4b\u503c\u4f4e\uff0c\u8fd9\u4e3b\u8981\u662f\u672c\u8eab\u7684\u7f3a\u9677\u5bc6\u5ea6\u4ee5\u53ca\u5c42\u6570\u7b49\u56e0\u7d20\u5bfc\u81f4\u7684\uff0c\u8fd9\u9700\u8981\u63d0\u5347\u5927\u76f4\u5f84 WNTs \u5236\u5907\u7684\u5de5\u827a\u6c34\u5e73\u3002\u867d\u7136 SWNTs \u5728\u5b9e\u9645\u5e94\u7528\u65b9\u9762\u4e0d\u53ca MWNTs\uff0c\u4f46\u662fSWNTs \u7ed3\u6784\u7b80\u5355\uff0c\u6613\u4e8e\u8868\u5f81\uff0c\u4e5f\u6613\u4e8e\u5efa\u6a21\uff0c\u4e5f\u6210\u4e3a\u4e13\u5bb6\u5b66\u8005\u5728\u63a2\u7d22\u4e92\u8fde\u65b9\u9762\u7684\u4e3b\u8981\u5bf9\u8c61\u3002<\/p>\n

4. \u78b3\u7eb3\u7c73\u7ba1\u4e92\u8fde\u6280\u672f<\/strong><\/span><\/p>\n

\u76ee\u524d\uff0c\u5c3d\u7ba1\u78b3\u7eb3\u7c73\u7ba1\u7684\u5236\u5907\u6280\u672f\u53d1\u5c55\u7684\u5f88\u5feb\uff0c\u4e5f\u6bd4\u8f83\u5b8c\u5584\uff0c\u4f46\u5c06\u5176\u4f5c\u4e3a\u4e92\u8fde\u5bfc\u7ebf\u96c6\u6210\u5230\u7535\u8def\u4e2d\u7684\u6280\u672f\u8fd8\u4e0d\u592a\u6210\u719f\uff0c\u4e3b\u8981\u96c6\u4e2d\u5728 CNTs \u7684\u4e92\u8fde\u5de5\u827a\u65b9\u9762\uff0c\u4e3b\u8981\u95ee\u9898\u5728\u4e8e\uff0c\u5f53\u4e92\u8fde\u7684\u5c3a\u5bf8\u548c\u4e92\u8fde\u7cbe\u5ea6\u7684\u91cf\u53d8\u8d85\u8fc7\u4e00\u5b9a\u7684\u5c3a\u5ea6\u8303\u56f4\u65f6\uff0c\u5c3a\u5bf8\u6548\u5e94\u5c06\u5bfc\u81f4\u4e92\u8fde\u8fc7\u7a0b\u7684\u80fd\u573a\u4f5c\u7528\u89c4\u5f8b\u548c\u4e92\u8fde\u539f\u7406\u4ea7\u751f\u8d28\u53d8\uff0c\u8fd9\u5c06\u4e25\u91cd\u5236\u7ea6\u7740 CNTs \u7535\u5b50\u5668\u4ef6\u4e92\u8fde\u7ebf\u8def\u7684\u53ef\u9760\u6027\u53ca\u7a33\u5b9a\u6027\uff0c\u4e3a\u514b\u670d\u8fd9\u4e00\u6280\u672f\u6027\u96be\u9898\uff0c\u5f53\u524d\u7684\u4e92\u8fde\u5de5\u827a\u4e3b\u8981\u4ece\u5fae\u89c2\u9886\u57df\u91c7\u7528\u7269\u7406\u6216\u5316\u5b66\u7b49\u65b9\u6cd5\u6765\u5b9e\u73b0\u3002<\/p>\n

4.1 \u5316\u5b66\u6c14\u76f8\u6c89\u79ef\u6280\u672f<\/strong><\/p>\n

CNTs \u7684\u5236\u5907\u8fc7\u7a0b\u4e3b\u8981\u91c7\u7528\u7535\u5f27\u653e\u7535\u548c\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\u6280\u672f( Chemical vapor deposition\uff0cCVD)\uff0c\u5176\u4e2dCVD \u8fc7\u7a0b\u662f\u901a\u8fc7\u542b\u78b3\u6c14\u4f53\u5728\u50ac\u5316\u5242\u4f5c\u7528\u4e0b\u88c2\u89e3\u5b9e\u73b0\u3002\u56e0\u6b64\uff0c\u4e13\u5bb6\u5b66\u8005\u5229\u7528\u8fd9\u4e00\u7279\u70b9\uff0c\u76f4\u63a5\u5c06 CNTs\u201c\u81ea\u4e0b\u800c\u4e0a\u201d\u51b6 ( Bottom-Up) \u751f\u957f\u5728\u6240\u9700\u7684\u7535\u6781\u4e0a\uff0c\u7136\u540e\u6839\u636e\u9700\u8981\uff0c\u914d\u5408\u673a\u68b0\u8f6c\u79fb\u53ca\u7c98\u5408\u6280\u672f\u5c06 CNTs \u7f6e\u4e8e\u5176\u5b83\u7684\u7535\u6781\uff0c\u518d\u5229\u7528\u5012\u88c5\u82af\u7247\u952e\u5408\u6280\u672f\u5b9e\u73b0\u4e24\u7535\u6781\u4e0a CNTs \u7684\u4e92\u8fde\u3002Yung \u7b49\u91c7\u7528\u5012\u88c5\u82af\u7247\u4e92\u8fde\u7684\u65b9\u6cd5\u5b9e\u73b0\u78b3\u7eb3\u7c73\u7ba1\u675f\u7684\u96c6\u6210\u53ca\u5176\u4e0e\u57fa\u5e95\u7684\u7c98\u7ed3\u3002 \u9996\u5148\u5728\u5e95\u90e8\u7684\u57fa\u7247\u548c\u9700\u5012\u88c5\u7684\u57fa\u5e95\u4e0a\u91c7\u7528 CVD \u65b9\u6cd5\u751f\u957f\u51fa\u9f50\u6574\u7684\u9ad8\u5bc6\u5ea6\u78b3\u7eb3\u7c73\u7ba1\u675f\uff0c\u7136\u540e\u5229\u7528\u5178\u578b\u7684\u5012\u88c5\u82af\u7247\u952e\u5408\u6280\u672f\uff0c\u5c06\u4e0a\u65b9\u5012\u88c5\u57fa\u7247\u4e0a\u7684\u78b3\u7eb3\u7c73\u7ba1\u675f\u4e0e\u5e95\u90e8\u57fa\u7247\u7684\u5bf9\u9f50\uff0c\u518d\u5728\u5916\u529b\u4f5c\u7528\u4e0b\u5c06\u4e0a\u65b9\u57fa\u7247\u7684\u78b3\u7eb3\u7c73\u675f\u63d2\u5165\u5230\u5e95\u90e8\u57fa\u7247\u4e0a\u7684\u78b3\u7eb3\u7c73\u7ba1\u675f\u95f4\u9699\u5904\uff0c\u8fd9\u6837 CNTs \u4f1a\u56e0\u8303\u5fb7\u534e\u529b\u800c\u4fdd\u6301\u5728\u4e00\u8d77\uff0c\u5f62\u6210\u4e92\u76f8\u8fde\u63a5\u66f4\u9ad8\u5bc6\u5ea6\u7684\u78b3\u7eb3\u7c73\u7ba1\u675f\uff0c\u8be5\u4e92\u8fde\u8fc7\u7a0b\u89c1\u56fe1\u3002<\/p>\n

<\/p>\n

\u56fe 1 CVD \u7ed3\u5408\u5012\u88c5\u952e\u5408\u6280\u672f\u5b9e\u73b0 CNTs \u7684\u4e92\u8fde<\/h5>\n

\u5728\u4f20\u7edf CVD \u6280\u672f\u7684\u57fa\u7840\u4e4b\u4e0a\uff0c\u4e13\u5bb6\u5b66\u8005\u5219\u5bf9\u6b64\u8fdb\u884c\u6539\u5584\uff0c\u63d0\u51fa\u4e86\u7b49\u79bb\u5b50\u4f53\u589e\u5f3a\u7684\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\u6280\u672f ( Plasmon enhancement chemical vapor deposition\uff0c PECVD)\u4ee5\u5b9e\u73b0 CNTs \u7684\u4e92\u8fde\u8fc7\u7a0b\uff0cKaul\u91c7\u7528 PECVD \u65b9 \u6cd5 \u5728 \u7eb3 \u673a \u7535 \u88c5 \u7f6e \u4e0a \u5b9e \u73b0 \u4e86 \u78b3 \u7eb3 \u7c73\u7ba1\u7684\u6865\u5f0f\u4e92\u8fde\u3002 \u603b\u7ed3\u53d1\u73b0\uff0c \u901a\u8fc7 CVD \u65b9\u6cd5\u5b9e\u73b0CNTs \u4e0e\u7535\u6781\u4e92\u8fde\u7684\u8fc7\u7a0b\u4e2d\uff0c\u591a\u6570\u662f\u4e3a\u89e3\u51b3\u78b3\u7eb3\u7c73\u7ba1\u675f\u6216\u57fa\u56e2\u4e0e\u7535\u6781\u7684\u4e92\u8fde\uff0c\u800c CVD \u6280\u672f\u57fa\u672c\u90fd\u9700\u8981\u590d\u6742\u8d85\u7cbe\u7ec6\u7684\u6a21\u7248\uff0c\u4e14\u78b3\u7eb3\u7c73\u7ba1\u4e0d\u80fd\u603b\u662f\u6309\u7167\u9884\u5148\u8bbe\u7f6e\u597d\u7684\u533a\u57df\u8fdb\u884c\u751f\u957f\uff0c\u5e76\u7531\u4e8e\u76f4\u63a5\u5728\u91d1\u5c5e\u5c42\u4e0a\u653e\u7f6e\u50ac\u5316\u9897\u7c92\uff0c\u4f1a\u6709\u79fb\u4f4d\u7684\u73b0\u8c61\uff0c\u8fd9\u5bf9\u4eca\u540e\u4e92\u8fde\u7ebf\u7684\u5de5\u827a\u5bb9\u5dee\u4e5f\u662f\u4e00\u4e2a\u6f5c\u5728\u7684\u95ee\u9898\u3002Ting\u7b49\u5728\u4e0d\u91c7\u7528\u6a21\u7248\u7684\u6761\u4ef6\u4e0b\u901a\u8fc7 CVD \u6280\u672f\u5206\u652f\u5f62\u6210\u4e8c\u7ef4(2D)\u3001\u4e09\u7ef4(3D)\u4e92\u8fde\u7684 Y \u578b\u8282\u70b9\uff0c\u56fe 2 \u4e3a\u5176CVD \u4e92\u8fde\u8fc7\u7a0b\u7684\u8fde\u63a5\u70b9\u3002<\/p>\n

<\/p>\n

\u56fe 2\u00a0 \u65e0\u6a21\u677f CVD \u8fc7\u7a0b\u5f62\u6210\u7684\u4e92\u8fde\u8282\u70b9<\/h5>\n

4.2 \u9ad8\u80fd\u675f\u8f90\u7167\u6280\u672f<\/strong><\/p>\n

\u5728\u78b3\u7eb3\u7c73\u7ba1\u7684\u9ad8\u80fd\u675f\u8f90\u7167\u4e92\u8fde\u65b9\u9762\uff0c\u91c7\u7528\u7684\u9ad8\u80fd\u675f\u4e3b\u8981\u662f\u7535\u5b50\u675f\u3001\u79bb\u5b50\u675f\u548c\u6fc0\u5149\u675f\u4e09\u79cd\uff0c\u4f46\u7531\u4e8e\u6fc0\u5149\u675f\u7684\u6ce2\u957f\u6bd4\u8f83\u5927\uff0c\u5b58\u5728\u7740\u884d\u5c04\u6781\u9650\uff0c\u4e14\u805a\u7126\u8f90\u7167\u7684\u5c3a\u5bf8\u6bd4\u8f83\u5927\uff0c\u4e0d\u53ca\u805a\u7126\u7535\u5b50\u675f\u6216\u79bb\u5b50\u675f\u51e0\u7eb3\u7c73\u5c3a\u5ea6\u7684\u5206\u8fa8\u7387\uff0c\u6240\u4ee5\u6613\u5bf9\u5927\u5e45\u5ea6\u9762\u79ef\u5185\u7684 CNTs \u9020\u6210\u7f3a\u9677\u635f\u4f24\uff0c\u5e76\u6709\u53ef\u80fd\u4f7f\u4e4b\u8f6c\u5316\u4e3a\u65e0\u5b9a\u5f62\u78b3\u3002<\/p>\n

4.2.1 \u7535\u5b50\u675f\u8f90\u7167\u6280\u672f<\/p>\n

Terrones \u7b49-\u7387 \u5148 \u91c7 \u7528 \u900f \u5c04 \u7535 \u5b50 \u663e \u5fae \u955c(Transmission electron microscopy\uff0c TEM)\u5bf9\u52a0\u70ed\u5230800 \u2103\u7684 SWNTs \u7684\u4ea4\u9519\u8fde\u63a5\u90e8\u4f4d\u8fdb\u884c\u7535\u5b50\u675f\u8f70\u51fb\uff0c\u8fde\u63a5\u90e8\u4f4d\u7684\u78b3\u539f\u5b50\u7f51\u7edc\u91cd\u65b0\u8fdb\u884c\u7ec4\u5408\uff0c\u83b7\u5f97\u4e86 X\uff0cY\u548c T \u578b\u7684\u4e92\u8fde\u70b9\uff0c\u5b9e\u73b0\u4e86\u5b8c\u5168 C-C \u539f\u5b50\u4e92\u8fde\u7f51\u7edc\u7684\u8fde\u63a5\uff0c\u8fde\u63a5\u5904\u7684\u6210\u952e\u7ed3\u6784\u4e3a sp2\u548c sp3\u7ec4\u5408\u5f62\u5f0f\u3002\u6b64\u5916\uff0c Terrones \u7b49\u8fd8\u91c7\u7528\u4e86\u5206\u5b50\u52a8\u529b\u5b66(Molecular dynamics\uff0cMD)\u65b9\u6cd5\u5bf9\u6a21\u578b\u8fdb\u884c\u4e86\u4eff\u771f\u8ba1\u7b97\uff0c\u89c1\u56fe3.<\/p>\n

<\/p>\n

\u56fe3 \u7535\u5b50\u675f\u8f90\u7167 SWNTs \u4e92\u8fde\u7684\u5206\u5b50\u52a8\u529b\u5b66\u8fc7\u7a0b<\/h5>\n

\u9664\u901a\u8fc7\u5bf9 CNTs \u7684\u78b3\u539f\u5b50\u7f51\u7edc\u7ed3\u6784\u8fdb\u884c\u91cd\u7ec4\u5916\uff0c\u8fd8\u53ef\u901a\u8fc7\u7535\u5b50\u675f\u8bf1\u5bfc\u6c89\u79ef ( Electron beam induced deposition\uff0cEBID)\u7684\u65b9\u5f0f\u5b9e\u73b0 CNTs \u4e92\u8fde\u8fc7\u7a0b\uff0c\u5373\u91c7\u7528\u7535\u5b50\u675f\u8f90\u7167\u78b3\u6c22\u5316\u5408\u7269\uff0c\u4f7f\u4e4b\u5206\u89e3\u4ea7\u751f\u65e0\u5b9a\u5f62\u78b3\uff0c\u53ef\u5728 CNTs \u8fde\u63a5\u5904\u5f62\u6210\u7c7b\u4f3c\u948e\u710a\u7684\u4e92\u8fde\u70b9\u3002<\/p>\n

\u4e3a\u89e3\u51b3\u964d\u4f4e\u78b3\u7eb3\u7c73\u7ba1\u57fa\u7eb3\u7c73\u5668\u4ef6\u963b\u6297\u6240\u9762\u4e34\u7684\u6311\u6218\uff0cKim \u7b49\u91c7\u7528 EBID \u6280\u672f\u6c89\u79ef\u77f3\u58a8\u5316\u78b3\u7684\u65b9\u5f0f\uff0c \u5728 \u4f4e \u6e29 \u7684 \u5236 \u9020 \u8fc7 \u7a0b \u4e2d \u5b9e \u73b0 \u4e86 \u7aef \u90e8 \u5f00 \u53e3 \u578bMWNTs \u4e0e\u91d1\u5c5e\u7535\u6781\u7684\u6b27\u59c6\u63a5\u89e6\uff0c\u6b27\u59c6\u63a5\u89e6\u7535\u963b\u4ece26. 5\u5343\u6b27\u964d\u4f4e\u4e3a 116 \u6b27\uff0c\u8fd9\u5bf9\u672a\u6765\u4e92\u8fde\u6280\u672f\u7684\u5e7f\u6cdb\u5e94\u7528\u5177\u6709\u975e\u5e38\u91cd\u8981\u7684\u6307\u5bfc\u610f\u4e49\u3002\u540c\u6837\uff0c\u5728\u4e92\u8fde\u9886\u57df\u4e13\u5bb6\u5b66\u8005\u524d\u671f\u7814\u7a76\u7684\u57fa\u7840\u4e4b\u4e0a\uff0c Fedorov \u7b49\u5c06\u805a\u7126\u7535\u5b50\u675f\u8bf1\u5bfc\u6c89\u79ef\u6280\u672f\u5e94\u7528\u5230\u78b3\u7eb3\u7c73\u7ba1\u4e92\u8fde\u9886\u57df\uff0c\u8f83\u597d\u5730\u5b9e\u73b0\u4e86\u78b3\u7eb3\u7c73\u7ba1\u4e0e\u7535\u6781\u7684\u826f\u597d\u8fde\u63a5\u89c1\u56fe 4\u3002<\/p>\n

<\/p>\n

\u56fe4\u00a0 \u805a\u7126\u7535\u5b50\u675f\u8bf1\u5bfc\u6c89\u79ef\u6280\u672f\u5b9e\u73b0\u78b3\u7eb3\u7c73\u7ba1\u4e0e\u91d1\u5c5e\u7535\u6781\u7684\u8fde\u63a5<\/h5>\n

4.2.2 \u79bb\u5b50\u675f\u8f90\u7167\u6280\u672f<\/p>\n

\u4e0e\u7535\u5b50\u675f\u8f90\u7167\u65b9\u6cd5\u7c7b\u4f3c\uff0c\u4e00\u90e8\u5206\u5b66\u8005\u5219\u5229\u7528\u9ad8\u80fd\u91cf\u7684\u79bb\u5b50\u675f\u5bf9 CNTs \u8fdb\u884c\u8f90\u7167\uff0c\u901a\u8fc7\u78b3\u539f\u5b50\u7f51\u7edc\u7ed3\u6784\u91cd\u7ec4\u5b9e\u73b0\u4e92\u8fde\u8fc7\u7a0b\u3002 Krasheninnikov \u7b49\u4e5f\u4eceC\u2014C \u952e\u91cd\u7ec4\u7684\u89d2\u5ea6\u8fdb\u884c\u4e86 SWNTs \u7684 MD \u4eff\u771f\u8ba1\u7b97\uff0c\u4eff\u771f\u4e2d\u91c7\u7528\u4e86 0.4 ~ 1 keV \u7684Ar+<\/sup>\u79bb\u5b50\u5bf9\u4ea4\u9519\u533a\u57df\u8fdb\u884c\u8f90\u7167\uff0c\u5728\u4e92\u8fde\u70b9\u9644\u8fd1\u51fa\u73b0\u660e\u663e\u7684\u8f90\u7167\u8bf1\u5bfc\u7f3a\u9677\uff0c\u5982\u56fe5\u6240\u793a\u3002\u4f5c\u8005\u8fd8\u5efa\u7acb\u4e86 2000 K \u6e29\u5ea6\u4e0b\u79bb\u5b50\u5f71\u54cd\u7684\u7f3a\u9677\u9000\u706b\u6a21\u578b\uff0c\u7814\u7a76\u53d1\u73b0\u79bb\u5b50\u8f90\u7167\u548c\u9ad8\u6e29\u90fd\u662f\u901a\u8fc7\u60ac\u6302\u952e\u9971\u548c\u4ee5\u53ca\u78b3\u539f\u5b50\u7f51\u7edc\u7ed3\u6784\u91cd\u7ec4\u5bf9\u4e92\u8fde\u8fc7\u7a0b\u4ea7\u751f\u4f5c\u7528\uff0c\u5e76\u9884\u6d4b\u6700\u4f18\u7684 Ar+<\/sup>\u79bb\u5b50\u80fd\u91cf\u4e3a0.4~ 0.6 keV\u3002<\/p>\n

<\/p>\n

\u56fe5\u00a0 \u79bb\u5b50\u675f\u8f90\u7167 CNT-CNT \u4e92\u8fde\u8fc7\u7a0b\u4ea7\u751f\u7684\u635f\u4f24<\/h5>\n

Wang \u7b49\u5728\u7814\u7a76\u4e2d\u9009\u53d6\u5206\u5e03\u6709\u4ea4\u53c9\u6216\u76f8\u4e92\u5173\u8054 MWNTs \u7684 \u7f51 \u6805\uff0c\u5c06 \u5176 \u88c5 \u5165 \u9776 \u5ba4 \u540e\uff0c \u91c7 \u752850 keV C+<\/sup> \u79bb\u5b50\u5782\u76f4\u4e8e TEM \u7f51\u6805\u5747\u5300\u8f90\u7167\uff0c\u5bf9\u8f70\u51fb\u7684\u4e92\u8fde\u533a\u57df\u7ed3\u6784\u91c7\u7528 TEM \u89c2\u5bdf\u548c\u5206\u6790\u5f97\u51fa\uff0c\u5728MWNTs \u7684\u4ea4\u53e0\u533a\u51fa\u73b0\u4e86\u65e0\u5b9a\u5f62\u78b3\u7684\u7ed3\u6784\u6027\u7684\u4e92\u8fde\u73b0\u8c61\uff0c\u5982\u56fe6\u6240\u793a\u3002\u4f5c\u8005\u901a\u8fc7\u5206\u6790\u53ef\u4ee5\u5f97\u51fa\uff0c\u4e92\u8fde\u533a\u57df\u7684 ACNWs\u662f sp2\u548c sp3\u7ed3\u6784\u7684\u6df7\u5408\u7269\uff0c\u5176 sp2 \/ sp3\u6bd4\u503c\u5927\u5c0f\u7684\u5dee\u522b\u5c06\u9884\u793a\u5176\u7269\u6027\u7684\u4e0d\u540c\uff0c\u56e0\u4e3a\u4ed6\u4eec\u5206\u522b\u5177\u6709\u4e09\u91cd\u6216\u56db\u91cd\u4e0d\u540c\u7684\u914d\u4f4d\u7ed3\u6784\uff0c\u7814\u7a76\u8868\u660e\u4ed6\u4eec\u53ef\u80fd\u6210\u4e3a\u5bfc\u4f53\u3001\u7edd\u7f18\u4f53\u6216\u534a\u5bfc\u4f53\u6750\u6599\u3002<\/p>\n

<\/h5>\n
\u56fe 6 \u79bb\u5b50\u675f\u8f90\u7167 CNTs \u5f62\u6210\u7684\u65e0\u5b9a\u5f62\u78b3\u7ed3\u6784\u4e92\u8fde\u70b9<\/h5>\n

4.3 \u8d85\u58f0\u6ce2\u632f\u52a8\u4e92\u8fde\u6280\u672f<\/strong><\/p>\n

\u4e0a\u6d77\u4ea4\u901a\u5927\u5b66 Zhang \u7814\u7a76\u56e2\u961f\u5f00\u5c55\u4e86\u5229\u7528\u8d85\u58f0\u6ce2\u632f\u52a8\u65b9\u5f0f\u8fdb\u884c CNTs \u4e92\u8fde\u7684\u7814\u7a76\uff0c\u5176\u4e92\u8fde\u8fc7\u7a0b\u89c1\u56fe7\u3002\u5176\u7814\u7a76\u5c0f\u7ec4\u5bf9\u805a\u56e2\u7684 SWNTs \u8d85\u58f0\u6ce2\u5206\u6563\u540e\u6c89\u79ef\u5230\u57fa\u7247\u8868\u9762\uff0c\u5229\u7528\u4ecb\u7535\u6cf3\u6548\u5e94\u4f7f\u5176\u642d\u63a5\u5230\u7845\u57fa\u5e95\u7684\u91d1\u5c5e\u949b\u7535\u6781\u4e0a\uff0c\u7535\u6781\u7684\u5c3a\u5bf8\u4e3a 40\u03bcm\u00d740\u03bcm\u00d7105nm\uff0c\u4e24\u7535\u6781\u95f4\u7684\u6865\u63a5\u8ddd\u79bb\u4e3a 1\u03bcm\uff0c\u7136\u540e\u91c7\u7528\u7c97\u7cd9\u5ea6\u4e3a 0.2 nm\uff0c\u8868\u9762\u79ef 50\u03bcm2<\/sup>\u7684\u5355\u6676Al2<\/sub>O3<\/sub>\u710a\u5934\u5b9e\u65bd\u7eb3\u7c73\u710a\u63a5\u8fc7\u7a0b\uff0c\u4e92\u8fde\u8fc7\u7a0b\u91c7\u7528\u7684\u538b\u529b\u4e3a 78. 4mN\uff0c\u8d85\u58f0\u9891\u7387\u4e3a 60 kHz\uff0c\u8fd9\u6837\u8d85\u58f0\u80fd\u91cf\u901a\u8fc7\u710a\u5934\u4f1a\u8f6c\u79fb\u5230\u4e92\u8fde\u8868\u9762\uff0c\u4ece\u8d85\u58f0\u6ce2\u8f6f\u5316\u5904\u7406\u7406\u8bba\u51fa\u53d1\uff0c\u5728\u5ba4\u6e29\u6761\u4ef6\u4e0b\u8d85\u58f0\u632f\u52a8 0.2 s \u5b9e\u73b0\u4e86 SWNTs \u4e0e\u91d1\u5c5e\u7535\u6781\u7684\u4e92\u8fde\uff0c\u5b9e\u9a8c\u7ed3\u679c\u8868\u660e\uff0c\u8fde\u63a5\u5904\u6709\u5f88\u9ad8\u7684\u673a\u68b0\u5f3a\u5ea6\uff0c\u5e76\u4e14\u91d1\u5c5e\u578b\u7684 SWNTs \u6bcf\u03bcm\u7684\u963b\u6297\u4e3a 8 ~ 24k\u03a9\u3002 \u4f5c\u8005\u5728\u6587\u732e\u4e2d\u6307\u51fa\uff0c\u5229\u7528\u6b64\u65b9\u6cd5\u4e92\u8fde\u5f97\u5230\u7684\u573a\u6548\u5e94\u7ba1(Field-effect transistors\uff0c FETs)\u6027\u80fd\u5f97\u5230\u8f83\u5927\u7684\u63d0\u5347\u3002<\/p>\n

<\/p>\n

\u56fe 7 \u8d85\u58f0\u6ce2\u5b9e\u73b0 CNT \u4e0e\u7535\u6781\u7684\u4e92\u8fde<\/h5>\n

4.4 \u00a0\u57fa\u4e8e\u626b\u63cf\u63a2\u9488\u663e\u5fae\u955c\u7684\u4e92\u8fde\u6280\u672f<\/strong><\/p>\n

4.4.1 \u57fa\u4e8e\u626b\u63cf\u63a2\u9488\u663e\u5fae\u955c\u573a\u81f4\u84b8\u53d1\u7684\u4e92\u8fde\u6280\u672f<\/p>\n

\u626b\u63cf\u63a2\u9488\u663e\u5fae\u955c( Scanning probe microscopy\uff0cSPM)\u573a\u81f4\u84b8\u53d1\u6548\u5e94\u7684\u57fa\u672c\u539f\u7406\u662f\u8ba9\u5bfc\u7535\u63a2\u9488\u4e0e\u57fa\u5e95\u5145\u5206\u63a5\u8fd1\uff0c\u5728\u8109\u51b2\u7535\u538b\u7684\u4f5c\u7528\u4e0b\uff0c\u5bfc\u7535\u63a2\u9488\u4e0e\u6837\u54c1\u4e4b\u95f4\u4f1a\u7531\u4e8e\u5c40\u90e8\u7535\u573a\u589e\u5f3a\u6548\u5e94\u800c\u4ea7\u751f\u8db3\u591f\u9ad8\u7684\u7535\u573a\uff0c\u5bfc\u81f4\u9488\u5c16\u4e0a\u7684\u91d1\u5c5e\u539f\u5b50\u53d1\u751f\u79bb\u5b50\u5316\uff0c\u5e76\u5728\u6781\u9ad8\u7535\u573a\u7684\u4f5c\u7528\u4e0b\u7a7f\u8fc7\u8868\u9762\u52bf\u5792\uff0c\u5c06\u5bfc\u7535\u63a2\u9488\u9488\u5c16\u4e0a\u7684\u539f\u5b50\u84b8\u53d1\u5230\u6837\u54c1\u8868\u9762\uff0c\u4ece\u800c\u5728\u6837\u54c1\u8868\u9762\u5f62\u6210\u7eb3\u7c73\u5c3a\u5ea6\u7684\u539f\u5b50\u56e2\uff0c\u5b9e\u73b0\u4e92\u8fde\u8fc7\u7a0b\u3002<\/p>\n

Yu \u7b49\u91c7\u7528\u57fa\u4e8e\u539f\u5b50\u529b\u663e\u5fae\u955c(Atomic force microscopy\uff0c AFM) \u573a\u81f4\u84b8\u53d1\u4f5c\u7528\u5b9e\u73b0\u4e86 MWNTs\u7684\u4e92\u8fde\uff0c\u5176\u539f\u7406\u53ca\u5b9e\u9a8c\u7ed3\u679c\u89c1\u56fe8\u3002 \u5b9e\u9a8c\u4e2d\uff0c\u7814\u7a76\u8005\u5c06\u9700\u8981\u4e92\u8fde\u7684 MWNTs \u901a\u8fc7\u4ecb\u7535\u6cf3\u6548\u5e94\u88c5\u5907\u5230\u7535\u6781\u4e0a\uff0c\u7136\u540e\u63a7\u5236\u63a2\u9488-\u6837\u54c1\u95f4\u7684\u8ddd\u79bb\u4e3a 20 ~ 30 nm\uff0c\u7a7a\u6c14\u7684\u76f8\u5bf9\u6e7f\u5ea6\u4e3a 25% ~ 55% \uff0c\u73af\u5883\u6e29\u5ea6\u4e3a 22\u2103\uff0c\u8109\u51b2\u504f\u538b\u4e3a 20 V\uff0c\u8109\u51b2\u6301\u7eed\u65f6\u95f4\u4e3a 0.2 s\uff0c\u4ee5\u786e\u4fdd\u5bfc\u7535\u63a2\u9488\u4e0e\u6837\u54c1\u4e4b\u95f4\u4ea7\u751f\u8db3\u591f\u9ad8\u7684\u7535\u573a\uff0c\u4f7f\u91d1\u5c5e Pt \u63a2\u9488\u7684\u539f\u5b50\u53d1\u751f\u79bb\u5b50\u5316\u800c\u6c89\u79ef\u5230\u4e92\u8fde\u70b9\u533a\u57df\uff0c\u5b9e\u73b0\u6709\u6548\u7684\u7eb3\u7c73\u4e92\u8fde\u3002<\/p>\n

<\/h5>\n
\u56fe 8 AFM \u573a\u81f4\u84b8\u53d1\u5b9e\u73b0 CNT \u4e92\u8fde\u7684\u539f\u7406\u53ca\u7ed3\u679c<\/h5>\n

4.4.2 \u57fa\u4e8e\u626b\u63cf\u63a2\u9488\u663e\u5fae\u955c\u9633\u6781\u6c27\u5316\u7684\u4e92\u8fde\u6280\u672f<\/p>\n

\u57fa\u4e8e SPM \u9633\u6781\u6c27\u5316\u6280\u672f\u7684\u539f\u7406\u57fa\u672c\u4e0e\u4f20\u7edf\u7684\u7535\u89e3\u6c60\u539f\u7406\u7c7b\u4f3c\uff0cSPM \u9488\u5c16\u4e0e\u57fa\u5e95\u5206\u522b\u6784\u6210\u4e86\u7535\u5316\u5b66\u53cd\u5e94\u7684\u9634\u6781\u548c\u9633\u6781\uff0c \u9488\u5c16\u4e0e\u57fa\u5e95\u95f4\u7684\u6c34\u819c\u8d77\u5230\u4e86\u7535\u5316\u5b66\u53cd\u5e94\u4e2d\u7535\u89e3\u6db2\u7684\u4f5c\u7528\uff0c \u63d0\u4f9b\u57fa\u5e95\u8868\u9762\u539f\u5b50\u6c27\u5316\u53cd\u5e94\u6240\u9700\u8981\u7684\u6c27\u5316\u79bb\u5b50\uff0c\u5f53 AFM \u5bfc\u7535\u63a2\u9488\u548c\u57fa\u5e95\u95f4\u65bd\u52a0\u4e00\u5b9a\u7535\u538b\u65f6\uff0cAFM \u9488\u5c16\u548c\u57fa\u5e95\u7684\u7eb3\u7c73\u7ea7\u95f4\u9699\u4e2d\u4f1a\u5f62\u6210\u4e00\u4e2a 108<\/sup>~ 1010<\/sup>V \/ m \u7684\u5f3a\u7535\u573a\uff0c\u5728\u6b64\u5f3a\u7535
\n\u573a\u7684\u4f5c\u7528\u4e0b\u9488\u5c16\u4e0e\u57fa\u5e95\u95f4\u5438\u9644\u6c34\u819c\u4e2d\u7684\u6c34\u5206\u5b50\u5c06\u4f1a\u88ab\u7535\u89e3\uff0c \u5176\u4e2d\u805a\u96c6\u5230\u9633\u6781\u7684\u8d1f\u79bb\u5b50\u5219\u4f1a\u4e0e\u57fa\u5e95\u8868\u9762\u7684\u539f\u5b50\u53d1\u751f\u7535\u5316\u5b66\u53cd\u5e94\uff0c\u8fdb\u800c\u5728\u57fa\u5e95\u8868\u9762\u751f\u957f\u51fa\u6c27\u5316\u7269\u7ed3\u6784\uff0c\u5c06\u4f1a\u628a\u9700\u8981\u8fde\u63a5\u7684 CNTs \u5305\u88f9\u8d77\u6765\uff0c\u5b8c\u6210\u4e92\u8fde\u8fc7\u7a0b\u3002<\/p>\n

Duan \u7b49\u901a\u8fc7\u63a7\u5236 SPM \u63a2\u9488\u4e0e Si(111)\u57fa\u5e95\u7684\u504f\u538b\u4e3a 10 ~ 18 V\uff0c\u73af\u5883\u76f8\u5bf9\u6e7f\u5ea6\u4e3a 30% ~ 50% \uff0c\u626b\u63cf\u901f\u5ea6\u4e3a 10 nm\/s \u7b49\u6761\u4ef6\uff0c\u5728 Si \u57fa\u5e95\u8868\u9762\u6c27\u5316\u751f\u957f\u51fa\u5305\u88f9\u76f4\u5f84 1.8 nm SWNTs \u7684 SiOx<\/sub>\u7ed3\u6784\uff0c\u5b9e\u73b0\u4e86SWNTs \u4e0e\u57fa\u5e95\u7684\u8fde\u63a5\uff0c\u89c1\u56fe9\u3002<\/p>\n

<\/h5>\n
\u56fe9\u00a0 AFM \u9633\u6781\u6c27\u5316\u6280\u672f\u5b9e\u73b0\u5355\u58c1\u78b3\u7eb3\u7c73\u7ba1\u7684\u710a\u63a5<\/h5>\n

4.5 \u8584\u819c\u5377\u8986\u6280\u672f<\/strong><\/span><\/p>\n

\u8584\u819c\u5377\u8986\u6cd5\u7684\u57fa\u672c\u539f\u7406\u662f\u5229\u7528\u4e86\u6da6\u6e7f\u7684 CNTs\u8584\u819c\u5728\u5e72\u71e5\u8fc7\u7a0b\u4e2d\u5f3a\u70c8\u7684\u6536\u7f29\u7279\u6027\uff0c \u4ee5\u5377\u8986\u8fde\u63a5\u53e6\u5916\u7684 CNTs\uff0c\u53d1\u6325\u957f\u4e1d\u95f4\u7684\u8303\u5fb7\u534e\u529b\u548c\u673a\u68b0\u6469\u64e6\u4f5c\u7528\uff0c\u4f7f CNTs \u5f62\u6210\u4e86\u6709\u6548\u7684\u7269\u7406\u7ed3\u5408\u3002Gong \u7b49\u5c31\u662f\u5229\u7528\u53cc\u58c1\u78b3\u7eb3\u7c73\u7ba1\u8584\u819c\u5377\u8986\u5b9e\u73b0\u4e86\u4e0e\u53cc\u58c1\u78b3\u7eb3\u7c73\u7ba1\u7684\u4e92\u8fde\uff0c\u8fde\u63a5\u5904\u7684\u6297\u62c9\u5f3a\u5ea6(270 MPa)\u5df2\u63a5\u8fd1\u539f\u59cb\u72b6\u6001\uff0c\u5176\u5b9e\u9a8c\u4e92\u8fde\u8fc7\u7a0b\u53ca\u7ed3\u679c\u89c1\u56fe 10\u3002<\/p>\n

<\/h5>\n
\u56fe 10 CNTs \u8584\u819c\u5377\u8986 CNTs \u4e92\u8fde\u7684\u8fc7\u7a0b\u53ca\u7ed3\u679c<\/h5>\n

Gong \u7b49\u4e3a\u4e86\u63d0\u9ad8\u8fde\u63a5\u5904\u7684\u5f3a\u5ea6\u548c\u7535\u5b66\u6027\u80fd\uff0c\u8fd8\u5bf9\u4e0a\u8ff0\u8fde\u63a5\u5904\u8fdb\u884c\u4e86\u73af\u6c27\u6811\u8102\u590d\u5408\u5f3a\u5316\u3001\u7535\u6d41\u5f3a\u5316\u548c\u6fc0\u5149\u5f3a\u5316\u5904\u7406\uff0c\u5b9e\u9a8c\u8868\u660e\uff0c\u73af\u6c27\u6811\u8102\u590d\u5408\u5f3a\u5316\u4f7f\u8fde\u63a5\u5904 \u7684 \u5e73 \u5747 \u5f3a \u5ea6 \u548c \u5f39 \u6027 \u6a21 \u91cf \u5206 \u522b \u63d0 \u9ad8 97% \u548c155% ;\u7535\u6d41\u5f3a\u5316\u80fd\u5206\u522b\u63d0\u9ad8 21% \u548c 130% ;\u6fc0\u5149\u5f3a\u5316\u80fd\u5206\u522b\u63d0\u9ad8 56% \u548c 252% \u3002\u901a\u8fc7\u6587\u732e\u4e2d\u7684 Ra-man \u5149\u8c31\u3001SEM \u548c TEM \u7b49\u6d4b\u8bd5\u5206\u6790\u8868\u660e: \u73af\u6c27\u6811\u8102\u590d\u5408\u5904\u7406\u662f\u901a\u8fc7\u63d0\u9ad8\u63a5\u5934\u5185\u90e8\u53cc\u58c1\u78b3\u7eb3\u7c73\u7ba1\u95f4\u7684\u8f7d\u8377\u4f20\u9012\u6548\u7387\uff0c\u4ece\u800c\u4f7f\u66f4\u591a\u7684\u53cc\u58c1\u78b3\u7eb3\u7c73\u7ba1\u675f\u540c\u65f6\u627f\u8f7d\u4ee5\u663e\u8457\u63d0\u9ad8\u5f3a\u5ea6\uff0c\u800c\u7535\u6d41\u548c\u6fc0\u5149\u5f3a\u5316\u5904\u7406\u673a\u5236\uff0c\u5219\u4f7f\u957f\u4e1d\u4e4b\u95f4\u5f62\u6210\u4e86\u4e00\u5b9a\u6570\u91cf\u7684\u539f\u5b50\u7ed3\u5408\uff0c\u4ece\u952e\u8fde\u63a5\u7684\u539f\u5b50\u89d2\u5ea6\u63d0\u9ad8\u627f\u8f7d\u5f3a\u5ea6\u3002<\/p>\n

4.6 \u948e\u710a\u6280\u672f<\/strong><\/p>\n

\u948e\u710a\u662f\u91c7\u7528\u6bd4\u6bcd\u6750\u7194\u70b9\u4f4e\u7684\u948e\u6599\u548c\u710a\u4ef6\u4e00\u540c\u52a0\u70ed\uff0c\u4f7f\u948e\u6599\u7194\u5316(\u710a\u4ef6\u4e0d\u7194\u5316)\u540e\u6e7f\u6da6\u5e76\u586b\u6ee1\u6bcd\u6750\u8fde\u63a5\u7684\u95f4\u9699\uff0c\u948e\u6599\u4e0e\u6bcd\u6750\u76f8\u4e92\u6269\u6563\uff0c\u4ece\u800c\u5f62\u6210\u7262\u56fa\u8fde\u63a5\u7684\u65b9\u6cd5\u3002\u5728 CNTs \u4e92\u8fde\u7684\u8fc7\u7a0b\u4e2d\uff0c\u5404\u56fd\u5b66\u8005\u901a\u8fc7\u91c7\u7528\u4e0d\u540c\u7684\u948e\u6599\uff0c\u4e0d\u540c\u7684\u948e\u6599\u6c89\u79ef\u6280\u672f\uff0c\u5e76\u9009\u53d6\u4e0d\u540c\u7684\u52a0\u70ed\u65b9\u5f0f\uff0c\u4ee5\u5b9e\u73b0 CNTs \u4e0e CNTs\u3001\u57fa\u5e95\u7684\u8fde\u63a5\u3002<\/p>\n

Dockendorf \u7b49\u5229\u7528\u201c\u94a2\u7b14\u51b6\u539f\u7406\u6c89\u79ef\u542b\u6709\u91d1\u7eb3\u7c73\u7c92\u5b50\u7684\u58a8\u6c34\uff0c\u7136\u540e\u91c7\u7528\u4ecb\u7535\u6cf3\u6548\u5e94\u4f7f\u5355\u6839\u7684CNTs \u5bf9\u9f50\u5230\u7535\u6781\uff0c\u7136\u540e\u5c06\u5176\u653e\u5230\u70ed\u7684\u57fa\u677f\u4e0a\u8fdb\u884c\u52a0\u70ed\uff0c\u5148\u52a0\u70ed\u5230 300 \u2103\u4ee5\u4f7f\u6eb6\u5242\u84b8\u53d1\uff0c\u4f7f\u7eb3\u7c73\u7c92\u5b50\u805a\u96c6\u5230\u4e00\u8d77\uff0c\u7136\u540e\u4f7f\u7194\u70b9\u7ea6\u4e3a 864\u2103\u7684 Au \u7eb3\u7c73\u7c92\u5b50\u7194\u5316\uff0c\u518d\u7ecf\u9000\u706b\u5b9e\u73b0 CNTs \u7684\u8fde\u63a5\uff0c\u7ed3\u679c\u8868\u660e\uff0c\u4e92\u8fde\u70b9\u6709\u5f88\u597d\u7684\u4f20\u5bfc\u6027\u80fd\uff0c\u5176\u4e92\u8fde\u8fc7\u7a0b\u89c1\u56fe 11\u3002<\/p>\n

<\/h5>\n
\u56fe 11\u00a0 \u948e\u710a\u6280\u672f\u5b9e\u73b0 CNTs \u7684\u4e92\u8fde<\/h5>\n

Wu \u7b49\u91c7\u752863Ag-35. 25Cu-1. 75Ti\u5408\u91d1\u5728\u9ad8\u771f\u7a7a\u7ba1\u72b6\u7089\u4e2d\u5b9e\u73b0\u4e86\u53cc\u58c1\u78b3\u7eb3\u7c73\u7ba1\u675f ( Double walled carbon nanotubes\uff0cDWNTs) \u948e\u710a\u7684\u8fc7\u7a0b\uff0c\u5b9e\u9a8c\u5148\u5229\u7528 9 h \u5c06\u7089\u6e29\u5347\u81f3 1000 \u2103 \uff0c\u4ee5\u4f7f\u7194\u70b9\u5728 780~ 815 \u2103 \u7684\u5408\u91d1\u948e\u6599\u5145\u5206\u7194\u5316\uff0c\u6301\u7eed 10 min \u540e\uff0c\u4ee52 \u2103 \/ min\u7684\u901f\u7387\u964d\u81f3\u5ba4\u6e29\uff0c\u4f7f\u948e\u6599\u51dd\u56fa\u81f4\u4f7f DWNTs\u56fa\u8fde\uff0c\u4e0e\u6b64\u540c\u65f6\uff0c\u4f5c\u8005\u8fd8\u7814\u7a76\u4e86\u948e\u710a\u6e29\u5ea6\u5bf9\u63a5\u5934\u6297\u62c9\u5f3a\u5ea6\u7684\u5f71\u54cd\uff0c\u63a2\u7d22\u4e86 Ag-Cu-Ti \u4e0e\u78b3\u7eb3\u7c73\u7ba1\u4e4b\u95f4\u7684\u51b6\u91d1\u7ed3\u5408\u673a\u7406\uff0c\u83b7\u5f97\u4e86\u9ad8\u5f3a\u5ea6\u9ad8\u5bfc\u7535\u6027\u7684\u4e92\u8fde\u70b9\u3002<\/p>\n

4.7 \u00a0\u6ef4\u70b9\u6c89\u79ef\u3001\u5316\u5b66\u6c89\u79ef\u7684\u4e92\u8fde\u6280\u672f<\/strong><\/p>\n

\u7f8e\u56fd\u897f\u5317\u5927\u5b66\u7684 Mirkin \u6559\u6388\u7814\u7a76\u5c0f\u7ec4\u5f00\u53d1\u7684\u8638\u7b14 \u7eb3 \u7c73 \u5e73 \u7248 \u5370 \u5237 \u672f ( Dip pen nanolithography\uff0cDPN)\u662f\u4e00\u79cd\u7b80\u5355\u65b9\u4fbf\u7684\u4ece AFM \u9488\u5c16\u5230\u57fa\u5e95\u4f20\u8f93\u5206\u5b50\u7684\u65b9\u6cd5\uff0c\u5176\u5206\u8fa8\u7387\u53ef\u4e0e\u7535\u5b50\u675f\u523b\u8680\u7b49\u65b9\u6cd5\u76f8\u5ab2\u7f8e\uff0c\u53ef\u5728\u7eb3\u7c73\u5c3a\u5ea6\u8303\u56f4\u5185\u5b9e\u73b0\u591a\u7ec4\u5206\u7684\u53ef\u63a7\u7ec4\u88c5\uff0c\u5bf9\u6837\u54c1\u9700\u6c42\u91cf\u5c11\uff0c\u7834\u574f\u4f5c\u7528\u5c0f\u3002<\/p>\n

\u675c\u514b \u5927 \u5b66 \u7684 Maynor \u7b49\u5728 Mirkin \u7814\u7a76DPN \u6280\u672f\u7684\u57fa\u7840\u4e0a\uff0c\u5f00\u53d1\u4e86\u7535\u5316\u5b66 AFM \u7684 DPN \u6280\u672f\uff0c\u5c06\u9488\u5c16\u4e0e\u57fa\u5e95\u95f4\u7684\u6c34\u6ef4\u4f5c\u4e3a\u7eb3\u7c73\u5c3a\u5ea6\u7684\u7535\u89e3\u6c60\uff0c\u901a\u8fc7\u7535\u5316\u5b66\u53cd\u5e94\u8fd8\u539f\u6210\u91d1\u5c5e\u5e76\u6c89\u79ef\u5230\u57fa\u5e95\u8868\u9762\u3002 \u8fd9\u79cd\u65b9\u6cd5\u548c\u524d\u9762\u63d0\u5230\u7684\u57fa\u4e8e\u626b\u63cf\u63a2\u9488\u663e\u5fae\u955c\u9633\u6781\u6c27\u5316\u6280\u672f\u7c7b\u4f3c\u3002\u5e76\u4e14\u8fd9\u79cd\u65b9\u6cd5\u5177\u6709\u4ee5\u524d DPN \u6280\u672f\u7684\u4e00\u5207\u4f18\u70b9\uff0c\u63d0\u9ad8\u4e86\u7ed3\u6784\u7684\u70ed\u7a33\u5b9a\u6027\u548c\u5316\u5b66\u591a\u6837\u6027\u3002\u4e0a\u6d77\u4ea4\u901a\u5927\u5b66 Guo \u7b49\u5728 DPN \u6280\u672f\u7684\u57fa\u7840\u4e0a\uff0c\u53d1\u5c55\u4e86\u52a8\u6001\u7eb3\u7c73\u8638\u7b14\u5370\u5237\u6280\u672f( Combined dy-namic mode dip-pen nanolithography\uff0cCDDPN)\uff0c\u7531\u6b64\u91c7\u7528 AFM \u8fdb\u884c\u710a\u63a5\u4f4d\u7f6e\u7684\u51c6\u786e\u5b9a\u4f4d\u548c\u5bf9\u710a\u70b9\u5c3a\u5bf8\u7684\u7cbe\u786e\u63a7\u5236\uff0c\u901a\u8fc7\u94f6\u6c28\u6eb6\u6db2\u5728\u7532\u919b\u73af\u5883\u4e0b\u53d1\u751f\u94f6\u955c\u53cd\u5e94\u5b9e\u73b0\u4e86\u7eb3\u7c73\u7ba1\/ \u7ebf\u95f4\u7684\u8fde\u63a5\uff0c\u89c1\u56fe 12\u3002<\/p>\n

<\/h5>\n
\u56fe 12\u00a0 CDDPN \u5b9e\u73b0 CNTs \u7684\u4e92\u8fde<\/h5>\n

\u6b64 CD-DPN \u7eb3\u7c73\u8fde\u63a5\u65b9\u6cd5\u53ef\u5728\u4fdd\u8bc1\u673a\u68b0\u6027\u80fd\u3001\u7535\u5b66\u6027\u80fd\u7684\u524d\u63d0\u4e0b\uff0c\u5b9e\u73b0\u7eb3\u7c73\u7ebf\u95f4\u7684\u8fde\u63a5\uff0c\u82e5 CNTs \u642d\u63a5\u5934\u9700\u8981\u6c89\u79ef\u975e\u94f6\u91d1\u5c5e\u6750\u6599(\u5982 Au\u3001Cu \u7b49)\uff0c\u5219\u9700\u7814\u7a76\u7c7b\u4f3c\u94f6\u955c\u53cd\u5e94\u7684\u5316\u5b66\u8fc7\u7a0b\u4ee5\u5b9e\u73b0\u975e\u94f6\u91d1\u5c5e\u7684\u8fd8\u539f\u64cd\u4f5c\uff0c\u4ece\u800c\u62d3\u5c55\u7eb3\u7c73\u8fde\u63a5\u8fdb\u4e00\u6b65\u7684\u5e94\u7528\u7814\u7a76\u3002<\/p>\n

5\u00a0<\/strong>\u78b3\u7eb3\u7c73\u7ba1\u4e92\u8fde\u6280\u672f\u7684\u5e94\u7528\u524d\u666f<\/strong><\/span><\/p>\n

\u968f\u7740\u7eb3\u7c73\u79d1\u5b66\u7684\u53d1\u5c55\uff0c\u65b0\u7684\u7eb3\u7c73\u7ed3\u6784\u3001\u7eb3\u7c73\u6750\u6599\u53ca\u5176\u5353\u8d8a\u6027\u80fd\u4e0d\u65ad\u88ab\u4eba\u4eec\u53d1\u73b0\u548c\u8ba4\u8bc6\uff0c\u5b8c\u7f8e\u7684\u5185\u5728\u5bfc\u7ebf\u4e92\u8fde\u6280\u672f\u5c06\u4f1a\u9884\u793a\u9ad8\u6027\u80fd\u88c5\u5907\u5236\u9020\u7684\u5e7f\u9614\u5e94\u7528\u524d\u666f\uff0c\u4f46\u4e5f\u5bf9\u5236\u9020\u79d1\u5b66\u57fa\u7840\u7814\u7a76\u63d0\u51fa\u4e86\u6311\u6218\uff0c\u7531\u6b64\u6210\u4e3a\u4e16\u754c\u5404\u56fd\u9ad8\u79d1\u6280\u7ade\u4e89\u7684\u7126\u70b9\u3002<\/p>\n

5.1 \u9ad8\u80fd\u6548\u71c3\u6599\u7535\u6c60<\/strong><\/p>\n

\u56e0\u78b3\u7eb3\u7c73\u7ba1\u9ad8\u8fbe 2 000 m2<\/sup> \/ g \u7684\u9762\u79ef\u8d28\u91cf\u6bd4\uff0c\u53ef\u4f7f\u71c3\u6599\u7535\u6c60\u8868\u9762\u5316\u5b66\u53cd\u5e94\u9762\u79ef\u4ea7\u751f\u8d28\u7684\u98de\u8dc3\uff0c\u4ece\u800c\u5927\u5e45\u5ea6\u63d0\u9ad8\u6c22\u80fd\u8f6c\u6362\u6548\u7387\u3002 \u4f46\u5176\u5236\u9020\u8fc7\u7a0b\u9700\u8981\u78b3\u7eb3\u7c73\u7ba1\u4e4b\u95f4\u4e92\u8fde\u3001\u4ee5\u53ca\u78b3\u7eb3\u7c73\u7ba1\u4e0e\u5916\u90e8\u5668\u4ef6\u548c\u88c5\u7f6e\u7684\u7eb3-\u5fae-\u5b8f\u8de8\u5c3a\u5ea6\u8fde\u63a5\u5236\u9020\u6280\u672f\uff0c\u81f4\u4f7f\u5728\u4e92\u8fde\u8fc7\u7a0b\u4e2d\u9700\u8981\u8003\u8651\u7eb3\u7c73\u5c3a\u5ea6\u4e0b\u7684\u91cf\u5b50\u529b\u5b66\u6548\u5e94\u3001\u8fde\u63a5\u754c\u9762\u7684\u7269\u7406\u5316\u5b66\u4f5c\u7528\u673a\u5236\u7b49\u79d1\u5b66\u95ee\u9898\u3002\u4f46\u662f\uff0c\u8981\u5b9e\u73b0\u7eb3\u7c73\u7ed3\u6784\u71c3\u6599\u7535\u6c60\u7684\u5de5\u4e1a\u5e94\u7528\uff0c\u8fd8\u9700\u8981\u89e3\u51b3\u7eb3\u7c73\u6750\u6599(\u5982\u78b3\u7eb3\u7c73\u7ba1)\u7684\u4f4e\u6210\u672c\u3001\u5927\u6279\u91cf\u5236\u9020\u4ee5\u53ca\u7eb3\u7c73\u7ed3\u6784\u4e0e\u201c\u7eb3-\u5fae-\u4ecb\u89c2-\u5b8f\u89c2\u51b6\u5c3a\u5ea6\u5668\u4ef6\u7684\u8fde\u63a5\u3001\u88c5\u914d\u548c\u8de8\u5c3a\u5ea6\u96c6\u6210\u7b49\u6280\u672f\uff0c\u6240\u4ee5\u78b3\u7eb3\u7c73\u7ba1\u53ca\u5176\u4e92\u8fde\u6280\u672f\u662f\u5236\u9020\u9ad8\u80fd\u6548\u71c3\u6599\u7535\u6c60\u7684\u672a\u6765\u7814\u7a76\u7684\u91cd\u70b9.<\/p>\n

5.2 \u5927\u89c4\u6a21\u96c6\u6210\u7535\u8def<\/strong><\/p>\n

\u6839\u636e\u56fd\u9645\u534a\u5bfc\u4f53\u6280\u672f\u84dd\u56fe\uff0c2010 ~ 2019 \u5e74\u82af\u7247\u5236\u9020\u7684\u53d1\u5c55\u8def\u7ebf\u4e3a:DRAM \u7ebf\u5bbd:45-32-22 -16nm\uff0c\u51f8\u70b9\u95f4\u8ddd:20-15-10-5 nm\u3002 \u7ebf\u5bbd\u7684\u91cf\u53d8\u5bfc\u81f4\u5236\u9020\u539f\u7406\u548c\u4e92\u8fde\u5de5\u827a\u7684\u8d28\u53d8\uff0c\u9700\u8981\u5176\u88c5\u5907\u53ca\u5236\u9020\u4e92\u8fde\u6d41\u7a0b\u4e0d\u65ad\u8fdb\u884c\u6280\u672f\u5347\u7ea7\u548c\u53d8\u9769\u3002\u7f8e\u56fd\u7ebd\u7ea6\u5dde\u4f26\u65af\u52d2\u7406\u5de5\u5b66\u9662\u79d1\u5b66\u5bb6\u7684\u6700\u65b0\u8bd5\u9a8c\u663e\u793a\uff0c\u5728 45 nm \u53ca\u4ee5\u4e0b\u7684\u5236\u9020\u5de5\u827a\u4e2d\uff0c\u78b3\u7eb3\u7c73\u7ba1\u6750\u6599\u7684\u6027\u80fd\u5df2\u7ecf\u8d85\u8fc7\u76ee\u524d\u666e\u904d\u4f7f\u7528\u7684\u94dc\u4e92\u8fde\u5de5\u827a\uff0c\u91c7\u7528\u78b3\u7eb3\u7c73\u7ba1\u6765\u4f5c\u4e3a\u82af\u7247\u4e0a\u4e92\u8fde\u5bfc\u7ebf\u7684\u6750\u6599\uff0c\u53ef\u4ee5\u964d\u4f4e\u963b\u6297\uff0c\u4ece\u800c\u964d\u4f4e\u529f\u7387\uff0c\u5305\u542b\u8be6\u7ec6\u91cf\u5b50\u6548\u5e94\u7684\u82af\u7247\u6a21\u62df\u8bd5\u9a8c\u8868\u660e:CNTs\u53ef\u7528\u4f5c 3D \u4e92\u8fde\u6750\u6599\uff0c\u7535\u6d41\u5bc6\u5ea6\u9ad8\u51fa\u94dc\u4e92\u8fde\u7ebf\u4e09\u4e2a\u6570\u91cf\u7ea7\u3002<\/p>\n

5.3 \u9ad8\u8d28\u91cf\u7eb3\u7c73\u5668\u4ef6<\/strong><\/p>\n

\u76ee\u524d\uff0c\u5229\u7528\u7eb3\u7c73\u7ed3\u6784\u6216\u7eb3\u7c73\u6750\u6599\u7684\u67d0\u4e9b\u5178\u578b\u7279\u5f81\u4ee5\u53ca\u76f8\u5173\u7684\u4e92\u8fde\u5de5\u827a\uff0c\u5df2\u5f00\u53d1\u51fa\u9762\u5411\u73af\u5883\u3001\u75be\u75c5\u76d1\u6d4b\u7684\u6781\u9ad8\u7075\u654f\u5ea6\u6c14\u4f53\u3001 \u86cb\u767d\u7b49\u7eb3\u7c73\u4f20\u611f\u5668\u4e0e\u7cfb\u7edf\u3002 \u5df4\u897f\u548c\u7f8e\u56fd\u79d1\u5b66\u5bb6\u91c7\u7528 CNTs \u53d1\u660e\u4e86\u7cbe\u5ea6\u5728 10 -17 kg \u7cbe\u5ea6\u7684\u201c\u7eb3\u7c73\u79e4\u201d\uff0c\u80fd\u591f\u79f0\u91cf\u5355\u4e2a\u75c5\u6bd2\u7684\u8d28\u91cf\uff0c\u968f\u540e\u5fb7\u56fd\u79d1\u5b66\u5bb6\u7814\u5236\u51fa\u80fd\u79f0\u91cf\u5355\u4e2a\u539f\u5b50\u7684\u201c\u7eb3\u7c73\u79e4\u201d\u3002 \u7eb3\u7c73\u654f\u611f\u7ed3\u6784\u662f\u7eb3\u7c73\u4f20\u611f\u5668\u4e0e\u7cfb\u7edf\u7684\u6838\u5fc3\uff0c\u4f46\u8981\u5c06\u5176\u7eb3\u7c73\u5c3a\u5ea6\u4e0b\u7684\u4f18\u826f\u7279\u6027\u8f6c\u5316\u6210\u5b8f\u89c2\u7684\u529f\u80fd\uff0c\u9700\u8981\u4e0e\u5fae\u7535\u6781\u3001\u5b8f\u89c2\u5668\u4ef6\u8f7d\u4f53\u8fdb\u884c\u8de8\u5c3a\u5ea6\u8fde\u63a5\u4e0e\u5c01\u88c5\uff0c\u662f CNTs \u5b9e\u73b0\u529f\u80fd\u5316\u3001\u5668\u4ef6\u5316\u548c\u4ea7\u54c1\u5316\u7684\u91cd\u8981\u73af\u8282\u548c\u5173\u952e\u6280\u672f\u3002\u968f\u7740\u7eb3\u7c73\u529f\u80fd\u5668\u4ef6\u9010\u6e10\u5411\u4e09\u7ef4\u96c6\u6210\u7ed3\u6784\u548c\u5b9e\u7528\u5316\u53d1\u5c55\uff0c\u8de8\u5c3a\u5ea6\u7ed3\u6784\u4e0e\u5668\u4ef6\u7684\u6392\u5217\u3001\u64cd\u7eb5\u4e0e\u4e92\u8fde\u6210\u4e3a\u7eb3\u7c73\u5236\u9020\u4e2d\u7684\u91cd\u8981\u7814\u7a76\u65b9\u5411\u4e4b\u4e00\u3002 \u901a\u8fc7\u5bf9 CNTs \u7684\u6392\u5217\u3001\u64cd\u7eb5\u3001\u4e92\u8fde\u7b49\u8fc7\u7a0b\uff0c\u7ecf\u5386\u7eb3-\u5fae-\u5b8f\u4e0d\u540c\u5c3a\u5ea6\u7684\u5236\u9020\u8fc7\u7a0b\u6f14\u53d8\uff0c\u53ef\u4ee5\u5236\u9020\u51fa\u5177\u6709\u66f4\u9ad8\u6027\u80fd\u7684\u5b8f\u89c2\u5668\u4ef6\u4e0e\u7cfb\u7edf\uff0c\u5176\u5236\u9020\u5de5\u827a\u8fc7\u7a0b\u4e0e\u88c5\u5907\u662f\u7eb3\u7c73\u5236\u9020\u9762\u4e34\u7684\u91cd\u5927\u6311\u6218\u4e4b\u4e00\uff0c\u800c\u57fa\u4e8e\u5c3a\u5ea6\u6548\u5e94\u7684\u78b3\u7eb3\u7c73\u7ba1\u4e92\u8fde\u6280\u672f\u5c06\u6210\u4e3a\u8be5\u65b9\u5411\u7814\u7a76\u7684\u5173\u952e\u3002<\/p>\n

6 \u00a0<\/strong>\u7ed3\u8bba<\/strong><\/span><\/h3>\n

\u968f\u7740\u7eb3\u7c73\u79d1\u5b66\u7684\u53d1\u5c55\uff0c\u78b3\u7eb3\u7c73\u7ba1\u5c06\u4f1a\u5728\u9ad8\u6027\u80fd\u88c5\u5907\u5236\u9020\u4e2d\u8868\u73b0\u51fa\u5e7f\u9614\u7684\u5e94\u7528\u524d\u666f\uff0c\u5c3d\u7ba1 CNTs \u5728\u4e92\u8fde\u65b9\u9762\u663e\u793a\u51fa\u975e\u5e38\u5927\u7684\u6f5c\u529b\uff0c\u4f46\u662f\u771f\u6b63\u5c06\u5176\u5e94\u7528\u5230\u5b9e\u9645\u7684\u96c6\u6210\u7535\u8def\u3001\u5fae\u7eb3\u7c73\u529f\u80fd\u5668\u4ef6\u4e2d\uff0c\u8de8\u5c3a\u5ea6\u8fde\u63a5\u8fd8\u5c06\u9762\u4e34\u5f88\u591a\u6311\u6218\uff0c\u4e0d\u4ec5\u6d89\u53ca\u4e92\u8fde\u5de5\u827a\u7684\u95ee\u9898\uff0c\u8fd8\u6d89\u53ca\u6700\u7ec8\u529f\u80fd\u5668\u4ef6\u7684\u53ef\u9760\u6027\u53ca\u7a33\u5b9a\u6027\u95ee\u9898\u3002 \u672c\u6587\u7b80\u8ff0\u4e86 CNTs \u7684\u4f5c\u4e3a\u4e92\u8fde\u5bfc\u7ebf\u7684\u4f18\u5f02\u6027\u80fd\u53ca\u4e92\u8fde\u5f62\u5f0f\uff0c\u4ee5\u53ca CNTs \u4e92\u8fde\u6280\u672f\u7684\u6700\u65b0\u7814\u7a76\u8fdb\u5c55\uff0c\u4f34\u968f\u7740\u7eb3\u7c73\u79d1\u6280\u7684\u8fdb\u6b65\uff0c\u57fa\u4e8e\u5c3a\u5ea6\u6548\u5e94\u7684 CNTs \u4e92\u8fde\u6280\u672f\u5df2\u6210\u4e3a\u7814\u7a76\u70ed\u70b9\uff0c\u9ad8\u6548\u3001\u9ad8\u8d28\u3001\u7cbe\u786e\u53ef\u63a7\u3001\u7b80\u5355\u65b9\u4fbf\u3001\u7eff\u8272\u7684 CNTs \u4e09\u7ef4\u64cd\u7eb5\u4e0e\u4e92\u8fde\u6280\u672f\u5c06\u9762\u4e34\u7740\u66f4\u5927\u7684\u6311\u6218\u3002<\/p>\n

\u539f\u6587\u94fe\u63a5\uff1a<\/strong>\u300a\u78b3\u7eb3\u7c73\u7ba1\u4e92\u8fde\u6280\u672f\u6700\u65b0\u8fdb\u5c55\u300b<\/a><\/p>\n

\u672c\u6587\u7531\u6750\u6599\u4eba\u7f16\u8f91\u90e8\u5b66\u672f\u5e72\u8d27\u7ec4 \u5927\u5b8b\u3001\u8def\u6960 \u4f9b\u7a3f\uff0c\u6750\u6599\u725b\u7f16\u8f91\u6574\u7406\u3002<\/p>\n

\u6750\u6599\u4eba\u7f51\u4e13\u6ce8\u4e8e\u8ddf\u8e2a\u6750\u6599\u9886\u57df\u79d1\u6280\u53ca\u884c\u4e1a\u8fdb\u5c55\uff0c\u8fd9\u91cc\u6c47\u96c6\u4e86\u5404\u5927\u9ad8\u6821\u7855\u535a\u751f\u3001\u4e00\u7ebf\u79d1\u7814\u4eba\u5458\u4ee5\u53ca\u884c\u4e1a\u4ece\u4e1a\u8005\uff0c\u5982\u679c\u60a8\u5bf9\u4e8e\u8ddf\u8e2a\u6750\u6599\u9886\u57df\u79d1\u6280\u8fdb\u5c55\uff0c\u89e3\u8bfb\u9ad8\u6c34\u5e73\u6587\u7ae0\u6216\u662f\u8bc4\u8ff0\u884c\u4e1a\u6709\u5174\u8da3\uff0c\u70b9\u6211\u52a0\u5165\u7f16\u8f91\u90e8<\/a>\u3002<\/p>\n

\u6750\u6599\u4eba\u7f51\u5411\u5404\u5927\u56e2\u961f\u8bda\u5fc3\u7ea6\u7a3f\uff0c\u8bfe\u9898\u7ec4\u6700\u65b0\u6210\u679c\u3001\u65b9\u5411\u603b\u7ed3\u3001\u56e2\u961f\u8bbf\u8c08\u3001\u5b9e\u9a8c\u6280\u80fd\u7b49\u7686\u53ef\u6295\u7a3f\uff0c\u4f18\u79c0\u7a3f\u4ef6\u4e00\u7ecf\u5f55\u7528\uff0c\u6211\u4eec\u4f1a\u5949\u4e0a\u7a3f\u916c\uff0c\u8bf7\u8054\u7cfb\uff1a\u90ae\u7bb1tougao@cailiaoren.com \u6216 QQ\uff1a97482208\u3002<\/p>\n

\u4eea\u5668\u8bbe\u5907\u3001\u8bd5\u5242\u8017\u6750\u3001\u6750\u6599\u6d4b\u8bd5\u3001\u6570\u636e\u5206\u6790\uff0c\u627e\u6750\u6599\u4eba<\/a>\u3001\u4e0a\u6d4b\u8bd5\u8c37<\/a>\uff01<\/p>\n","protected":false},"excerpt":{"rendered":"

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